JP2937918B2 - Image measuring device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an image measuring device such as a microscope measuring device and a non-contact three-dimensional measuring device.
The present invention relates to an NC (Computer Numerical Control) image measuring device or the like, which relates to an image measuring device having a function of moving an imaging position of a camera within a measurable range including a measurement target (hereinafter, referred to as stage movement).

[0002]

2. Description of the Related Art In a conventional CNC three-dimensional measuring machine, microscope and projector, when measuring a work to be measured, a necessary portion is enlarged and displayed at a magnification as large as possible to perform a necessary measurement. After that, the operation of moving the stage to display the next measurement position and positioning the imaging position of the camera at the next measurement position of the workpiece is repeated. Therefore, when there are many measurement points, the operation of moving the stage frequently occurs.

Conventionally, in a CNC machine or the like, such a stage movement is performed by using a drive command input device such as a joystick or a jog shuttle while visually confirming the relative positional relationship between the camera of the measuring instrument body and the work. ing. In this case, in the image measuring device, the stage must be moved while sequentially viewing the measuring device main body, the drive command input device, and the imaging screen (CRT) of the camera. There is a problem that work efficiency is poor.

[0004]

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and an object of the present invention is to provide an image measuring apparatus capable of simplifying a stage moving operation and greatly improving the efficiency of a measuring operation. With the goal.

[0005]

A first image measuring apparatus according to the present invention comprises: a table on which an object to be measured is mounted; an imaging means for imaging the object to be measured mounted on the table;
Display means for displaying an image taken by the imaging means;
Measurement processing means for performing a predetermined measurement process based on the imaged image; driving means for changing an imaging position of the imaging means with respect to the object to be measured; A video window in which the displayed image is displayed is set, and horizontal and vertical axes intersecting at the center thereof and arrow-shaped movement instruction icons arranged at both ends of the axes are displayed in the video window. Outputting a command to the drive unit to change an imaging position of the imaging unit with respect to the measurement target at a preset pitch in a preset direction when the movement instruction icon is instructed by a click operation. Control means.

In a second image measuring apparatus according to the present invention, instead of the above-mentioned control means, the control means sets a video window on which the image picked up by the image pickup means is displayed on the display means. In the video window, horizontal and vertical axes intersecting at the center thereof and a movement instruction icon arranged at the intersection are displayed, and the movement instruction icon is dragged from the intersection of the horizontal and vertical axes by a drag operation. When being moved, a command is outputted to the driving means so as to change the imaging position of the imaging means with respect to the object to be measured at a speed corresponding to a distance between the intersection point and the movement instruction icon in the direction from the intersection position to the movement instruction icon. Characterized in that:

In a third image measuring apparatus according to the present invention, instead of the above-mentioned control means, the control means sets a video window on which an image picked up by the image pickup means is displayed on the display means. Displaying the horizontal and vertical axes in the video window and the movement instruction icons for each axis direction that are in contact with the periphery of the video window, and dragging the movement instruction icon from the position of the horizontal and vertical axes Changing the imaging position of the imaging unit with respect to the object to be measured in a direction specified by the icon at a speed corresponding to the distance from the horizontal and vertical axis arrangement positions to the movement instruction icon when the icon is moved For the purpose of outputting a command to the driving means.

In a fourth image measuring apparatus according to the present invention, instead of the above-mentioned control means, the control means comprises a video window in which an image taken by the imaging means is displayed on the display means, and a video window provided by the imaging means. A graphics window for displaying a virtual image of the stage to be imaged is set, and the stage range and the imaging range of the imaging unit in that range are displayed in the graphics window, and the graphics window is displayed in the graphics window. When a movement position is designated, a command is outputted to the driving means to move the imaging position to the designated movement position.

According to the present invention, horizontal and vertical axes intersecting at the center of the video window of the display means and arrow-shaped movement instruction icons arranged at both ends thereof are displayed, and the movement instruction icon is displayed. By clicking, a command is output to the drive means to change the imaging position with respect to the object to be measured, so the horizontal and vertical axes etc. are used as a guide while viewing only the image of the object to be measured in the video window. To adjust the imaging position,
Operability is greatly improved. Moreover, according to the present invention,
Since the imaging position with respect to the object to be measured moves in a horizontal or vertical direction at a predetermined pitch, the workability when sequentially measuring the object to be measured placed at a constant pitch on a table or a circular element therein, for example, is high. It is much better than before.

According to the second image measuring device of the present invention, when the movement instruction icon arranged at the intersection of the horizontal and vertical axes arranged in the video window is moved by drag operation, the horizontal and vertical axes are moved. The imaging position moves in the moving direction of the icon from the intersection at a speed corresponding to the distance between the intersection and the movement instruction icon. For this reason, the imaging position can be very easily moved in an arbitrary direction at an arbitrary speed, and the efficiency of the operation of positioning the imaging position is greatly improved.

According to the third image measuring device of the present invention, the movement instruction icon for each axis direction which is in contact with the horizontal and vertical axes in the video window around the video window is moved to the horizontal and vertical axes by the drag operation. On the other hand, when it is moved in the horizontal or vertical direction at a speed corresponding to the moving distance, the control when moving in the horizontal or vertical uniaxial direction becomes easy.

According to the fourth image measuring apparatus of the present invention, a graphics window is provided in addition to the video window, and the stage range and the imaging range in the range are displayed in the graphics window. By instructing the movement position of the imaging range, the imaging position with respect to the measurement target is changed, so that the imaging range can be quickly moved to a required position while referring to the entire movable range. Will be possible.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a perspective view showing the overall configuration of a CNC image measuring device according to one embodiment of the present invention. The apparatus comprises a non-contact image measurement type measuring machine main body 1 and a computer system 2 which controls the driving of the measuring machine main body 1 and executes necessary measurement data processing.
And a command input unit 3 for manually operating the measuring instrument body 1 and a printer 4 for printing out the measurement results.

The measuring device main body 1 is configured as follows. That is, the work 1 to be measured is placed on the gantry 11.
2 is mounted, and the measurement table 13 is driven in the Y-axis direction by a Y-axis drive mechanism (not shown). An upwardly extending frame 14 is fixed to the rear end of the gantry 11.
A CCD camera 16 driven by an X-axis and Z-axis driving mechanism (not shown) is attached to the inside of a cover 15 projecting from the upper part to the front so as to face the measuring table 13 from the upper part. The work 1 is located at the lower end of the CCD camera 16.
2 is provided with a ring-shaped illumination device 17 for irradiating the illumination light.

The computer system 2 includes a computer main body 21, a keyboard 22, a mouse 23, and a CRT display 24. This system centered on the computer main body 21 is configured, for example, as shown in FIG. That is, the image signal of the work 12 captured by the CCD camera 16 is converted into multi-valued image data by the AD converter 31 and stored in the multi-valued image memory 32.
The multivalued image data stored in the multivalued image memory 32 is displayed on the CRT display 24 by the operation of the display control unit 33. On the other hand, operator commands from the keyboard 22 and the mouse 23 are transmitted to an interface (I / F) 34.
Is transmitted to the CPU 35 via. The CPU 35 executes various processes such as stage movement in accordance with instructions from the operator or programs stored in the program memory 36. The work memory 37 provides a work area for various processes of the CPU 35.

An X-axis encoder 41 and a Z-axis encoder 43 for detecting the position of the CCD camera 16 in the X-axis direction and the Z-axis direction, and a Y-axis encoder 42 for detecting the position of the table 13 in the Y-axis direction. Is provided,
Outputs from these encoders 41 to 43 are taken into the CPU 35. The CPU 35 drives the CCD camera 16 in the X-axis and Z-axis directions via the X-axis drive system 44 and the Z-axis drive system 46 based on the acquired information on each axis position and the above-mentioned operator's instruction. The table 13 is driven in the Y-axis direction via the shaft drive system 45. Thus, a stage moving operation is realized. Furthermore, the lighting control unit 39
An analog command voltage is generated based on the command value generated by the PU 35 and applied to the lighting device 17.

Next, the stage moving operation of the image measuring apparatus thus configured will be described. FIG. 3 is a diagram showing a display screen of the CRT display 24 at the time of measurement by this image measuring device. The display screen includes a color video window 51, a graphics window 52, a counter window 53, a function window 54, an illumination / stage window 55, and a measurement window 56. The color video window 51 has a CCD
A color image captured by the camera 16 is displayed. In the graphics window 52, a virtual image of the stage captured by the CCD camera 16 is displayed, and as one display form, an image in a range wider than the imaging range of the CCD camera 16 (for example, a stage range) is displayed. You. In the counter window 53, the center coordinates (X, Y,
Z) is displayed. In the function window 54, icons for activating a microprogram for various measurement processes and calculation of measured values are arranged. illumination·
The stage window 55 is a window for various setting operations regarding the lighting device 17 and the stage. The measurement window 56 is a window for performing a measurement operation according to the measurement microprogram selected in the function window 54.

The video window 51 has X (horizontal) axes 61 and Y orthogonal to each other having an intersection at the center thereof.
Since the (vertical) axis 62 is displayed, the measurement position is easily positioned by arranging the measurement site at these intersections. These X axis lines 61
And arrow-shaped movement instruction icons 61a, 61b, 6 pointing in opposite directions to each other in the respective axial directions.
2a and 62b are provided. Now, as shown in FIG. 4, these icons 61a, 61b, 62a, 62b
When one of them is clicked with the pointer 63 of the mouse 23, the position of the CCD camera 16 with respect to the stage as shown in FIG. The position moves in the direction indicated by the arrow of the clicked icon. At this time, the moving direction and the moving pitch are set to arbitrary values in advance by a setting operation. When the click button of the mouse 23 is kept pressed, the stage moving operation at the above-described pitch is repeated.

FIG. 5 is a flow chart of the CPU 35 for realizing this processing. When a click event of the movement instruction icon 61a occurs, the X-axis drive system 44 is controlled to move the CCD camera 16 by a set distance in a preset direction (S1). Then, the timer is started and waits for a predetermined time (S2), and it is determined whether or not the click button of the mouse 23 is kept pressed (S2).
3). If the button is kept depressed, the CCD camera 16 is moved again by the set distance (S1). When the other movement instruction icons 61b, 62a, and 62b are clicked, the CCD camera 16 (in the X-axis direction) or the measurement table 13 (in the X-axis direction) at the specified pitch in the specified direction by the same processing. (Y-axis direction).

According to such a stage moving operation, the operator can perform all the operations related to the stage moving while viewing only the limited area of the display screen of the CRT display 24, particularly the video window 51. Becomes extremely good. Moreover, as in this example, the X-axis 61 and the Y-axis 6
2 are displayed, so that, for example, the center of the circle to be measured is first aligned with the X-axis 61 or the Y-axis 62,
If the imaging range with respect to the stage is then moved along each of these axis directions, positioning is extremely easy, and the range in which the mouse pointer 63 is moved during that time is limited within the video window 51. The range of movement of the line of sight is narrow, resulting in less fatigue during operation. Further, when measuring the work 12 arranged at a constant pitch or the holes arranged at a constant pitch in the work 12, if the pitch of the stage movement is previously adjusted to these arrangement pitches, the next click can be performed by one click operation. There is also an advantage that the measurement point can be arranged at the center of the video window 51.

FIG. 6 is a diagram for explaining a stage moving method according to another embodiment of the present invention. In this embodiment, for example, a black circle-shaped movement instruction icon 71 is displayed at the intersection of the X-axis line 61 and the Y-axis line 62 in the video window 51 as shown in FIG. As described above, by moving the icon 71 by the drag operation of the mouse 23, the stage movement is realized. The stage moving direction at this time is a direction from the intersection of the X-axis line 61 and the Y-axis line 62 to the dragged icon 71,
As compared with the above-described embodiment, there is an advantage that the stage can be moved not only in the X-axis direction and the Y-axis direction but also in any direction. The moving speed is set so as to be proportional to the distance between the intersection of the X-axis line 61 and the Y-axis line 62 and the dragged icon 71. Thereby, the moving speed can be adjusted only by the drag operation, and the operability is further improved. The operator usually looks closely at the center position of the video window 51 in order to position the part to be measured at the center of the video window 51. Therefore, when the movement instruction icon 71 is arranged at the center position in this way, the range of movement of the eyes can be further limited than in the previous embodiment, and the degree of fatigue during operation can be further reduced.

In this embodiment, the auxiliary window 72 and the auxiliary window 72 are provided at the lower end and the left end of the video window 51, respectively.
73 are provided. These auxiliary windows 72 and 73
Include arrow-shaped movement instruction icons 74 that match the lower and left ends of the Y-axis 61 and the X-axis 62, respectively.
75 are provided. These icons 74, 75
As shown in FIGS. 6C and 6D, when the mouse is dragged from the Y-axis 61 or the X-axis 62 by dragging the mouse 23, the stage can be moved only in the X-axis direction or only in the Y-axis direction. Can be. At this time, the moving speed and the moving direction are also indicated by the icons 7 dragged from the respective axes.
Determined by distance and orientation up to 4,75. This operation complements the above-described stage movement in an arbitrary direction, and is convenient when it is desired to move the stage only in the X-axis direction or only in the Y-axis direction.

FIG. 7 is a flowchart of the CPU 35 for realizing the stage movement according to this embodiment. When a drag event of the mark moving icon 71 occurs, this flow is started. First, the direction and distance from the center position of the video window 51 to the current position of the icon 71 are determined (S11). CCD camera 16 and measurement table 1 at a speed corresponding to the distance determined in the determined direction.
3 is moved (S12). This is repeated while dragging (S13). When the drag ends, the icon 71 returns to the center, and the stage stops. For the icons 74 and 75, the stage can be moved by the same processing.

FIG. 8 is a view for explaining a stage moving method according to still another embodiment of the present invention. In each of the above embodiments, the stage is moved by operating the video window 51. In this embodiment, the stage is instructed by operating the graphics window 52 provided corresponding to the video window 51. In the graphics window 52, a frame 81 indicating the stage size is displayed. A work image 82 is displayed in the frame 81. A small frame 8 overlapping this image 82
Reference numeral 3 denotes an imaging range of the CCD camera 16 displayed in the video window 51. The display in the graphics window 52 can also be shown by enlarging any part. The following method is conceivable for acquiring the image 82.

1. Elements of the measurement result (measured circle, line,
(Points and other figures) are converted into image data and displayed. 2. Imports and displays CAD data created at the time of work design. Of the above methods, one method is to generate image data every time measurement data is obtained. At the first measurement, an image cannot be displayed, but the work 12 is measured once. Thereafter, the same work 12 can be used for stage movement when repeatedly measuring. The method 2 can be used immediately after the measurement is started if the CAD data is fetched first. In any case, it is necessary to match the stage coordinates and the coordinates of the graphics data in advance.

FIG. 9 is a flowchart showing a process for implementing the first method. First, a stage size and stage origin coordinates are input (S21). Next, a frame of the stage size and a frame of the imaging range based on the magnification of the camera are displayed (S22). Then, the measurement is started (S2
3) Generate and display graphic elements from the measurement results (S2)
4). When this is repeated for all measurement points (S2
5) The image of the work 12 is completed in the graphics window 52. This image data is saved as a file (S26) and used for subsequent measurements.

To move the stage, a position to be moved within the frame 81 is designated and clicked. FIG.
When a click event in the frame 81 occurs, the current coordinates of the pointer 63 are read (S31), as shown in FIG.
These coordinates are converted to a stage coordinate system (S32). Then, the stage is moved to the converted coordinates and the frame 83 is moved (S33). In addition, select the CAD data or the element of the measurement result and coordinate the element (center of circle, etc.)
May be moved.

According to this embodiment, since the position of the entire stage to be moved can be known at a glance, the efficiency of the stage moving operation at the time of measurement is further improved.
In addition, operability improvement and speedup of online teaching can be expected.

[0029]

As described above, according to the present invention, a video window, a graphics window, etc.
Since the stage movement operation can be always performed only by the operation within the limited range of the visual observation, there is an effect that the efficiency of the measurement operation can be greatly improved.

[Brief description of the drawings]

FIG. 1 is a perspective view of a CNC image measuring device according to an embodiment of the present invention.

FIG. 2 is a block diagram showing a configuration of a computer system and peripherals in the same apparatus.

FIG. 3 is a diagram showing a display screen of a CRT display in the device.

FIG. 4 is a diagram for explaining a stage moving method in the apparatus.

FIG. 5 is a flowchart of a process for realizing the stage moving method.

FIG. 6 is a view for explaining a stage moving method according to another embodiment of the present invention.

FIG. 7 is a flowchart of a process for realizing the stage moving method.

FIG. 8 is a view for explaining a stage moving method according to still another embodiment of the present invention.

FIG. 9 is a flowchart of an image acquisition process in the stage moving method.

FIG. 10 is a flowchart of a process for realizing the stage moving method.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Measuring machine main body, 2 ... Computer system, 3 ... Command input part, 4 ... Printer, 11 ... Base, 12 ... Work, 1
3 ... measurement table, 14 ... frame, 15 ... cover, 1
6 CCD camera, 17 lighting device, 21 computer body, 22 keyboard, 23 mouse, 24 CR
T display, 31 AD converter, 32 multi-value image memory, 33 display controller, 34 interface, 35
... CPU, 36 ... Program memory, 37 ... Work memory, 39 ... Lighting control unit, 41 ... X-axis encoder, 42 ...
Y-axis encoder, 43: Z-axis encoder, 44: X-axis drive system, 45: Y-axis drive system, 46: Z-axis drive system.

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁶ , DB name) G01B 11/00-11/30 G01B 21/00-21/30

Claims (6)

(57) [Claims] 1. A table on which an object to be measured is mounted, an imaging unit for imaging the object to be measured mounted on the table, a display unit for displaying an image imaged by the imaging unit; Measurement processing means for performing a predetermined measurement process based on the captured image; driving means for changing an imaging position of the imaging means with respect to the measured object; and an image captured by the imaging means on the display means. A video window to be displayed is set, and horizontal and vertical axes intersecting at the center thereof and arrow-shaped movement instruction icons arranged at both ends of the axes are displayed in the video window. When the instruction icon is instructed by a click operation, the imaging position of the imaging means with respect to the measured object is changed at a preset pitch in a preset direction. Image measuring apparatus characterized by comprising a control means for outputting a command to Rubeku said drive means. 2. A table on which an object to be measured is mounted, an imager for imaging the object to be measured mounted on the table, a display means for displaying an image imaged by the imager, Measurement processing means for performing a predetermined measurement process based on the captured image; driving means for changing an imaging position of the imaging means with respect to the measured object; and an image captured by the imaging means on the display means. A video window to be displayed is set, and horizontal and vertical axes intersecting at the center of the video window and a movement instruction icon arranged at the intersection are displayed in the video window, and the movement instruction icon is set to the horizontal position. And a speed corresponding to a distance between the intersection point and the movement instruction icon in the direction from the intersection position to the movement instruction icon when moved by a drag operation from the intersection point of the vertical axis. In the image measuring apparatus characterized by comprising a control means for outputting a command to said drive means to vary the imaging position of the imaging means relative to the object to be measured. 3. A table on which the object to be measured is placed, an image pickup means for taking an image of the object to be measured placed on the table, a display means for displaying an image taken by the image pickup means, Measurement processing means for performing a predetermined measurement process based on the captured image; driving means for changing an imaging position of the imaging means with respect to the measured object; and an image captured by the imaging means on the display means. A video window to be displayed is set, and in this video window, horizontal and vertical axes and a moving instruction icon for each axis direction that is in contact with the video window around the video window are displayed, and the moving instruction icon is Distance from the horizontal and vertical axis arrangement position to the movement instruction icon when moved by a drag operation from the horizontal and vertical axis arrangement position Image measuring apparatus characterized by comprising a control means for outputting a command to said drive means to vary the imaging position of the imaging means in a direction in which the icon corresponding speed specification for the object to be measured. 4. A table on which an object to be measured is mounted, an imager for imaging the object to be measured mounted on the table, a display for displaying an image imaged by the imager, Measurement processing means for performing a predetermined measurement process based on the captured image; driving means for changing an imaging position of the imaging means with respect to the measured object; and an image captured by the imaging means on the display means. A video window to be displayed and a graphics window for displaying a virtual image of the stage imaged by the imaging unit are set, and the stage range and the imaging range of the imaging unit in the range are set in the graphics window. And displaying the imaging position at the designated moving position when the moving position is designated in the graphics window. Image measuring apparatus characterized by comprising a control means for outputting a command to said drive means in order to move to. 5. The apparatus according to claim 1, wherein the control unit displays an image corresponding to the measured object in the graphics window based on a measurement result of the measured object obtained by the measurement processing unit. The image measuring device according to claim 4, wherein 6. The apparatus according to claim 1, wherein said control means fetches graphic data from CAD data relating to said object to be measured and displays an image corresponding to said object to be measured in said graphics window. 4
The image measuring device as described in the above.