JPS6016952U - Clean room air supply outlet device - Google Patents
Clean room air supply outlet deviceInfo
- Publication number
- JPS6016952U JPS6016952U JP10831283U JP10831283U JPS6016952U JP S6016952 U JPS6016952 U JP S6016952U JP 10831283 U JP10831283 U JP 10831283U JP 10831283 U JP10831283 U JP 10831283U JP S6016952 U JPS6016952 U JP S6016952U
- Authority
- JP
- Japan
- Prior art keywords
- clean room
- outlet device
- air supply
- room air
- supply outlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Central Air Conditioning (AREA)
- Ventilation (AREA)
- Duct Arrangements (AREA)
- Air-Flow Control Members (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図は、従来のクリーンルームにおけるフィルターボ
ックスの設置状態の平面図、第2図は、従来のクリーン
ルーム内の塵埃の飛散状態を示す断面図、第3図乃至第
6図は、本考案の多孔板吹出口を設けたクリーンルーム
のフィルターボックスの設置状態であって、第3図はク
リーンルームの平面図、第4図は断面図、第5図は要部
断面図、第6図はその側面図、第7図は多孔板吹出口の
斜視図である。
1;クリーンベンチ、2;フィルターボックス、7;多
孔板吹出口。
岑 4MFig. 1 is a plan view of the installed state of a filter box in a conventional clean room, Fig. 2 is a sectional view showing the state of dust scattering in a conventional clean room, and Figs. The installed state of a filter box in a clean room equipped with a plate air outlet, Fig. 3 is a plan view of the clean room, Fig. 4 is a sectional view, Fig. 5 is a sectional view of the main part, and Fig. 6 is a side view thereof. FIG. 7 is a perspective view of the perforated plate outlet. 1; Clean bench, 2; Filter box, 7; Perforated plate outlet.岑 4M
Claims (1)
フィルターボックスからクリーンルーム内に清浄な空気
を噴出せしめるものにおいて、無数の小孔を穿孔して形
成した多孔板の四辺を折曲等して大略箱型状となした多
孔板吹出口にて前記のフィルターボックスの吹出口を数
個宛覆うようにしたことを特徴とするクリーンルーム用
給気吹出口装置。In a device that blows clean air into a clean room from multiple filter boxes with built-in ultra-high precision air filters installed in the ceiling, the four sides of the perforated plate formed by punching numerous small holes are bent. A supply air outlet device for a clean room, characterized in that several outlet ports of the filter box are covered with a perforated plate outlet having a roughly box shape.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10831283U JPS6016952U (en) | 1983-07-14 | 1983-07-14 | Clean room air supply outlet device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10831283U JPS6016952U (en) | 1983-07-14 | 1983-07-14 | Clean room air supply outlet device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6016952U true JPS6016952U (en) | 1985-02-05 |
JPS629468Y2 JPS629468Y2 (en) | 1987-03-05 |
Family
ID=30252749
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10831283U Granted JPS6016952U (en) | 1983-07-14 | 1983-07-14 | Clean room air supply outlet device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6016952U (en) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5131567U (en) * | 1974-08-29 | 1976-03-08 | ||
JPS54162840A (en) * | 1978-06-13 | 1979-12-24 | Mitsubishi Electric Corp | Structure of admission port |
JPS5550250A (en) * | 1978-10-06 | 1980-04-11 | Toray Ind Inc | Electrostatic recording material |
-
1983
- 1983-07-14 JP JP10831283U patent/JPS6016952U/en active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5131567U (en) * | 1974-08-29 | 1976-03-08 | ||
JPS54162840A (en) * | 1978-06-13 | 1979-12-24 | Mitsubishi Electric Corp | Structure of admission port |
JPS5550250A (en) * | 1978-10-06 | 1980-04-11 | Toray Ind Inc | Electrostatic recording material |
Also Published As
Publication number | Publication date |
---|---|
JPS629468Y2 (en) | 1987-03-05 |
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