JPH047888Y2 - - Google Patents
Info
- Publication number
- JPH047888Y2 JPH047888Y2 JP1985135775U JP13577585U JPH047888Y2 JP H047888 Y2 JPH047888 Y2 JP H047888Y2 JP 1985135775 U JP1985135775 U JP 1985135775U JP 13577585 U JP13577585 U JP 13577585U JP H047888 Y2 JPH047888 Y2 JP H047888Y2
- Authority
- JP
- Japan
- Prior art keywords
- reference plate
- head shaft
- seal case
- alignment bearing
- seal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001816 cooling Methods 0.000 claims description 17
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 17
- 238000005498 polishing Methods 0.000 claims description 13
- 239000000498 cooling water Substances 0.000 description 8
- 238000006073 displacement reaction Methods 0.000 description 6
- 238000007789 sealing Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 210000002445 nipple Anatomy 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985135775U JPH047888Y2 (fr) | 1985-09-05 | 1985-09-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985135775U JPH047888Y2 (fr) | 1985-09-05 | 1985-09-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6242953U JPS6242953U (fr) | 1987-03-14 |
| JPH047888Y2 true JPH047888Y2 (fr) | 1992-02-28 |
Family
ID=31038281
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985135775U Expired JPH047888Y2 (fr) | 1985-09-05 | 1985-09-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH047888Y2 (fr) |
-
1985
- 1985-09-05 JP JP1985135775U patent/JPH047888Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6242953U (fr) | 1987-03-14 |
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