JP2004239761A - Image measuring instrument, and program for generating edge tracking measuring program - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To execute a tracking measurement in a direction desired by an operator without affected by burring, dust or the like staying on the route for the edge tracking measurement. <P>SOLUTION: An image of a work 12 is displayed on a CRT, and a measurement start point Pb as the start point of an edge for the tracking measurement within the work image, a measurement finish point Pe as the end point, and an inflection point C where an edge condition or the like is changed are clicked with a mouse to assign the measuring sections. Similarity, of an edge shape in each of the measuring sections, to a straight line, a circular arc or a free curved line is input as a tracking shape. A measuring tool (box tool, circular arc tool, auto-tracing tool, or the like) suitable for the tracking shape is arranged in the every measuring section, and a part program is generated to execute the edge tracking measurement along the route indicated by the tracking shape. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an image measuring apparatus having a function of imaging an object to be measured (hereinafter, referred to as a workpiece) with an imaging apparatus such as a CCD camera and generating an edge tracking measurement program for tracking and measuring an edge included in the workpiece image. And a program for generating an edge tracking measurement program for tracking and measuring edges included in a work image.
[0002]
[Prior art]
2. Description of the Related Art Conventionally, this type of image measuring apparatus has been used for measurement of a thin plate such as an IC lead frame or measurement of a wiring pattern, which is difficult in contact measurement. When performing non-contact image measurement, after setting the work on the measurement table, move the imaging device, such as a CCD camera, to the position where you want to measure the work, adjust the focus, and display the enlarged image of the work on the CRT display Let it. Then, a point to be measured is designated by a mouse cursor or a window, and an edge of the image is extracted based on an image processing technique, and a desired measurement value is obtained by arithmetic processing.
[0003]
In such an image measurement device, an auto trace tool capable of measuring continuous edges with a small number of input operations is used. The auto trace tool is a measurement tool that sequentially extracts point sequence information of an edge while tracking and measuring an edge present in a designated area. For example, in an auto tracing tool described in Patent Document 1, a window is set at a part of an edge to be followed in a work image, and a plurality of edge points in the window are detected from image information in the set window. I do. Next, an approximate straight line is applied to the plurality of detected edge points, and the window is moved along the approximate straight line. By repeating this, continuous edges are automatically tracked and measured.
[0004]
[Patent Document 1]
JP-A-8-292015 (pages 4 to 5, FIGS. 4 to 10)
[0005]
[Problems to be solved by the invention]
However, in such an auto-trace tool, as shown in FIG. 12A, if burrs or dust are present on a route to be subjected to edge tracking measurement, measurement (tracking) proceeds in an abnormal direction. Sometimes.
Further, as shown in FIG. 12B, when the route of the tracking measurement is branched, the tracking measurement is not performed in the direction desired by the operator.
Further, in the edge tracking measurement, the measurement is performed based on the edge property of the route to be measured, for example, the density difference or the like, but when the density difference or the like changes in the middle of the route as shown in FIG. In some cases, the edge point is not detected at the changed point, and the measurement cannot be continued.
[0006]
The present invention has been made in order to solve such a problem, and is not affected by burrs, dust, and the like on a tracking measurement route, and is capable of performing a tracking measurement in a direction desired by an operator. An object of the present invention is to provide a program for generating an edge tracking measurement program.
[0007]
[Means for Solving the Problems]
In order to achieve the above object, the image measuring apparatus according to the present application divides a display unit that displays an image to be measured including an edge to be tracked and measured between a start point and an end point of the track measurement at the edge. A plurality of measurement sections to be specified on the image to be measured, a measurement section specifying unit, and a tracking shape specifying unit for specifying a tracking shape for each measurement section specified by the measurement section specifying unit, Measuring tool determining means for determining a measuring tool for measuring an edge shape used for tracking measurement in each of the measuring sections based on the tracking shape specified by the tracking shape specifying means; and determining the measuring tool for each measuring section. The measurement tool determined by the means performs an edge tracking measurement along the tracking shape, thereby executing a program for performing an edge tracking measurement from a start point to an end point of the tracking measurement. Characterized by comprising an edge tracking measurement program generating means for forming.
[0008]
According to this invention, each measurement section divided between the measurement start point and the measurement end point is designated by the measurement section designation means, and the tracking shape is designated by the tracking shape designation means for each edge of these measurement sections. Is done. When the tracking shape is specified, a measurement tool corresponding to the specified tracking shape is determined by the measurement tool determination means, and the measurement tool performs edge tracking measurement along the specified tracking shape.
The specification of the measurement section includes, for example, a point at which an edge as a measurement target changes from a straight line to a curve, a point at which a radius of curvature of a curve changes, a point at which a route branches or merges, a point at which the density difference of an image changes, Hereinafter, the points at which the properties of the edges change are collectively referred to as inflection points). If each measurement section is designated as a boundary point, the measurement of each specified measurement section is performed along the designated tracking shape. Therefore, even when burrs, dust, and the like exist near the edge or when the route is branched, the measurement is less likely to stop or an abnormal measurement result is obtained.
[0009]
In the present invention, it is possible to further include a measurement condition setting means for setting measurement conditions for edge tracking measurement in each of the measurement sections. This makes it possible to optimize the measurement conditions in each measurement section, thereby enabling more stable measurement.
Further, in the present invention, the tracking shape designating means is capable of designating a free curve as the tracking shape, and the measurement tool determining means, when the free curve is designated by the tracking shape designating means, It is also possible to decide to use an auto-trace tool for sequentially extracting point sequence information of the edge while tracking and measuring the edge of the measurement section according to the designation as the measurement tool.
[0010]
To achieve the above object, an edge tracking measurement program generating program according to the present invention includes a step of displaying a measured image including an edge to be tracked and measured, and a step between the start point and the end point of the track measurement at the edge. A step of specifying a plurality of measurement sections to be divided on the image to be measured, a step of specifying a tracking shape for each of the specified measurement sections, and a step of specifying the tracking shape for each of the specified measurement sections. Determining a measurement tool for edge shape measurement to be used for tracking measurement, and the measurement tool determined for each measurement section performs an edge tracking measurement along the tracking shape, thereby starting the tracking measurement. Generating a program for performing edge tracking measurement from a point to an end point.
[0011]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a perspective view showing an overall configuration of an image measurement system according to an embodiment of the present invention. This system comprises a non-contact type image measuring device 1, a computer system 2 which controls the image measuring device 1 and executes necessary data processing, and a printer 3 which prints out measurement results and the like. I have.
[0012]
The image measuring device 1 is configured as follows. That is, a measurement table 13 on which the work 12 is placed is mounted on the gantry 11, and the measurement table 13 is driven in the Y-axis direction by a Y-axis drive mechanism (not shown). Support arms 14 and 15 extending upward are fixed to the center of both sides of the gantry 11, and an X-axis guide 16 is fixed so as to connect both upper ends of the support arms 14 and 15. An imaging unit 17 is supported by the X-axis guide 16.
[0013]
The imaging unit 17 is driven along the X-axis guide 16 by an X-axis driving mechanism (not shown). At the lower end of the imaging unit 17, a CCD camera 18 is mounted so as to face the measurement table 13. The imaging unit 17 has a built-in Z-axis drive mechanism for moving the position of the CCD camera 18 in the Z-axis direction, in addition to a lighting device and a focusing mechanism (not shown).
[0014]
The computer system 2 includes a computer main body 21, a keyboard 22, a joystick box (hereinafter, referred to as J / S) 23, a mouse 24, and a CRT 25.
[0015]
The computer main body 21 is configured, for example, as shown in FIG. That is, image information input from the CCD camera 18 is stored in a multi-value image memory 32 via an interface (hereinafter, referred to as I / F) 31. The multivalued image information stored in the multivalued image memory 32 is displayed on the CRT display 25 via the display control unit 33. On the other hand, input information input from the mouse 24 or the like is input to the CPU 35 via the I / F 34.
[0016]
The CPU 35 processes input information from the mouse 24 and executes various processes according to a program stored in the program memory 36. When a part program for edge tracking measurement is generated, input information from the mouse 24 (input contents, procedures, and the like will be described later) is processed according to a part program generation program stored in the program memory 36. Create a part program. The work memory 37 provides a work area for various processes in the CPU 35.
[0017]
Next, the program for generating the edge tracking measurement part program will be described.
FIG. 3 is a block diagram showing a part program generation system 40 realized in the computer main body 2 when the part program generation program is executed.
As shown in FIG. 3, the part program generation system 40 includes a measurement section specification unit 41, a tracking shape specification unit 42, a measurement condition setting unit 43, a tool determination unit 44, a part program generation unit 45, and a part program output unit 46. It consists of.
[0018]
In the work image displayed on the CRT 25, the measurement section designating section 41 determines a point at which edge tracking measurement is started (measurement start point Pb, see FIG. 4) and a point at which edge tracking measurement is ended (measurement end point Pe, This is for allowing the operator to designate each measurement section by a point where the property of the edge changes (inflection point C, see FIG. 4).
The tracking shape specification unit 42 allows the operator to select a tracking shape of an edge in each specified measurement section from the measurement start point Pb to the measurement end point Pe from a basic figure (for example, an arc, a straight line, or a free curve). It is for. This selection method will be described with reference to FIGS. For example, by observing the shape of the edge between the measurement start point Pb and the inflection point C1, a candidate closest to the shape of the edge is selected from among a plurality of candidates for the basic figure such as an arc, a straight line, and a free curve. . Here, design data of the work 12 may be prepared, and selection may be made based on the design data. Here, it is assumed that a straight line is selected.
[0019]
Similarly, the shape of the edge between the inflection points C1 and C2 is a free curve, the straight line is between the inflection points C2 and C3, the arc is between C6 and C7, and so on. The basic figure is selected for each edge of the section between the two points designated by (see FIG. 5).
The edge tracking measurement is performed with one work image obtained by setting the CCD camera 18 at a certain position and a certain imaging magnification as one unit. For this reason, the measurement section is also specified by the measurement section specifying unit 41 in units of one work image. For example, in a work image as shown in FIG. 4, even if the edge shape of a portion outside the work image before the measurement end point Pe is a straight line like the measurement section Cn-Pe, the point Pe The measurement section is divided, and the edge tracking measurement of the part before the point Pe is performed by switching the position of the CCD camera 18 to obtain another work image, and separately specifying the measurement section in the work image. Perform an edge tracking measurement.
Similarly, even when the cut edge of one work image has an arc shape or a free curved shape, the measurement section is specified within one work image, and the measurement section of the subsequent part is specified by the position of the CCD camera 18. Is changed over to a new work image obtained at that position.
[0020]
The measurement condition setting unit 43 is for setting measurement conditions (edge detection parameters, imaging magnification, illumination conditions, and the like) when performing edge detection. Here, the edge detection parameter is, for example, a threshold value for binarization, contrast, brightness, or the like. In this embodiment, standard parameters are set in the measurement condition setting unit 43, and these parameters are normally used, and the parameters are reset only when another parameter is to be used. For example, this standard parameter is used between the measurement start point Pb and the inflection point C1 shown in FIG. 4, and the contrast before and after the edge between the inflection points C6 and C7 is different from that of the standard parameter. Since they are different, another parameter is set, and so on. Of course, it is also possible to set the parameters each time the edge detection is executed without setting the standard parameters.
[0021]
The resetting of the edge detection parameter is performed as follows. That is, the simple tool ST as shown in FIG. 6A is applied, and appropriate parameters are input to execute the edge detection by the simple tool ST. The simple tool ST is a tool that detects a density level of a work image from a base end to an end of an arrow having a length W, and detects a point where the density level changes rapidly as an edge point (x, y). is there. The detection result of the simple tool ST is compared with the actual work image, and parameters are set so that the deviation between the two is reduced. Instead of such a method, the operator may visually check the work image and input a parameter determined to be appropriate.
[0022]
The tool determining unit 44 determines the type of the measurement tool corresponding to the tracking shape specified by the tracking shape specifying unit 42. Basically, the tracking shape and the measuring tool are stored in a one-to-one correspondence in the tool determining unit 44. When the tracking shape is selected by the tracking shape specifying unit 42, the type of the measuring tool is changed by the tool determining unit 44. Preferably, it is determined automatically. For example, when a straight line is selected as the tracking shape, a box tool BT as shown in FIG. 6B is used, and when an arc is selected, an arc tool CT as shown in FIG. When a curve is selected, it is determined that the auto-trace tool AT as shown in FIG.
As shown in FIG. 6B, the box tool BT is a rectangular box-shaped measurement tool, and has a length W of arrows at both ends, a width H of arrows at both sides, an angle θ, and a measurement section of the measurement section. It is defined by the coordinate values of both ends (measurement start point Pb, measurement end point Pe, or inflection point C). The edge shape is measured by repeating the edge detection from the base end to the front end of the arrow at a predetermined interval ΔH in the width H.
[0023]
As shown in FIG. 6 (C), the circular arc tool CT includes points on both ends (measurement start point Pb, measurement end point Pe, or inflection point Ck) of the measurement section and edges on the edges between these both ends. It is defined by the coordinate value of a point (relay point). That is, the width of the arc tool CT is defined by the positions of the points at both ends of the measurement section, and the curvature is determined based on the positional relationship between the points at both ends and the relay point. By setting offsets at both ends of the arc with respect to the edge shape of the arc at both ends, by performing edge detection a plurality of times from the base end to the tip of the arrows arranged radially at equal angular intervals Δψ, Measure the edge shape.
As shown in FIG. 6D, the auto trace tool AT is defined by the length W of the arrow on both ends, the width H of the arrow on both sides, and the angle θ, similarly to the box tool BT. A plurality of arrows are set similarly to the box tool BT. As shown in FIG. 6D, the auto trace tool AT is disposed so as to surround one end of an edge defined by two points (inflection point C and the like) specified by the measurement section specifying unit 41, and When the angle θ is input, the edge is detected from the base end of the arrow toward the tip end similarly to the box tool. Based on the result of the edge detection, the position where the next auto trace tool AT is arranged and the angle θ are automatically set. Is determined. At this automatically determined position, edge detection is performed in the same manner, and based on this result, the next automatic trace tool arrangement position and angle θ are automatically determined. By repeating this, the shape of the free curved edge is measured.
Note that it is also possible to prepare two or more measurement tools corresponding to the tracking shape and allow the operator to select one of them. For example, when a straight line is selected in the tracking shape specifying unit 42, the operator can select either the simple tool ST or the box tool BT.
[0024]
The part program generation unit 45 measures from the measurement start point Pb through each inflection point based on the contents specified, set, and determined by the measurement section specification unit 41, the measurement condition setting unit 43, and the tool determination unit 44. A part program for executing the tracking measurement of the edge reaching the end point Pe is generated. The part program output unit 46 outputs the part program generated by the part program generation unit 45 to the program memory 36.
[0025]
Next, a procedure of generating a part program for executing the edge tracking measurement by the part program generation system will be described with reference to FIGS. FIG. 7 is a flowchart showing a procedure for generating a part program, and FIGS. 8 to 11 show execution screens of the part program generation program.
When the part program generation program is started, a screen as shown in FIG. As shown in FIG. 8, on the execution screen of the part program generation program, a work image display screen 51 and an input screen 52 are displayed. On the work image display screen 51, an image of the work 12 captured by the CCD camera 18 is displayed. The input screen 52 includes, as shown in FIG. 9, for example, an instruction display column 61 for instructing the operator to perform a task to be performed, a graphic display column 62 in which the instruction displayed on the instruction display column 61 is imaged, A counter 63 for displaying the number of selected inflection points, a check box display field 64, and a transition instruction icon 65 are displayed.
[0026]
The input screen 52 immediately after the start of the part program generation program is as shown in FIG. That is, the measurement section designating section 41 is operated, and the characters "Please specify the measurement start point" are displayed in the instruction display column 61, and the operator is prompted to input the measurement start point. The operator moves the pointer P of the mouse 24 to move the pointer P to the point to be the measurement start point Pb in the work image displayed on the work image display screen 51 and clicks the mouse 24. By clicking “Next”, the measurement start point Pb is designated (S1 in FIG. 7). At the clicked point on the work image display screen 51, a mark indicating selection is displayed. The “previous” of the transition support icon 62 is for giving an instruction to return to the input stage of the work performed one step before, and the “suspend” is for closing the part program generation program itself. Things.
[0027]
When the measurement start point Pb is designated, the input screen 52 switches to a display as shown in FIG. That is, when the tracking shape specifying unit 42 is operated, as shown in FIG. 10 (A), the characters "Please specify the tracking shape suitable for the workpiece shape to be measured" are displayed in the instruction display column 61. You. At the same time, in the graphic display column 62, an icon for selecting a tracking shape from the three basic figures of “straight line”, “arc”, and “free curve” is displayed. The operator moves the pointer P of the mouse 24 and clicks on one of the icons in the graphic display column 62 to specify a tracking shape (S2 in FIG. 7). Click to highlight the icon.
[0028]
At the time of selecting the tracking shape, if it is desired to use a parameter different from the standard edge detection parameter for the selected edge, check the “Reset edge detection parameter” check box in the check box display field 64. Then, click “Next” of the transfer instruction icon 62. To use the standard parameters as they are as the edge detection parameters, click “Next” without checking the check box.
[0029]
If the user clicks the “Next” button of the transition instruction icon 62 after checking the “Reset edge detection parameter” check box in the check box display field 64, a small screen as shown in FIG. Is displayed. That is, in this embodiment, a simple tool as shown in FIG. 6 is used for resetting the edge detection parameter. Therefore, as shown in FIG. Please set. "Is displayed. When the position to which the simple tool is to be assigned is designated with the mouse 24 and the display of “OK” is clicked, the simple tool performs edge detection, so that the optimum parameters are determined while observing the detection result. The determined parameters are set instead of the standard parameters.
[0030]
If the user clicks “Next” of the shift instruction icon 62 without checking the “Reset Edge Detection Parameter” check box in the check box display field 64, the process proceeds to S4 described below. On the screen of FIG. 10, when the “Previous” icon is clicked, the screen returns to the screen of FIG. 9.
When “arc” is selected as the tracking shape, a small screen as shown in FIG. 10C is further opened, and in order to set the arc tool, the small screen between the inflection point Cn and the inflection point Cn + 1 is set. The operator is prompted to specify a point on the edge (hereinafter, referred to as a relay point). After clicking the relay point on the work image display screen 51 with the mouse, the operator clicks the “OK” icon shown in FIG. 10C to complete the specification of the relay point.
[0031]
When the “next” icon is pressed on the screen of FIG. 10, the input screen 52 shifts to the display state shown in FIG. On this screen, the inflection point C or the measurement end point Pe is specified.
That is, when the measurement section designating section 41 is operated, the character "Please specify the next inflection point" is displayed in the instruction display column 61 as shown in FIG. At the same time, the graphic display column 62 displays a graphic image of the contents of the instruction. The operator moves the pointer P of the mouse 24, positions the pointer P on the work image displayed on the work image display screen 51 at a point to be the inflection point C 1, and clicks the mouse 24. At the clicked point on the work image display screen 51, a mark indicating selection is displayed. Thereafter, by clicking "next" of the transition instruction icon 65, the inflection point C1 is determined. By this operation, the measurement section is determined, and the counter 63 indicating the number of inflection points counts up.
[0032]
If the user wants to input the measurement end point Pe instead of the inflection point C, he or she clicks the mouse 24 on the work image display screen 51 while placing the pointer P on the point to be the measurement end point Pe, and displays a check box display field. Click “Set current setting as final measurement section” at 64 and then click “Next” on transition support icon 65.
[0033]
When the inflection point C is designated instead of the measurement end point Pe, the process returns to S2 and the procedure of S2-S4 is repeated (N of S5 in FIG. 7). In the example of FIG. 4, the procedure of S2-S4 is repeated (n-1) times from the designation of the inflection point C1 to the designation of Cn. On the other hand, when the measurement end point Pe is specified (Y in S5 of FIG. 7), the part program generation unit 45 is activated, and starts at the measurement start point Pb, passes through each specified inflection point C, A part program for tracking and measuring a workpiece shape having the measurement end point Pe as an end point, that is, an edge shape is created (S6 in FIG. 7). By executing this part program, edge shape data from the measurement start point Pb to the measurement end point Pe is obtained in the form of position data of edge detection points at predetermined intervals. The position data of the edge detection points is collected in one buffer (not shown) and output to a file as appropriate.
[0034]
In creating a part program for tracking measurement of the edge shape, the position data of each point designated by the measurement section designation unit 41 and the type of the measurement tool determined by the tool determination unit 44 according to the selected tracking shape And the measurement condition data such as the edge detection parameters set by the measurement condition setting unit 43 are used.
For example, when a “straight line” is designated as a tracking shape for a certain measurement section, and as a result it is determined that the box tool BT is used as a measurement tool, based on the position data of the points at both ends of the measurement section. Thus, the size, arrangement angle and the like of the box tool BT are determined and are included in the part program. When the edge detection parameters and the like are reset, these are also included in the part program.
When “arc” is selected as the tracking shape for a certain measurement section, and as a result it is determined that the circular tool CT is used as the measurement tool, the positions of both ends of the measurement section and the positions of the relay points are determined. Based on the data, the size, arrangement position, and the like of the arc tool CT are determined. When the edge detection parameters and the like are reset, these are also included in the part program.
The box tool BT and the arc tool CT arranged as described above perform edge detection while referring to the tracking shape specified by the tracking shape specifying unit 42, and the edge that does not clearly follow the tracking shape due to burrs, dust, and the like. Is detected, the edge detection result is discarded. Thus, the measurement does not stop halfway as in the related art.
[0035]
In the case of the auto trace tool AT, the effects of burrs, dust, and the like cannot be removed. However, in the case of the present embodiment, the auto-trace tool AT is arranged and operated only between inflection points having a constant edge property, and therefore, at least in the middle due to the change in the edge property as in the related art. Will not stop. In the case of measurement stop due to burrs or dust, the possibility of stopping the measurement can be made lower than that in the conventional technique, for example, when the operator looks at the work image display screen 51 and specifies an inflection point at the point where the burr exists. It is considered possible.
[0036]
The embodiments of the present invention have been described above, but the present invention is not limited thereto. In the above embodiment, an image of the actual workpiece 12 is displayed, and the measurement start point, the measurement end point, and the inflection point are specified on this image. However, the CAD data is read and the CAD data is displayed. After performing the work of developing the data into a format suitable for the operation and matching the CAD data coordinate system with the work coordinate system, the CAD data is displayed on the CRT 25, and the measurement section (measurement start point, measurement end point) is displayed on the CAD data image. Point and inflection point).
[0037]
【The invention's effect】
As described above, according to the present invention, the tracking measurement is performed in the direction desired by the operator without being affected by the presence of burrs and dust on the route of the edge tracking measurement, the presence of the branch route, and the change in the edge property. And a program for generating an edge tracking measurement program capable of executing the program.
[Brief description of the drawings]
FIG. 1 is a perspective view showing a configuration of a non-contact image measurement system according to an embodiment of the present invention.
FIG. 2 is a block diagram showing a configuration of a computer main body in the image measurement system according to the embodiment of the present invention.
FIG. 3 is a block diagram showing a part program generation system 40 realized in the computer main body 2.
FIG. 4 shows how a measurement section specifying unit 41 shown in FIG. 3 specifies a section.
5 shows how to select and determine by a tracking shape specifying unit 42 and a tool determining unit 43 shown in FIG.
FIG. 6 shows various measurement tools.
FIG. 7 is a flowchart showing a procedure of generating a part program by the part program generation system 40.
FIG. 8 shows an example of a screen display on the CRT 25 when a part program generating program is executed.
FIG. 9 shows an example of a screen display of the CRT 25 when a part program generating program is executed.
FIG. 10 shows an example of a screen display on the CRT 25 when a part program generating program is executed.
FIG. 11 shows an example of a screen display on the CRT 25 when a part program generating program is executed.
FIG. 12 illustrates a problem of the related art.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Image measuring machine, 2 ... Computer system, 3 ... Printer, 11 ... Stand, 12 ... Work, 13 ... Measurement table, 14, 15 ... Support arm, 16 ... X-axis guide, 17 ... Imaging unit, 18 ... CCD camera, 21 ... Computer body, 22 ... Keyboard, 23 ... Joystick box, 24 ... Mouse, 25 ...・ CRT, 31, 34 ・ ・ ・ Interface, 32 ・ ・ ・ Multi-valued image memory, 33 ・ ・ ・ Display control unit, 35 ・ ・ ・ CPU, 36 ・ ・ ・ Program memory, 37 ・ ・ ・ Work memory, 41 ・ ・ ・Measurement section designation section, 42: Tracking shape designation section, 43: Measurement condition setting section, 44: Tool determination section, 45: Part program generation section, 46: Part program Ram output unit, 51: Work image display screen, 52: Input screen, 61: Instruction display field, 62: Graphic display field, 63: Counter, 64: Check box display field, 65: Transfer instruction icon

Claims (6)

A display unit for displaying a measured image including an edge to be tracked and measured,
Measurement section designation means for specifying a plurality of measurement sections on the measured image to divide between the start point and the end point of the tracking measurement on the edge,
Tracking shape designation means for designating a tracking shape for each measurement section designated by the measurement section designation means,
Measurement tool determining means for determining a measurement tool for edge shape measurement used for tracking measurement in each of the measurement sections based on the tracking shape specified by the tracking shape specifying means,
The measurement tool determined by the measurement tool determination means performs the edge tracking measurement along the tracking shape for each measurement section, thereby generating a program for performing the edge tracking measurement from the start point to the end point of the tracking measurement. And an edge tracking measurement program generating means. The image measurement apparatus according to claim 1, further comprising a measurement condition setting unit configured to set measurement conditions for edge tracking measurement in each of the measurement sections. The tracking shape designation means is capable of designating a free curve as the tracking shape,
When the free curve is specified by the tracking shape specifying unit, the measurement tool determining unit sequentially extracts the point sequence information of the edge while tracking and measuring the edge of the measurement section according to the specification. The image measurement device according to claim 1, wherein the image measurement device determines to use as a measurement tool. Displaying a measured image including an edge to be tracked and measured;
Specifying a plurality of measurement sections on the measured image to divide between the start point and the end point of the tracking measurement at the edge,
Specifying a tracking shape for each of the specified measurement sections;
Determining a measurement tool for edge shape measurement used for tracking measurement in each of the measurement sections based on the specified tracking shape,
Generating a program for performing the edge tracking measurement from the start point to the end point of the tracking measurement by the measurement tool determined for each of the measurement sections along the tracking shape and thereby performing the computer. A program for generating an edge tracking measurement program, wherein the program is configured to be executed. The program for generating an edge tracking measurement program according to claim 4, wherein the program is configured to cause a computer to execute steps for setting measurement conditions for edge tracking measurement in each of the measurement sections. In the step of specifying the tracking shape, a free curve can be specified as the tracking shape, and when the free curve is specified, in the step of determining the measurement tool, the edge of the measurement section according to the specification is determined. The program for generating an edge tracking measurement program according to claim 4, wherein it is determined that an auto trace tool that sequentially extracts the point sequence information of the edge while tracking measurement is used as the measurement tool.

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