JPH0481523B2 - - Google Patents

Info

Publication number
JPH0481523B2
JPH0481523B2 JP28438285A JP28438285A JPH0481523B2 JP H0481523 B2 JPH0481523 B2 JP H0481523B2 JP 28438285 A JP28438285 A JP 28438285A JP 28438285 A JP28438285 A JP 28438285A JP H0481523 B2 JPH0481523 B2 JP H0481523B2
Authority
JP
Japan
Prior art keywords
silicon tetrafluoride
silica gel
siloxanes
gas
tetrafluoride gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP28438285A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62143812A (ja
Inventor
Isao Harada
Hiroyuki Momotake
Nobuhiko Koto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Toatsu Chemicals Inc
Original Assignee
Mitsui Toatsu Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Toatsu Chemicals Inc filed Critical Mitsui Toatsu Chemicals Inc
Priority to JP28438285A priority Critical patent/JPS62143812A/ja
Publication of JPS62143812A publication Critical patent/JPS62143812A/ja
Publication of JPH0481523B2 publication Critical patent/JPH0481523B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
JP28438285A 1985-12-19 1985-12-19 四弗化ケイ素の精製法 Granted JPS62143812A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28438285A JPS62143812A (ja) 1985-12-19 1985-12-19 四弗化ケイ素の精製法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28438285A JPS62143812A (ja) 1985-12-19 1985-12-19 四弗化ケイ素の精製法

Publications (2)

Publication Number Publication Date
JPS62143812A JPS62143812A (ja) 1987-06-27
JPH0481523B2 true JPH0481523B2 (cs) 1992-12-24

Family

ID=17677859

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28438285A Granted JPS62143812A (ja) 1985-12-19 1985-12-19 四弗化ケイ素の精製法

Country Status (1)

Country Link
JP (1) JPS62143812A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7666379B2 (en) 2001-07-16 2010-02-23 Voltaix, Inc. Process and apparatus for removing Bronsted acid impurities in binary halides

Also Published As

Publication number Publication date
JPS62143812A (ja) 1987-06-27

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