JP3183811B2 - Inspection support device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inspection support apparatus for supporting an enlargement inspection of an object, and more particularly to an inspection support apparatus suitable for supporting an enlargement inspection and correction of a component mounting board or the like.

For example, in the manufacture of a printed circuit board, it is necessary to inspect the printed circuit board itself for defects, the mounting state of components mounted on the printed circuit board, soldering, wiring defects, and the like. Support equipment is required.

A device that supports such an enlarged inspection can easily detect a defective portion found on an enlarged image on an actual substrate, and can perform inspection, correction, and the like on the same device. Is required.

[0004]

2. Description of the Related Art When inspecting an article, a magnifying device such as a microscope or an enlarging display device such as a monitor television is provided so that a desired portion can be enlarged and inspected. Widely used is a combination of a control mechanism such as an XY table for moving an arbitrary portion on a target object directly below a lens of a magnifying device such as a microscope or a camera lens of a magnifying display device (monitor). Conventionally, however, such an apparatus is generally used for inspection of a printed circuit board itself, inspection of a component mounting state of the substrate, visual inspection of a soldering state, and the like.

[0005] When a visual inspection of an article is performed using such an enlarged display device, a part displayed in an enlarged manner includes:
If there is a defect (soldering defect, mounting defect, wiring defect, etc.), instruct in some way on the inspection object (actual board) to correct the position on the spot or in a later process It is necessary to specify it.

Conventionally, such a defective portion is specified (specified).
As the method, the following various methods are used.

(1) While viewing the enlarged image, a mark indicating a defective portion is attached by a method such as sticking a seal under a lens or a camera for enlarged display.

(2) The coordinates of the defective part on the XY table are stored, and in the next step, the defective part is indicated by the indicating mechanism.

(3) The enlarged image is stored and displayed in a fixed manner, and the image is compared with the actual product to search for a target defective portion.
Alternatively, by displaying the board layout and displaying on the screen which position of the defective portion corresponds to the entire layout, the target defective portion is searched for while looking at it.

In the appearance inspection of a printed circuit board or a printed circuit board unit on which components are mounted, there is a case where a sensory inspection is performed in comparison with a limit sample, such as an inspection of a soldering shape, and a case where a positional deviation amount of a component or a lead is determined. As in the case of the determination, there is a case where a quantitative inspection is performed to quantitatively determine the quality.

The sensory test for judging the quality by comparing the soldering state with the limit sample is performed by storing an enlarged image of the limit sample relating to the non-defective product and the defective product in a memory in advance, and displaying the enlarged image on the enlarged display unit during the inspection. Japanese Patent Laid-Open Publication No. 5-332948 discloses a method that is additionally shown as necessary.

[0012] However, a method of quantitatively judging the amount of misalignment of a component or a lead and performing a measurable inspection for deciding whether or not to use a magnified image has conventionally been practiced by actually enlarging a scale on a display screen. The only known method is to determine the length by measuring the length.

[0013]

The first problem in the prior art is as follows.
The following points can be raised in the conventional method for indicating (specifying) a defective portion shown in the above (1) to (3).

In the method shown in the above (1), for example, in the case of inspection of a soldered portion, in order to confirm a defective portion by enlarging it about twice, the lens or camera and the object to be inspected are in a focused state. Distance becomes considerably smaller. On the other hand, in order to mark on the inspection object, it is necessary to provide a certain distance between the lens or camera and the inspection object, but in such a state, the image becomes unclear. In addition, it becomes difficult to associate the enlarged image with a point on the inspection target object.

In the method (2), a pointing device and the like are required separately in addition to the enlarged display device, and a system for transferring coordinate information to the pointing device is required.

In the method shown in (3), the approximate position can be determined, but it is difficult to specify a small portion. Particularly, in the case of an IC having a fine wiring pitch, it is difficult to identify defective leads among many leads.

An object of the present invention is to solve such a problem of the prior art, and it is possible to easily specify a defective portion detected on an enlarged screen on an inspection target object.
An object of the present invention is to provide an inspection support apparatus that can easily perform a defect correction and the like in addition to an inspection on the same apparatus.

[0018]

Means for Solving the Problems [1] FIG. 1 shows the basic configuration (1) of the present invention. The present invention
A lens or camera 2 and a half mirror 3 provided on the front surface thereof are integrally provided, an enlarged image of the inspection object 5 is obtained based on the transmitted light from the half mirror 3, and the inspection object 5 is placed. The imaging unit 1 is movable in the vertical direction with respect to the surface, and when the imaging unit 1 is lowered, an enlarged image of the inspection target object 5 is displayed, and an arbitrary point on the display screen is designated. The enlarged display unit 6 that outputs the coordinate value of the corresponding position on the surface, and by controlling the traveling direction of the projection light according to the coordinate value, the reflected light from the half mirror 3 when the imaging unit 1 is raised. And a light projecting device 8 that forms a light spot at a designated position on the inspection target object 5 based on the detected light spot.

[2] FIG. 2 shows the basic configuration (2) of the present invention. The present invention relates to an enlarged display section 6 for displaying an enlarged image of an inspection object 5 placed on an XY table 4 by a lens or a camera 2, and an XY table having the origin at the center of the lens or the camera 2. 4
And a pointing mechanism for pointing a specific position P separated by a predetermined coordinate value on the position coordinates of the lens or camera 2.
From the position coordinate values of the XY table 4 when the XY table 4 is positioned so that the center of the XY table 4 coincides with the designated position on the inspection target object 5 on the enlarged image, the coordinate value of the X-Y table 4 is obtained. By moving the Y table 4, the specified position P indicated by the pointing mechanism matches the specified position on the inspection target object 5.

[3] In the case of [2], the indicating mechanism 25
However, a specific position is indicated by a light spot.

[4] In the case of [2], the indicating mechanism 25
However, a specific position is indicated by the pointer.

[5] In the case of [2], the indicating mechanism 25
Is an encoder 3 that outputs a coordinate value corresponding to the designated position
The XY table 4 is moved in accordance with the coordinate values, so that the specified position to be designated can be set arbitrarily.

FIG. 1 shows the basic configuration of the present invention (1).
Aims to solve the first problem described above. Reference numeral 1 denotes an imaging unit, which includes a lens or camera 2 for enlarging and displaying an object and a half mirror 3 fixed on the optical axis thereof, and is configured to be able to move vertically. The imaging unit 1 outputs an enlarged image signal of the inspection target object 5 placed on the XY table 4 via the lens or the camera 2.

Reference numeral 6 denotes an enlarged display unit, which displays an enlarged image of the inspection object in response to an image signal from the image pickup unit 1. Reference numeral 7 denotes a field-of-view coordinate controller, which controls the light projecting device 8 based on information on coordinate values from the enlarged display unit 6, and thereby changes the position or direction of the projected light.

At the time of inspection, the enlarged image of the object to be inspected is displayed on the enlarged display unit 6 by the transmitted light from the half mirror 3 by lowering the imaging unit 1 to the in-focus position of the lens or the camera 2. In this state, the enlarged display unit 6 outputs the coordinate value information of the defective point designation point 9 indicating the position of the defective point detected on the display screen.

At the time of indicating a defective portion, the light from the light projecting device 8 is reflected by the half mirror 3 and projected onto the inspection object 5 by raising the imaging unit 1. At this time, by controlling the light projecting device 8 in accordance with the coordinate value information of the defective point designation point 9 by the coordinate controller 7 in the visual field, the light spot generated on the inspection object 5 It will match the position of the location.

Therefore, the operator can know the defective spot from the light spot. For example, in the case of performing a repair work, it is sufficient to perform a required work on this spot. In this case, since the imaging unit 1 is raised, the worker can perform work without being hindered by the imaging unit 1.

FIG. 2 shows the basic configuration (2) of the present invention.
This is also to solve the first problem described above, wherein (a) shows the state before the XY table is moved, and (b) shows the state after the XY table is moved. 1 are indicated by the same numbers as in FIG.
2 shows the position of the pointing mechanism provided at a position separated by a predetermined distance from the pointing mechanism. P is a coordinate position (−) when the center (optical axis) position of the lens or the camera 2 is defined as an origin (0, 0) in an orthogonal coordinate system (X, Y) that defines a movement position of the XY table 4. XP, -YP), and this value is stored in advance.

As shown in FIG. 2A, before moving the XY table, the inspection object 5 is moved to the XY table 4.
It is assumed that the coordinate position (XA, YA) is set when a specific portion (for example, a defective portion) A of the inspection target object 5 that is placed on the upper side is directly below the lens or the camera 2.

During the inspection or after the inspection is completed, the XY table 4 is moved to the coordinate position (XA-XP, YA-) as shown in FIG.
(YP), the defective portion A moves to P and comes directly below the pointing mechanism.

Therefore, the operator can know the defective portion from the position indicated by the pointing mechanism. For example, when performing a repair operation, the operator only needs to perform a required operation on this portion. In this case, since the defective portion is located at a position distant from the lens or the camera 2, the worker can work without being hindered by the lens or the camera 2. Also, at this time, the position of the pointing mechanism can be arbitrarily set in accordance with the working conditions, and the defective portion can be moved to that position, so that the workability can be improved.

FIG. 3 shows a further developed principle of the present invention. On the screen of the enlarged display section 6, a lead section 16 and a pad section 17 to which each lead is to be soldered are shown. ing. Reference numeral 18 denotes a cursor output device, which is a two-line determination cursor 1 on the screen of the enlarged display unit 6.
9 is also shown.

The cursor output device 18 previously stores a deviation limit value (expressed in units of one pixel) for each component type and a distance (length) 1 per pixel on the screen.
Now, assuming that the component type being enlarged and displayed is, for example, 01 and is displayed by enlarging it with the magnification B of the lens or the camera, the cursor output device 18 displays the cursor for determination on the enlarged display screen. 19 as 0.075
Two lines having an interval of (shift limit value) × B (magnification) are displayed.

As described above, the deviation limit value corresponding to the component type is stored in advance, and the length is set as the length corresponding to the enlargement magnification. Since the image is displayed together with the image, the operator can easily determine whether or not the deviation is within an allowable limit by comparing the cursor for determination with the position where the inspection of the deviation is desired.

Therefore, there is no need to measure the length on the enlarged image using a scale or the like, or to calculate the actual shift amount from the enlargement ratio. The form of the cursor is arbitrary as long as it has a shape that can be a reference for the length, for example, an arrow having a length serving as a criterion may be used,
It can be set according to the shape of the displayed inspection object. Also, depending on the state of the displayed image,
The operation can be arbitrarily performed such as movement or rotation, and the determination can be made in accordance with the location to be compared.

As the judgment cursor, an orthogonal cursor composed of two lines having the same interval may be used. By doing so, each orthogonal cursor in an IC (QFP) having a lead on each orthogonal side can be used. It is not necessary to rotate the cursor for determination each time the inspection of the deviation limit value between the lead portion and the pad portion on the side is performed.

Further, a circular figure may be used as the cursor for determination, whereby each side orthogonal to the horizontal direction of the image is displayed on the enlarged image. IC (QFP)
When inspecting the deviation limit value between the lead and the pad on each orthogonal side, it is not necessary to rotate the determination cursor each time.

Further, a cursor whose interior is uniformly colored with a single color may be used as the determination cursor. By doing so, the above-mentioned determination cursor consisting of two orthogonal lines having the same interval is used. When a cursor or a circular determination cursor is used, an enlarged image of a lead portion, a pad portion, or the like is not displayed inside the determination cursor, so that the outline of the determination cursor is not mistaken. ,
Judgment becomes easier.

[0039]

FIG. 4 shows an embodiment (1) of the present invention.
1 shows an inspection support apparatus corresponding to the principle configuration (1), and the same components as those in FIG. 1 are indicated by the same numbers. In the light emitting device 8, reference numeral 21 denotes a light source including a laser diode (LD) or the like;
Reference numerals 22 and 23 denote light traveling direction variable mirrors. 24
Is a mirror control device that controls the angles of the X-axis and the Y-axis of the light traveling direction variable mirrors 22 and 23.

The system according to the embodiment (1) includes a lens or camera 2 for picking up an image of an inspection object 5 and a half mirror 3.
And an imaging unit 1 integrated with the imaging unit 1 and movable in the vertical direction.
An XY table 4 for moving the inspection target portion of the inspection target object 5 within the field of view of the inspection support device, and an enlarged display including a touch panel for displaying an enlarged image and acquiring position coordinates in the screen. A light emitting device 8 having a light source 21 and light traveling direction variable mirrors 22 and 23 for optically indicating the position of the inspection target object corresponding to an arbitrary position in the field of view based on the acquired coordinates; And a mirror control device 24 for controlling the light traveling direction variable mirrors 22 and 23.

First, the image pickup unit 1 is at a lowered position indicated by a dotted line, and the image pickup unit 1 displays an enlarged image of the inspection object 5 on the enlarged display unit 6 by the transmitted light from the half mirror 3. When a defective part is found in the screen of the enlarged display unit 6, the operator touches the defective part designated point 9 on the screen with a pen or the like, and the coordinate information of this point is transferred to the mirror control device 24. Along with this, the imaging unit 1 moves up to the position shown by the solid line, and the light from the light projecting device 8 is projected on the half mirror 3.

The mirror control device 24 outputs a control signal to the light projecting device 8 based on the acquired coordinate values in the screen,
Thus, in the light projecting device 8, the light from the light source 21 is reflected by the half mirror 3 by changing the angles of the X-axis and the Y-axis of the light traveling direction variable mirrors 22 and 23, respectively. It is projected on the above-mentioned defective indication part and instructs it. The mirror control device 24 controls the light traveling direction variable mirrors 22 and 23 to change the traveling direction of the light. At this time, by changing the control amount according to the magnification at the time of the enlarged display, the mirror control device 24 always corrects the failure. It has the function of irradiating the indicated location.

In this state, the operator only needs to perform a required operation such as correction on a portion of the inspection target object 5 which is optically indicated. At this time, since the imaging unit 1 is at the raised position, there is no hindrance to the work. In the embodiment (1), when a defective part is found, the XY table 4
Is moved to make the defective portion coincide with the origin set on the screen, the light from the light projecting device 8 is improved in a certain direction. This eliminates the need for the mirror control device 24 and the light traveling direction variable mirrors 22 and 23, thereby enabling a simple configuration of the device.

FIGS. 5A and 5B show the system configuration of the embodiment (2) of the present invention. FIG. 5A shows the entire configuration, FIG. 5B shows an instruction method using an optical instruction mechanism, and FIG. Is an instruction method using a mechanical instruction mechanism. FIG. 5 shows an inspection support device corresponding to the basic configuration (2), and the same components as those in FIG. 4 are indicated by the same numbers. 25 is a pointing device for pointing an arbitrary position on the inspection target object, 26 is a control storage device for controlling input / output of image signals and storing, 27 is X-
An XY controller for controlling the movement of the Y table 4;
Reference numeral 8 denotes a hand switch for instructing movement of the XY table 4.

The system according to the embodiment (2) includes an XY table 4 for moving the inspection target portion of the inspection target object 5 within the field of view of the inspection support device, and a lens for enlarging and displaying the inspection target object. Or a camera 2, a lens or a pointing mechanism 25 for pointing a designated point at a predetermined distance from the camera 2, storage of image signals, input / output, and coordinate values, X-
The control storage device 26 performs processing such as transfer of coordinate values to the Y controller 27, and the enlarged display unit 6 for displaying an enlarged image.

The position coordinates (X P) of the point indicated by the indicating mechanism 25 with the center (optical axis) of the lens or the camera 2 as the origin.
, YP) are stored in the control storage device 26 in advance. When an operator performs an inspection while viewing an enlarged image of an inspection target object 5 such as a printed circuit board placed on an XY table 4 on the enlarged display section 6, and finds a defective portion, the XY controller The XY table 4 is moved via 27 to make the defective portion coincide with the origin of the coordinates set on the screen.

By operating the hand switch 28 in this state, the control storage device 26 stores the XY at that time.
XY according to the position coordinates (XA, YA) of the table 4
The table 4 is moved to the position coordinates (XA-XP, YA-YP). As a result, the defective portion on the inspection target object 5 comes directly below the pointing mechanism 25, so that the worker may perform a required operation on the portion specified by the pointing mechanism 25. At this time, since the lens or the camera 2 is located at a position away from the defective portion, the operation is not hindered.

As shown in FIG. 5 (a), the indicating mechanism 25 may be of a type in which a light spot is projected on a defective portion on the inspection object 5 by a pointing unit 31 composed of a light projecting device, and As shown in FIG. 5 (b), a type in which a defective portion on the inspection target object 5 is pointed at the tip thereof by an indicator 32 made of an indicator needle may be used.

FIG. 6 shows another example of the support mechanism, in which the same components as those in FIG. 5 are denoted by the same reference numerals. Reference numeral 33 denotes an arm that supports the support unit 31, reference numeral 34 denotes an encoder that outputs the coordinate values of the support unit 31 as digital values, and reference numeral 35 denotes a counting device that counts the digital values and outputs the coordinate values.

In the apparatus shown in FIG.
Is moved to indicate an arbitrary position, the counting device 3
5 outputs coordinate values (X P, Y P) of the point indicated by the indicating unit 31 when the center (optical axis) of the lens or the camera 2 is set to the origin (0, 0) by a signal from the encoder 34; The control storage device 26 stores the coordinate values. X
When the −Y table is moved, the coordinate values are output to the XY controller 27 together with the coordinate values of the defective portion on the inspection target object, so that the instruction unit 31 correctly specifies the designated point on the inspection target object. be able to.

FIG. 7 shows the system configuration of the embodiment (3) of the present invention, and shows an inspection support apparatus corresponding to the basic configuration (3). The same numbers are used. Reference numeral 37 denotes a memory for storing a deviation limit value and the like, and reference numeral 38 denotes input means (for example, a joystick) for controlling the position and direction of the determination cursor.

The system according to the embodiment (3) includes a lens or camera 2 for enlarging and displaying the inspection object 5 and a control memory for inputting / outputting and storing images, magnifications, coordinate values of the XY table 4 and the like. It comprises a device 26, an enlarged display section 6 for displaying an enlarged image, a cursor output device 18 for displaying a determination cursor indicating a deviation limit corresponding to the magnification on the screen of the enlarged display section 6, and the like. ing.

The control storage device 26 displays an enlarged image of the inspection object 5 obtained through the lens or the camera 2 on the screen of the enlarged display unit 6. FIG. 7 shows a lead portion 16 such as an IC including a plurality of leads and a pad portion 17 including a plurality of pads to which each lead is to be soldered. When soldering each lead on the corresponding pad, the misalignment and the misalignment of the parallelism must be within allowable limits.

In response to an instruction from the operator, information on the type of the part being displayed and the magnification is read from the memory 37 to the cursor output device 18. The cursor output device 18
In response to the information, a signal of a determination cursor consisting of two lines having an interval indicating a shift limit value corresponding to the magnification is generated.
Is displayed together with the lead section 16 and the pad section 17 on the screen of FIG.

The operator can easily determine whether or not the deviation is within the allowable limit by comparing the cursor for determination with the position where the deviation is to be inspected. At this time, by providing an input to the cursor output device 18 using the joystick 38, the position and orientation of the cursor can be controlled in accordance with the images of the lead unit 16 and the pad unit 17 without changing the interval between the cursors. Therefore, it is possible to easily determine the allowable limit.

The shape of the determination cursor may be two lines that are orthogonal and have the same interval. The IC (QFP) has leads on each of the orthogonal sides. When such a cursor is used to inspect the deviation limit between the lead and the pad on each of the orthogonal sides, In each case, it is not necessary to rotate the determination cursor.

A circular figure may be used as the shape of the determination cursor. For an IC (QFP) mounted diagonally on a printed circuit board, each side orthogonal to the horizontal direction of the image is displayed even on the enlarged image, but such a cursor must be used. By
Even for an IC (QFP) mounted diagonally, it is not necessary to rotate the determination cursor each time the inspection of the deviation limit value between the lead portion and the pad portion on each orthogonal side is performed.

Further, a cursor whose interior is uniformly colored with a single color may be used as the judgment cursor. In this way, the judgment cursor consisting of the two orthogonal lines having the same interval is used. When a cursor or a circular determination cursor is used, an enlarged image of a lead portion, a pad portion, or the like is not displayed inside the determination cursor, so that the outline of the determination cursor is not mistaken. ,
Judgment becomes easier.

FIG. 8 shows an example of the determination cursor.

In each determination cursor shown in FIG.
Indicates a reference dimension.

(C), (d) and (g) denote cursors for determination by two lines which are orthogonal and have the same interval.
(E) and (f) are circular determination cursors.

(B), (d), and (f) are determination cursors in which the inside is uniformly colored with a single color.

The inspection support apparatus of the present invention can specify an arbitrary position on the enlarged image on the inspection target object, so that it can be applied not only to the inspection support of the object but also to the correction support.

[0064]

As described above, according to the present invention, an object such as a component mounting board is enlarged and displayed, and a specific location detected on the enlarged screen is designated on the object (actual board). Therefore, inspection and correction of a defective portion can be easily performed on the same device.

That is, in the inspection support apparatus of the present invention, the lens or the camera is raised from the object to be inspected,
Alternatively, it is possible to indicate a specific location on the inspection target object in a state where the inspection target object is moved in a plane from the position of the lens or the camera, so that work such as correction of a defective portion can be easily performed.

In this case, the position of the object to be inspected moved from the lens or the camera can be arbitrarily specified and stored, so that the work can be performed in accordance with the conditions of the worker's dominant arm, repair tools and the like. It will be easier.

Further, according to the present invention, the displacement limit corresponding to the magnification can be indicated on the screen on which the object to be inspected is enlarged and displayed, so that the measurement of the displacement amount becomes unnecessary. Pass / fail judgment becomes easy.

[Brief description of the drawings]

FIG. 1 is a diagram showing a basic configuration (1) of the present invention.

FIG. 2 is a diagram showing a basic configuration (2) of the present invention,
(A) shows the state before the movement of the XY table, and (b) shows the state before the movement of the XY table.
This shows the state after the Y table is moved.

FIG. 3 is a diagram showing a basic configuration that further develops the present invention.

FIG. 4 is a diagram showing a system configuration of an embodiment (1) of the present invention.

5A and 5B are diagrams showing a system configuration of an embodiment (2) of the present invention, wherein FIG. 5A shows the entire configuration, FIG. 5B shows an instruction method using an optical instruction mechanism, and FIG. This is an instruction method using an instruction mechanism.

FIG. 6 is a diagram showing another example of the indicating mechanism.

FIG. 7 is a diagram showing a system configuration of an embodiment (3) of the present invention.

FIG. 8 is a diagram illustrating an example of a determination cursor used in the embodiment (3) of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Image pick-up part 2 Lens or camera 3 Half mirror 4 XY table 5 Inspection object 6 Magnification display part 8 Light projecting device 18 Cursor output device 25 Pointing mechanism 34 Encoder

──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Sadao Kakizawa 1015 Uedanaka, Nakahara-ku, Kawasaki-shi, Kanagawa Prefecture Inside Fujitsu Limited (72) Inventor Yukio Sekiya 1015 Kamikodanaka, Nakahara-ku, Kawasaki-shi, Kanagawa Fujitsu Limited ( 72) Inventor Koichi Tanaka 24, Yamanouchi Yamanoshita-cho, Ukyo-ku, Kyoto-shi, Kyoto Omron Life Science Research Institute, Inc. Institution (72) Inventor Yukiya Sawanoi 24, Yamanouchi Yamanoshitamachi, Ukyo-ku, Kyoto-shi, Kyoto Omron Life Science Research Laboratories (56) References JP-A-5-90364 (JP, A) JP-A-3-186737 (JP, A) JP-A-63-120203 (JP, A) (58) Investigated Field (Int.Cl. ^7, DB name) G01N 21/84 - 21/958 G01B 11/00 - 11/30

Claims (4)

(57) [Claims] 1. A lens or camera and a half mirror provided on the front surface thereof are integrally provided to obtain an enlarged image of an inspection target object based on light transmitted from the half mirror and mount the inspection target object. An imaging unit movable up and down with respect to the placed surface, and when the imaging unit descends, by displaying an enlarged image of the inspection target object and by specifying an arbitrary point on the display screen, An enlargement display unit that outputs a coordinate value of a corresponding position on the placement surface, and by controlling a traveling direction of the projection light according to the coordinate value, reflection from the half mirror when the imaging unit is raised. A light projecting device for forming a light spot at the designated position on the inspection object based on light. 2. An enlarged display section for displaying an enlarged image of an inspection object placed on an XY table by a lens or a camera, and a position of the XY table having an origin at the center of the lens or the camera. A pointing mechanism for pointing to a specific position separated by a predetermined coordinate value on the coordinates, wherein the X or X is adjusted so that the center of the lens or camera coincides with a specified position on the inspection target object on the enlarged image.
An inspection support apparatus, wherein a specified position indicated by the indicating mechanism and a specified position on the inspection target object are matched by moving the Y table. 3. The inspection support apparatus according to claim 2, wherein the indicating mechanism indicates the specific position by a light spot. 4. The pointing mechanism includes an encoder that outputs a coordinate value corresponding to a pointing position, and the pointing position can be arbitrarily set by moving the XY table according to the coordinate value. The inspection support apparatus according to claim 2, wherein