JP2001091453A - Micro-spectroscope - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a device easily setting an optimal aperture matching with the shape of a spectrum measuring part of a sample. SOLUTION: This micro-spectroscope 2 is provided with an image taking-in means 6 taking in a microscopic image, a display means 8 displaying the taken-in image, a measurement region designating means 10 designating a measuring target part for sampling a spectrum from the image and setting a region to be measured, a mask means 12 setting the spectrum so as to sample it from the set measurement region, and a spectrum sampling means 14 in the micro- spectroscope provided with a microscope 4. It is also characterized that, when the measurement region designating means 10 designates an outline of the measuring target part from the image, the designated outline is displayed on the display means 8 as the measurement region designated image, and when the measurement region is set using the outline of the measurement region designated image, the mask means 12 implements the setting based on the above setting.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a microspectroscope capable of observing a magnified image of a sample and measuring the spectrum of an object to be measured by a microscope, and more particularly to an aperture required for measuring the spectrum of a sample using a microspectroscope. Regarding improvement of setting operation.

[0002]

2. Description of the Related Art Means for observing a magnified image of a sample with a microscope and measuring a spectrum for more detailed analysis of the sample are used in various fields in modern times.
As described above, when measuring a spectrum from a sample, an aperture is set to measure only a spectrum from a specific portion. For example, in order to use a substrate as a sample and measure the spectrum of dirt attached to the substrate,
Since the spectrum of the substrate is collected in addition to the stain in the entire observation image of the sample, the aperture is set to measure only the spectrum of the stain.

[0003]

Conventionally, the aperture is set while observing the observation image of the sample. However, the shape of the aperture is rectangular while the shape of the spectrum measurement target portion is various. For this reason, it is difficult and difficult to set the aperture according to the spectrum measurement target site. An aperture was also used when measuring the mapping spectrum of the sample, but it was difficult to arrange the grid points according to the shape of the measurement target site. The present invention has been made in view of the above problems, and an object of the present invention is to provide an apparatus that can easily set an optimal aperture according to a shape of a spectrum measurement target portion of a sample.

[0004]

In order to achieve the above object, a microspectroscope according to the present invention is provided with a microscope capable of observing an enlarged image of the sample. Image capturing means for capturing an observation image, display means for displaying a sample observation image captured by the image capturing means, and a spectrum measurement target portion for obtaining a spectrum from the sample observation image displayed on the display means, A measurement region designating unit for setting a region for performing spectrum measurement; a masking unit set so as to be able to collect a spectrum from the spectrum measurement region set by the measurement region designation unit; and collecting a spectrum from a spectrum measurement region of the sample. Means for obtaining a sample observation image by the measurement area designating means. When a contour line of a spectrum measurement target portion for which spectrum measurement is desired is specified, the contour line of the specified spectrum measurement target portion is displayed on the display unit as a measurement region designation image, and the measurement displayed on the display unit is performed. When an area for performing spectrum measurement using the contour line of the area specifying image is set by the measurement area specifying means, setting of the mask means is performed based on the setting.

In the present invention, a mechanism for designating a contour line of a region to be measured by the measurement area designating means is displayed on a display means, and the pointer or the measurement area designating means is moved by operating the measurement area designating means. Preferably, a device that reads position information from a display image on a display means is used, and the outline of a spectrum measurement target portion is traced from a sample observation image by the pointer or the device. Further, in the present invention, a mechanism for designating a contour line of a spectrum measurement target portion by the measurement area designating means is displayed on a display means, and a pointer moved by operation of the measurement area designating means or a display means as the measurement area designating means. When using a device that reads position information from the above display image and specifying a part of the outline of the spectrum measurement target portion from the sample observation image with the pointer or the device, an area where the specified location shows the same brightness or color And select an adjacent display area that has the outer periphery of the area as the outline, or the brightness indicated by the specified location, or the brightness or color with the least change in color, and then select the selected area The adjacent display area displayed with the brightness or color with the least change in color or color indicated by It is preferred that by repeating the work to continue to select is to recognize the contour line. Further, in the present invention, a mechanism for designating a contour line of a spectrum measurement target portion by the measurement area designating means is displayed on a display means, and a pointer moved by operation of the measurement area designating means or a display means as the measurement area designating means. Using a device that reads position information from the display image above, a polygon that connects the points specified by specifying three or more points from the contour line of the spectrum measurement target part in the sample observation image with the pointer or the device. Is preferably recognized as a contour line.

In the present invention, it is preferable that the mask means is substantially an aperture. In the present invention, it is preferable that the aperture is automatically set based on the contour displayed on the measurement area designation image so that the aperture has the largest area within the contour. In the present invention, it is preferable to automatically set the number of measurement points and the size and angle of the aperture for measuring the mapping spectrum of the sample based on the contour displayed on the measurement region designation image. Further, in the present invention, as the measurement area designating means,
It is preferable to use at least one of a touch pen, a light pen, a touch panel, and a mouse.

[0007]

BEST MODE FOR CARRYING OUT THE INVENTION Using a microscope, an enlarged image of a sample is observed, and a spectrum is measured from a specific portion of the sample.
Methods for identifying and analyzing substances are widely used in modern times. What is required at this time is the setting of a mask means for measuring a spectrum only from a specific site. This is a very important operation because an accurate spectrum cannot be obtained unless the mask means is set. The present invention can provide a microspectroscope having a mechanism for simplifying the setting of the mask means.

FIG. 1 shows a schematic diagram of a microspectroscope according to an embodiment of the present invention. The microspectroscope 2 shown in FIG. 1 displays a microscope 4 capable of observing an enlarged image of a sample, an image capturing unit 6 for capturing a microscope observation image of the sample, and a sample observation image captured by the image capturing unit 6. A display unit 8; a measurement region specifying unit 10 for specifying a spectrum measurement target site for obtaining a spectrum from the sample observation image displayed on the display unit 8 and setting a region for performing spectrum measurement; and the measurement region specification The apparatus includes a masking unit 12 configured to be able to acquire a spectrum from a spectrum measurement region set by the unit 10 and a spectrum acquisition unit 14 for acquiring a spectrum from a spectrum measurement region of a sample.

In the present embodiment, the spectrum collecting means 14 comprises a spectrophotometer, and the microscope 4 is connected to the spectrophotometer, and the spectrum is collected by the spectrophotometer. Further, in this embodiment, the mask means 1
2 is provided in the microscope 4. Further, in this embodiment, the microscope 4 and the spectrophotometer as the spectrum collecting means 14 are connected to a personal computer, respectively.
Each is generally controlled by the CPU 16 of the personal computer.

[0010] When the contour of the spectrum measurement target portion for which spectrum measurement is desired is designated from the sample observation image by the measurement region designation means 10, the contour of the designated spectrum measurement target portion is displayed as the measurement region designation image on the display means. When an area for performing spectrum measurement is set by the measurement area specifying means 10 using the outline of the measurement area specifying image displayed on the display means 8 and displayed on the display means 8, the setting is made by the CPU 16 to the control means. 18 and the control means 18 controls the driving means 20 based on the setting.
Is driven, and the setting of the mask means 12 is performed. Hereinafter, the spectrum measurement is actually performed using one embodiment of the present invention, and the apparatus of the present invention will be described in further detail.

FIG. 2 shows a schematic diagram of an infrared microspectroscopic device to which the present invention is applied. The infrared microspectroscope 22 shown in FIG.
A microscope 24 capable of observing a magnified image of the sample, and a CCD camera 28 mounted above a trinocular finder 26 as image capturing means for capturing a microscopic image of the sample.
A CRT 30 as display means for displaying a sample observation image captured by the CCD camera 28, and a region for performing spectrum measurement by designating a spectrum measurement target site for collecting a spectrum from the sample observation image displayed on the CRT 30 A light pen 32 as a measurement area designating means for setting the temperature, an aperture provided in the microscope as a mask means set to be able to collect a spectrum from a spectrum measurement area set by the light pen 32, An infrared spectrophotometer 34 is provided as a spectrum collecting means for collecting a spectrum from a spectrum measurement region. And in this embodiment, the microscope 2
4 and an infrared spectrophotometer 34 are a personal computer 36
Is connected to and controlled in general.

For actual observation, an IC substrate was used as a sample. First, a sample was set on the stage of the microscope 24, and an enlarged image thereof was first observed. When observing the displayed sample observation image, dirt was found on the substrate. The spectrum of the stain was measured.

FIG. 3A shows an example of a display screen on which an observation image of a sample is displayed. As shown in the figure, a sample observation image 42 displayed in a sample observation image display window 40 is displayed on a screen 38 of the CRT 30, and the sample observation image 42 has a stain 44 which is a spectrum measurement target portion.
Have been observed. In order to measure the spectrum of the dirt 44, it is necessary to set the aperture. In the present invention, when setting the aperture for performing the spectrum measurement from the spectrum measurement target portion, first, the sample observation image is set by the measurement area designating means. The contour line of the dirt 44, which is the spectrum measurement target portion for which spectrum measurement is desired, is designated from the observation image of the substrate 42.

In the specification of the contour line, in the apparatus of the present invention, a pointer which is displayed on the display means and moves by operation of the measuring area specifying means or a device which reads position information from a display image on the display means as the measuring area specifying means. Use

In this embodiment, a light pen is used. This light pen is equipped with a light-sensitive mechanism at the tip of the pen.When using the light pen, a signal light for position identification is transmitted from a small area on the display screen, and this signal light is transmitted at high speed to the display screen. This is a device that allows the observer to recognize a part specified by the light pen by scanning the upper side and determining where the signal light is emitted from the light pen. When such a device is used, the outline of the dirt 44, which is the measurement target site, may be designated on the screen 38 by the light pen 46 as shown in FIG.

A touch pen or the like can be used similarly to the light pen. The touch pen is provided with a sensing mechanism for sensing the designated area on the surface of the display screen in advance, and detects the area specified by the observer on the display image from the area where the touch of the touch pen is sensed. Even when the touch pen is used, the dirt 44, which is the measurement target site, may be specified on the screen 38 of the measurement target site, similarly to the light pen. If a touch pen or a light pen is used as the measurement area specifying means, the device can be easily operated as if using a pen. As described above, using a device that reads the position information from the display image on the display unit as the measurement region designation unit has an advantage that the operation is relatively simple.

Devices commonly used in computers include a mouse and a touch panel. These move the pointer displayed on the display screen by operating the mouse or touch panel, and send a signal to the device when the pointer and the specified position overlap, so that the device can recognize the specified position. It is. In the present invention, such a mouse and a touch panel can be used. When a mouse or a touch panel is used, the pointer 48 displayed on the display screen 38 is designated according to the outline of the dirt 44 as the measurement target part by operating the measurement area designation means as shown in FIG. 3B. Do it.

If a mouse or a touch panel is used as the measurement area designating means as described above, there is an advantage that these devices are generally provided in a computer and no special external device is required. As described above, according to the present invention, a light pen, a touch pen, a mouse, a touch panel, or the like can be used as a measurement area specifying unit that uses a contour line.

In the apparatus of the present invention, there are the following four mechanisms for designating a portion where spectrum measurement is desired from the sample observation image 42 to set an aperture, that is, a contour line of the dirt 44 by the above-described measurement region designating means. The case is conceivable. The first is a mechanism for tracing the outline of the dirt 44, which is the measurement target area. Second, when a part of the outline of the dirt 44 is specified from the sample observation image, a region where the brightness or color indicated by the specified portion is the same is recognized, and the outer periphery of the region is set as the specified outline. Third, when a part of the outline of the dirt 44 is specified from the sample observation image, the adjacent display area displayed with the brightness or the color with the least change in the color indicated by the specified portion is displayed as the outline. It is continued by repeating the operation of selecting an adjacent display area that is displayed with the brightness or color with the least change in brightness or color indicated by the selected area as the contour area configuration area The fourth is a mechanism that uses the outline configuration area as the outline, and the fourth is that the polygon that connects the specified points by specifying three or more points from the dirt outline is used as the specified outline. That. Hereinafter, description will be made in order.

FIG. 4 is an explanatory diagram of a mechanism for specifying a contour line of a region to be measured by the measurement area specifying means. First, the mechanism for tracing the outline of the stain 44, which is the spectrum measurement target area, from the first sample observation image 42 is shown in FIG.
As shown in FIG. 4A, the outline of the dirt 44, which is the spectrum measurement target area, is continuously specified by the pointer 48 by the above-described measurement area specifying means.
The designated part 50 indicated by a dotted line in FIG. According to this mechanism, there is an advantage that an observer can accurately specify a desired spectrum measurement target region.

When a part of the outline of the dirt 44 is specified from the second sample observation image, an area having the same brightness or color indicated by the specified portion is recognized, and the outer periphery of the area is specified as the specified outline. When the pointer 48 is set to a part of the outline of the dirt 44 by the measurement area specifying means as shown in FIG. 4B, and a point 52 is specified as an example in FIG. Recognize the area 54 having the same brightness or color indicated by the designated portion as shown in FIG.
The outer periphery 56 of the region is defined as a contour line. According to this mechanism, since the observer can specify the contour line only by specifying a part of the region to be the contour line, the contour line can be specified very easily.

When a part of the contour line is designated from the third sample observation image, the brightness of the designated portion or the adjacent display area displayed with the lightness or color with the least change in color is changed to the contour line configuration. A continuous contour is created by repeating the process of selecting an area as an area and selecting an adjacent display area that is displayed with the brightness or color with the least change in brightness or color indicated by the selected area as a contour line configuration area. In the mechanism that uses the line configuration area as the contour, the contour can be specified as shown in FIG. 4B, similarly to the second mechanism, but the mechanism for recognizing the contour is different.
When the display image 38 is enlarged, as shown in FIG.
The brightness or color indicated by 2 is compared with the brightness or color of the dots 60 to 74, which are the adjacent display areas, and the adjacent display area displayed with the brightness or color with the least change is selected as the outline configuration area. Here, it is assumed that the dot 72 is selected. Then, the brightness or color indicated by the dot 72 is compared with the brightness or color of the dots 66 to 80 which are the adjacent display areas, and the adjacent display area 80 displayed with the lightness or color with the least change is contoured. The operation of selecting as a line configuration area is repeated, and a continuous contour configuration area 82 as shown in FIG. According to this mechanism, in addition to the advantages of the second mechanism, even if the sample is not flat and is displayed with gradation, the contour can be accurately recognized.

Finally, by designating three or more points from the contour line of the fourth sample observation image, a mechanism connecting the designated points to the designated contour line is shown in FIG. 4 (f). As shown in (3), three or more points, here, for example, points 86 to 104 are designated from the outline of the dirt 44 by the measurement area specifying means, and a polygon 84 connecting the points is recognized as the outline of the dirt 44. You do it. According to this mechanism, when the shape of the measurement target area is a shape close to a polygonal shape, the measurement target area can be easily specified, and by increasing the number of points to be specified, it is easier than the first mechanism. Moreover, it is possible for the observer to specify the contour in a state close to the shape of the spectrum measurement target area desired to perform the spectrum measurement.

In describing this mechanism, in FIG. 4, a mouse is used as the measurement area designating means, and the outline is designated using the mouse pointer 48. Even when a touch panel, a light pen, a touch pen, or the like is used, a contour can be designated by a similar mechanism. Also, in the present invention, the above-described four mechanisms are specified as the mechanism for specifying the contour of the spectrum measurement target portion, but the mechanism for specifying the contour is not limited to this, and can be suitably specified. If there is a mechanism, that mechanism may be used.

As described above, when the contour of the spectrum measurement area is designated by the measurement area designation means, FIG.
Is displayed in the sample observation image 42 displayed in the sample observation image window 40, and the contour line 10 having the same shape as the contour line 106 is displayed as shown in FIG.
8 is displayed on the CRT 38 as a measurement region designation image display window 110 for an image different from the sample observation image display window 40.

In this state, the observer determines whether the designated contour 106 is the contour of the part where the spectrum measurement is desired, and the contour of the stain 44 displayed on the sample observation image 42 and the designated contour 106 If the outline is different as shown in FIG. 6, specify the wrong portion 112 by the measurement area specifying means and specify the correct outline 114 again. Can be corrected. This correction is also reflected on the outline displayed on the measurement area designation image display window. Although the correction method in the present embodiment has been described here, the method of correcting the contour is not limited to this.

When it is confirmed that an accurate contour line has been specified, an actual aperture setting is started. Assuming that the specification of the contour line of the spectrum measurement region has been completed by the apparatus shown in FIG. 2 in the above-described procedure, the setting of the subsequent aperture will be described. A feature of the present invention is that the aperture setting which has been conventionally set by trial and error is set to the same shape as the rectangular image by setting the rectangular image on the measurement area designation image. This makes it possible to easily set the aperture.

When measuring a spectrum, there are several measuring methods. That is, within the specified contour, one-point measurement of collecting a spectrum from only one point,
In the specified contour, multi-point measurement for collecting spectra from a plurality of points, in the specified contour, straight-line measurement for collecting a spectrum with a straight line passing through the contour, for the specified contour This includes mapping measurements for collecting spectra from a wide location in and around the line and examining the state of the spectrum over a wide range. The device of the present invention can handle any of these measurements. Hereinafter, a method of setting the aperture in each of these measurements will be described.

First, the most basic one-point measurement in spectrum measurement will be described. FIG. 7 is an explanatory diagram showing a state during the setting of the aperture. As shown in FIG. 7, in the present invention, after designation of the contour line of the spectrum measurement region including the site where the spectrum measurement is desired, which portion of the spectrum is to be measured in the spectrum measurement target region from the sample observation image 42 Is designated by the light pen 32, the measurement area designation image display window 11
A rectangular image 116 appears at a portion corresponding to the designated portion in the outline 108 displayed at 0. This rectangular image 116 is an aperture image set in an actual measurement.

The size and angle of the rectangular image appearing here can be freely changed using the light pen 32 as shown in FIG. FIG. 9 shows a display state of the CRT 38 in which the rectangular image 116 has been set using the outline 108 displayed in the measurement area designation image display window 110 in this manner. The rectangular image 116 can be set within the outline 108, and the size and angle can be adjusted while confirming that the image does not protrude from the outline. Therefore, it is very easy to set a rectangular image having an optimal shape. It is possible to Since the aperture is set corresponding to the rectangular image 116, the setting of the aperture, which has conventionally been set by trial and error, can be performed very easily.

In the present embodiment, it is possible to automatically set the size and angle of the rectangular image 116 based on the contour displayed on the measurement area designation image so as to have the largest area within the contour. It is. As described above, when performing one-point measurement in the present invention, it is preferable that the aperture having the maximum size can be automatically set in the designated measurement area.

Subsequently, the setting in the case of the multi-point measurement is substantially the same as the setting method of the single-point measurement. FIG. 10 is a schematic diagram showing a state in which the aperture is being set. The parts corresponding to FIGS. 7, 8, and 9 are indicated by adding reference numeral 100. As shown in FIG. 10, after the specification of the outline 206 of the spectrum measurement target portion including the portion for which the spectrum measurement is desired in the present invention, a plurality of portions whose spectrum is to be measured are designated from the sample observation image 142 by the light pen 132. Then, as many rectangular images 216 as the designated number appear in the portion corresponding to the designated portion in the outline 208 displayed in the measurement region designation image display window 210.

The size and angle of the rectangular image appearing here can be freely changed by using the light pen 232 for each rectangular image as in the case of single point measurement. In this manner, the rectangular image 216 is set using the outline 208 of the spectrum measurement target portion displayed in the measurement region designation image display window 210.
The display state of the RT 238 is as shown in FIG.

The point of difference from the one-point measurement in this embodiment is that a list 218 indicating information on the size, coordinates, and angles of each rectangular image is created because there are a plurality of designated points. It is. The observer can numerically confirm the information of each rectangular image from this list.

As described above, the apertures can be set at many points at the same time. In addition to the effects described in the single-point measurement, each measurement area can be set without overlapping, and the measurement area can be out of the area to be measured. Aperture can be set in a region where spectrum measurement is desired without any problem, and measurement can be performed very efficiently as compared with a conventional device.

As described above, the linear measurement and the mapping measurement are slightly different from the single-point measurement and the multi-point measurement for measuring the spectrum indicated by the specific portion. Since the linear measurement and the mapping measurement can visually grasp the change state of the spectrum of the sample, in other words, can check the state of the substance, the entire area where the spectrum measurement is desired is measured. This inevitably requires a plurality of measurement points, and the measurement areas are arranged in an orderly manner.

First, a setting method in the case of linear measurement will be described. FIG. 12 is a schematic diagram showing a state during aperture setting. The parts corresponding to FIGS. 7, 8, and 9 are indicated by adding 200. As shown in FIG. 12A, after specifying the contour line of the spectrum measurement target portion including the portion where the spectrum measurement is desired in the present invention, the spectrum is measured along any straight line from the sample observation image 242. Whether the user wants to do so is designated by the light pen 232. In the present embodiment, the straight line designation mechanism assumes a straight line for which a straight line measurement of a spectrum is desired from a sample observation image, and designates a start point 320 and an end point 322 with the light pen 232.

Then, as shown in FIG. 12B, a rectangular image group 324 corresponding to the straight line is automatically set in the measurement area designation image display window 310. Each rectangular image 32 of the rectangular image group 324
6, the size and the angle can be adjusted by the light pen 232 as in the case of single-point measurement or multi-point measurement. If any one rectangular image is adjusted, the adjustment is performed on the set rectangular image. This is reflected on all the rectangular images of the group 324. Further, when the number of automatically set rectangular images 324 is large or small, that is, when the number of measurement points is large or small, the observer can correct the number of measurement points.

FIG. 12C shows the measurement area designation image display window 310 thus set. Each of the rectangular image groups 324 corresponds to an aperture image. An aperture is set for each of the rectangular images 326, and linear measurement can be performed by sequentially performing spectrum measurement.

Finally, the mapping measurement will be described.
FIG. 13 is a schematic diagram showing a state during aperture setting. The parts corresponding to FIGS.
00 is added. Since the mapping measurement is to perform the spectrum measurement for the entire region for which the measurement is desired, unlike the other measurements described above, after the designation of the contour line of the spectrum measurement target site including the site for which the spectrum measurement is desired is completed. As shown in FIG. 13 (a), a command for performing mapping measurement is input to the apparatus, and is designated based on the contour line 408 drawn from the sample observation image and drawn in the measurement region designation image display window 410. , The optimal rectangular image group 428 is automatically set and displayed.

Each rectangular image 430 of the rectangular image group 428 can be adjusted in size and angle with a light pen as in the case of single-point measurement or multi-point measurement as in the case of the linear measurement described above. Thus, if any one rectangular image is adjusted, the adjustment is reflected on all the rectangular images of the set rectangular image group 428.

Further, among the automatically set rectangular images,
If there is something that is not needed, delete the unnecessary rectangular image, or adjust the number of measurement points, such as setting a rectangular image there if a rectangular image has not been set at the required location Is also possible.

FIG. 13B shows the measurement area designation image 410 which has been set. After the setting is completed in this way, the mapping spectrum can be measured by associating the apertures with the rectangular images one by one and measuring the spectrum sequentially.

Incidentally, as for the mapping spectrum, it is general to collect spectrum data around the spectrum measurement target portion for comparison. In such a case, it is not necessary to specify an accurate outline from the DUT image.Therefore, assuming a polygon surrounding the range where mapping measurement is to be performed, specify the position of the vertex, and specify the specified position. A polygon connecting the points may be displayed as an outline on the measurement area instruction image. FIG. 13C shows this state.
It is.

As shown in the figure, in order to specify a contour line from the sample observation image 342, a polygon 4
32, and the polygon 432 is designated as a contour line. In the present embodiment, when such a polygon is specified, it is not necessary to trace the polygon, but by specifying each vertex, it is recognized that the polygon connecting the vertices is specified. Therefore, when specifying the polygon, the observer may input the data in consideration of how much data around the dirt 344 is to be collected when performing the mapping measurement.

When the polygon is designated as a contour, a contour 434 having the same shape as the designated polygon 432 is displayed in the measurement region designation image display window 410 as shown in FIG. If the observer inputs a command for performing the mapping measurement, the rectangular image group 436 is automatically set in accordance with the contour line 434, so that the observer can determine the number of measurement points and the rectangle according to the purpose of the mapping measurement desired by the user. What is necessary is just to fine-tune the size, angle, etc. of the image and perform the measurement.

As described above, according to the present invention, a rectangular image is automatically set based on a designated contour line, and an aperture for mapping measurement can be set by adjusting the rectangular image. In addition, it is possible to easily set the optimal aperture while visually confirming the grid points of the aperture, which have been difficult to set for a spectrum measurement target portion having a complicated shape.
In addition, if the outline is specified by a polygon, the outline can be easily specified in a desired range for performing the mapping measurement, and the aperture can be set very easily.

Although the four types of spectrum measurement have been described above, according to the present invention, the spectrum measurement is performed by the measurement area specifying means using the outline of the measurement area specifying image displayed on the display means. By setting the region to be performed by a rectangular image, the setting is transmitted from the computer to the control unit, and the control unit drives the driving unit provided in the microscope based on the setting,
Since the aperture is set so that the aperture image has the same shape as the rectangular image, the aperture can be set very easily, and the setting method can be intuitive and easy to understand. In the present embodiment, the procedure for measuring the spectrum after setting the aperture can be performed in the same manner as in the conventional apparatus.

Further, in this embodiment, it is possible to form an enlarged image of the entire sample by bonding enlarged images of the sample observation image. Then, it is possible to determine a spectrum measurement target portion while observing the entire enlarged image, and measure a spectrum from the spectrum measurement target portion. FIG.
FIG. 4 shows an explanatory diagram of a process of determining a spectrum measurement target portion from the entire enlarged image of the sample and performing spectrum measurement.

The whole enlarged image 138 shown in FIG. 9A is obtained by taking in the sample observation image for each area, and superimposing the observation images stored in the storage device in the apparatus, and is displayed on the screen of the display means. Then, when the observer observes the whole enlarged image 138 of the sample and finds a site where the spectrum is desired to be collected, the site is specified by the measurement region specifying means.

When the desired site for spectrum collection is specified,
The apparatus confirms the position of the area occupied by the designated part, and projects a real image of the area on the display screen 148. Now, it is assumed that the desired region for spectrum acquisition is the region 140.
The device reads the position data of this area from the storage device,
As shown in FIG. 14B, a real image observation image 144 of the area 140 is displayed in the sample observation image display window 142.
As described above, the observer designates the outline of the spectrum measurement target portion from the real image observation image 144 by the measurement region designation means, and changes the same shape as the designated outline displayed in the measurement region designation image display window 146. A rectangular image can be set using the contours thus obtained, and the above-described various spectrum measurements can be performed.

When the outline of the spectrum measurement target portion is designated in this way, when the entire enlarged image 138 is displayed again on the display means, as shown in FIG. Is configured to display the contour line of the designated spectrum measurement target area.

As described above, when a part to be subjected to spectrum measurement can be observed using the whole enlarged image, the whole can be seen over, so that it is easy to find a characteristic part. Since the outline is also displayed in the whole enlarged image, it is possible to prevent an error such as taking a spectrum many times in the same place. Note that the whole enlarged image here is not limited to the whole image of the sample, and when the sample is large, may be the whole image in a range that can be displayed as a sample observation image.

When the spectrum of the dirt was measured by the aperture set as described above, a reliable and consistent result could be obtained even when compared with the result obtained by using the conventional apparatus. This confirmed that the aperture setting of the microspectrophotometer of the present embodiment was accurate. Furthermore, when compared with the measurement time performed with the conventional machine,
In the measurement performed using the present embodiment, the setting of the aperture can be made much easier, so that the measurement time can be reduced.

In the present embodiment, the image of the object to be measured and the image for specifying the measurement area are displayed on the same screen. However, the present invention is not limited to this. May be displayed, or a configuration in which a display image can be designated by the observer's will may be employed. There is no particular limitation on this. In describing the present invention, a light pen is mainly used as a measurement area designation unit. However, the present invention is not limited to this, and various input devices such as a mouse, a touch pen, a touch panel, and a joystick may be used. Is possible.

[0056]

As described above, according to the microspectroscope of the present invention, the contour of the spectrum measurement target part is designated, and the contour having the same shape as the contour is used. Since the aperture can be set by setting a rectangular image corresponding to the above, it is possible to easily set the optimal aperture for the DUT having a complicated shape.

[Brief description of the drawings]

FIG. 1 is a schematic diagram of a microspectroscope according to an embodiment of the present invention.

FIG. 2 is a schematic diagram of an infrared microspectroscopy device to which the present invention is applied.

FIG. 3 is an example of a display screen on which a sample observation image is displayed.

FIG. 4 is an explanatory diagram showing a mechanism for specifying a contour line of a spectrum measurement target area.

FIG. 5 is an example of a display screen when a contour line of a spectrum measurement target area is designated from a sample observation image.

FIG. 6 is an example of a display screen when correcting a contour line of a designated spectrum measurement target area.

FIG. 7 is an explanatory diagram showing a state during setting of an aperture in one-point measurement according to an embodiment of the present invention.

FIG. 8 is an explanatory diagram showing a state in which an aperture is being set in one-point measurement according to an embodiment of the present invention.

FIG. 9 is an explanatory diagram showing a state in which an aperture is being set in one-point measurement according to an embodiment of the present invention.

FIG. 10 is an explanatory diagram showing a state in which an aperture is being set in multipoint measurement according to an embodiment of the present invention.

FIG. 11 is an explanatory diagram showing a state in which an aperture is being set in multipoint measurement according to an embodiment of the present invention.

FIG. 12 is an explanatory diagram showing a state in which an aperture is being set in a straight line measurement according to an embodiment of the present invention.

FIG. 13 is an explanatory diagram showing a state during setting of an aperture in mapping measurement according to an embodiment of the present invention.

FIG. 14 is an explanatory diagram showing a state where a spectrum measurement target area is designated from the entire enlarged image according to the embodiment of the present invention.

[Explanation of symbols]

 2 Microspectroscope 4 Microscope 6 Image capturing means 8 Display means 10 Measurement area specifying means 12 Mask means 14 Spectrum collecting means 16 CPU 18 Control means 20 Driving means

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2G020 AA04 AA08 DA02 DA04 DA05 DA31 DA35 DA52 DA66 2G059 AA01 BB16 CC20 EE12 FF01 FF03 JJ01 KK04 LL04 PP04 2H052 AC13 AD35 AF07 AF13 AF14 AF23 AF25

Claims (8)

[Claims] A microscope capable of observing a magnified image of the sample, and a microspectroscope capable of performing spectrum measurement; an image capturing means for capturing a microscope observation image of the sample; and a sample observation image captured by the image capturing means. Display means for displaying a spectrum measurement target part for acquiring a spectrum from a sample observation image displayed on the display means, and a measurement area designation means for setting an area for performing spectrum measurement; and the measurement area designation. Mask means set to be able to collect a spectrum from the spectrum measurement area set by the means, and spectrum collection means for collecting a spectrum from the spectrum measurement area of the sample, and a sample observation image by the measurement area designation means. Draw the contour line of the spectrum measurement Then, the contour of the designated spectrum measurement target portion is displayed on the display means as a measurement area designation image, and the area for performing spectrum measurement using the contour of the measurement area designation image displayed on the display means Is set by the measurement area designating means, the setting of the mask means is performed based on the setting. 2. The microspectroscope according to claim 1, wherein
A mechanism for designating a contour line of a spectrum measurement target portion by the measurement region designation means is displayed on the display means, and a pointer moved by operation of the measurement region designation means or a display image on the display means as the measurement region designation means. A microspectroscope, wherein a device for reading position information is used, and the contour of a spectrum measurement target portion is traced from a sample observation image by the pointer or the device. 3. The microspectroscope according to claim 1, wherein
A mechanism for designating a contour line of a spectrum measurement target portion by the measurement region designation means is displayed on the display means, and a pointer moved by operation of the measurement region designation means or a display image on the display means as the measurement region designation means. Using a device that reads position information, if the pointer or part of the contour of the spectrum measurement target part is specified from the sample observation image by the device, the lightness indicated by the specified part, or the area where the color is the same, is recognized, and the Select the one that recognizes the outer periphery of the area as a contour line, or the brightness indicated by the specified location, or the adjacent display area displayed with the brightness or color with the least change in color, and further the brightness indicated by the selected area, or Select an adjacent display area that is displayed with lightness or color with the least change in color. Microspectroscopy apparatus, characterized in that to recognize the contour line by repeated. 4. The microspectroscopic device according to claim 1, wherein
A mechanism for designating a contour line of a spectrum measurement target portion by the measurement region designation means is displayed on the display means, and a pointer moved by operation of the measurement region designation means or a display image on the display means as the measurement region designation means. Using a device that reads position information, the pointer or the device specifies three or more points from the contour line of the spectrum measurement target portion in the sample observation image, and recognizes a polygon connecting the specified points as a contour line. A microspectroscope, characterized in that 5. The microspectroscope according to claim 1, wherein the mask means is substantially an aperture. 6. The microspectroscope according to claim 5, wherein
A microspectroscope, wherein an aperture is automatically set based on a contour displayed on a measurement region designation image so as to have a maximum area within the contour. 7. The contour line in which the number of measurement points and the size and angle of an aperture for performing mapping spectrum measurement of a sample are displayed in a measurement region designation image in the microspectroscopic device according to claim 5 or 6. Is automatically set based on the following. 8. The microspectroscopic device according to claim 1, wherein at least one of a touch pen, a light pen, a touch panel, and a mouse is used as the measurement area specifying means. And a microspectroscope.