JPH0478921U - - Google Patents
Info
- Publication number
- JPH0478921U JPH0478921U JP12098990U JP12098990U JPH0478921U JP H0478921 U JPH0478921 U JP H0478921U JP 12098990 U JP12098990 U JP 12098990U JP 12098990 U JP12098990 U JP 12098990U JP H0478921 U JPH0478921 U JP H0478921U
- Authority
- JP
- Japan
- Prior art keywords
- filter
- ceiling
- shutter
- fixing member
- clean room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007664 blowing Methods 0.000 claims description 5
Landscapes
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12098990U JPH0733855Y2 (ja) | 1990-11-19 | 1990-11-19 | クリーンルームの天井フィルター装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12098990U JPH0733855Y2 (ja) | 1990-11-19 | 1990-11-19 | クリーンルームの天井フィルター装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0478921U true JPH0478921U (no) | 1992-07-09 |
JPH0733855Y2 JPH0733855Y2 (ja) | 1995-08-02 |
Family
ID=31868868
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12098990U Expired - Lifetime JPH0733855Y2 (ja) | 1990-11-19 | 1990-11-19 | クリーンルームの天井フィルター装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0733855Y2 (no) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007111143A1 (ja) * | 2006-03-27 | 2007-10-04 | Yuyama Mfg. Co., Ltd. | 清浄環境維持機能付きキャビネット |
-
1990
- 1990-11-19 JP JP12098990U patent/JPH0733855Y2/ja not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007111143A1 (ja) * | 2006-03-27 | 2007-10-04 | Yuyama Mfg. Co., Ltd. | 清浄環境維持機能付きキャビネット |
Also Published As
Publication number | Publication date |
---|---|
JPH0733855Y2 (ja) | 1995-08-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
EXPY | Cancellation because of completion of term |