JPH0478921U - - Google Patents
Info
- Publication number
- JPH0478921U JPH0478921U JP12098990U JP12098990U JPH0478921U JP H0478921 U JPH0478921 U JP H0478921U JP 12098990 U JP12098990 U JP 12098990U JP 12098990 U JP12098990 U JP 12098990U JP H0478921 U JPH0478921 U JP H0478921U
- Authority
- JP
- Japan
- Prior art keywords
- filter
- ceiling
- shutter
- fixing member
- clean room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007664 blowing Methods 0.000 claims description 5
Landscapes
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Description
第１図は本考案のクリーンルームの天井フイル
ター装置を示す縦断面図である。第２図は下側吹
出部と上側吹出部が重合している状態を示す平面
図である。第３図は第１図のシヤツタ固定部材を
示す斜視図である。第４図は第３図の底板の折返
部およびその近傍を示す縦断面図である。第５図
は下部シヤツタ板を示す平面図である。第６図は
上部シヤツタ板を示す平面図である。第７図は従
来のクリーンルームの天井フイルター装置を示す
縦断面図である。第８図は第７図のフイルタフレ
ームを示す斜視図である。第９図はＨＥＰＡフイ
ルタの近傍に生産機器が配置された場合を示す縦
断面図である。
主要な部分の符号の説明、３１……フイルタフ
レーム、３７……ＨＥＰＡフイルタ、４７……シ
ヤツタ固定部材、４９……下部シヤツタ板、５１
……上部シヤツタ板、５３……吹出小孔、６７…
…下側吹出部、６９……上側吹出部。
FIG. 1 is a vertical sectional view showing a ceiling filter device for a clean room according to the present invention. FIG. 2 is a plan view showing a state in which the lower blowing part and the upper blowing part are overlapped. 3 is a perspective view showing the shutter fixing member of FIG. 1. FIG. FIG. 4 is a longitudinal cross-sectional view showing the folded portion of the bottom plate of FIG. 3 and its vicinity. FIG. 5 is a plan view showing the lower shutter plate. FIG. 6 is a plan view showing the upper shutter plate. FIG. 7 is a vertical sectional view showing a conventional clean room ceiling filter device. FIG. 8 is a perspective view showing the filter frame of FIG. 7. FIG. 9 is a longitudinal sectional view showing a case where production equipment is placed near a HEPA filter. Explanation of symbols of main parts, 31... Filter frame, 37... HEPA filter, 47... Shutter fixing member, 49... Lower shutter plate, 51
...Upper shutter plate, 53...Blowout small hole, 67...
...lower blowing section, 69...upper blowing section.
Claims (1)
ＰＡフイルタを架け渡してなるクリーンルームの
天井フイルター装置において、前記フイルタフレ
ーム間に、多数の吹出小孔が形成されたシヤツタ
固定部材を前記ＨＥＰＡフイルタよりも下方の位
置に架け渡すとともに、このシヤツタ固定部材の
上部に複数の下側吹出部を有する断面く字状の下
部シヤツタ板を載置し、この下部シヤツタ板上に
、前記下側吹出部と重合する複数の上側吹出部を
有する断面く字状の上部シヤツタ板をスライド可
能に重置してなることを特徴とするクリーンルー
ムの天井フイルター装置。 Between the filter frames installed on the ceiling,
In a clean room ceiling filter device in which a PA filter is spanned, a shutter fixing member having a large number of small air outlet holes is spanned between the filter frames at a position below the HEPA filter, and the shutter fixing member is A lower shutter plate having a dogleg-shaped cross section having a plurality of lower blowing portions is placed on top of the lower shutter plate; A ceiling filter device for a clean room, characterized in that the upper shutter plates of the above are slidably placed one on top of the other.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12098990U JPH0733855Y2 (en) | 1990-11-19 | 1990-11-19 | Clean room ceiling filter equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12098990U JPH0733855Y2 (en) | 1990-11-19 | 1990-11-19 | Clean room ceiling filter equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0478921U true JPH0478921U (en) | 1992-07-09 |
| JPH0733855Y2 JPH0733855Y2 (en) | 1995-08-02 |
Family
ID=31868868
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12098990U Expired - Lifetime JPH0733855Y2 (en) | 1990-11-19 | 1990-11-19 | Clean room ceiling filter equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0733855Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007111143A1 (en) * | 2006-03-27 | 2007-10-04 | Yuyama Mfg. Co., Ltd. | Cabinet with clean environment maintaining function |
-
1990
- 1990-11-19 JP JP12098990U patent/JPH0733855Y2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007111143A1 (en) * | 2006-03-27 | 2007-10-04 | Yuyama Mfg. Co., Ltd. | Cabinet with clean environment maintaining function |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0733855Y2 (en) | 1995-08-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |