JPH047820B2 - - Google Patents

Info

Publication number
JPH047820B2
JPH047820B2 JP59084134A JP8413484A JPH047820B2 JP H047820 B2 JPH047820 B2 JP H047820B2 JP 59084134 A JP59084134 A JP 59084134A JP 8413484 A JP8413484 A JP 8413484A JP H047820 B2 JPH047820 B2 JP H047820B2
Authority
JP
Japan
Prior art keywords
silicon
temperature
thermocouple
measuring device
protection tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59084134A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60228932A (ja
Inventor
Ryusuke Oota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumco Techxiv Corp
Original Assignee
Komatsu Electronic Metals Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Komatsu Electronic Metals Co Ltd filed Critical Komatsu Electronic Metals Co Ltd
Priority to JP59084134A priority Critical patent/JPS60228932A/ja
Publication of JPS60228932A publication Critical patent/JPS60228932A/ja
Publication of JPH047820B2 publication Critical patent/JPH047820B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/08—Protective devices, e.g. casings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
JP59084134A 1984-04-27 1984-04-27 光加熱炉用温度測定装置 Granted JPS60228932A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59084134A JPS60228932A (ja) 1984-04-27 1984-04-27 光加熱炉用温度測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59084134A JPS60228932A (ja) 1984-04-27 1984-04-27 光加熱炉用温度測定装置

Publications (2)

Publication Number Publication Date
JPS60228932A JPS60228932A (ja) 1985-11-14
JPH047820B2 true JPH047820B2 (enExample) 1992-02-13

Family

ID=13822025

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59084134A Granted JPS60228932A (ja) 1984-04-27 1984-04-27 光加熱炉用温度測定装置

Country Status (1)

Country Link
JP (1) JPS60228932A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62163323A (ja) * 1986-01-14 1987-07-20 Matsushita Electric Ind Co Ltd 赤外線加熱装置
JPH0633387Y2 (ja) * 1986-06-13 1994-08-31 日本碍子株式会社 熱電対
JPH10239165A (ja) * 1997-02-27 1998-09-11 Sony Corp 基板の温度測定器、基板の温度を測定する方法および基板の加熱方法
JP4557499B2 (ja) * 2003-04-07 2010-10-06 株式会社日立国際電気 基板処理装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5694750A (en) * 1979-12-28 1981-07-31 Nippon Instr Kk Heating treatment device

Also Published As

Publication number Publication date
JPS60228932A (ja) 1985-11-14

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