JPH0482839U - - Google Patents
Info
- Publication number
- JPH0482839U JPH0482839U JP12793390U JP12793390U JPH0482839U JP H0482839 U JPH0482839 U JP H0482839U JP 12793390 U JP12793390 U JP 12793390U JP 12793390 U JP12793390 U JP 12793390U JP H0482839 U JPH0482839 U JP H0482839U
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- semiconductor laser
- manufacturing apparatus
- heating
- laser manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000013078 crystal Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 241000700560 Molluscum contagiosum virus Species 0.000 claims 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12793390U JPH0482839U (OSRAM) | 1990-11-28 | 1990-11-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12793390U JPH0482839U (OSRAM) | 1990-11-28 | 1990-11-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0482839U true JPH0482839U (OSRAM) | 1992-07-20 |
Family
ID=31875415
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12793390U Pending JPH0482839U (OSRAM) | 1990-11-28 | 1990-11-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0482839U (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013089682A (ja) * | 2011-10-14 | 2013-05-13 | Shin Etsu Handotai Co Ltd | エピタキシャルウエーハの製造方法 |
-
1990
- 1990-11-28 JP JP12793390U patent/JPH0482839U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013089682A (ja) * | 2011-10-14 | 2013-05-13 | Shin Etsu Handotai Co Ltd | エピタキシャルウエーハの製造方法 |
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