JPS60228932A - 光加熱炉用温度測定装置 - Google Patents

光加熱炉用温度測定装置

Info

Publication number
JPS60228932A
JPS60228932A JP59084134A JP8413484A JPS60228932A JP S60228932 A JPS60228932 A JP S60228932A JP 59084134 A JP59084134 A JP 59084134A JP 8413484 A JP8413484 A JP 8413484A JP S60228932 A JPS60228932 A JP S60228932A
Authority
JP
Japan
Prior art keywords
silicon
temperature
protection tube
temperature measuring
measuring device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59084134A
Other languages
English (en)
Japanese (ja)
Other versions
JPH047820B2 (enExample
Inventor
Ryusuke Oota
太田　竜介
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumco Techxiv Corp
Original Assignee
Komatsu Electronic Metals Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Komatsu Electronic Metals Co Ltd filed Critical Komatsu Electronic Metals Co Ltd
Priority to JP59084134A priority Critical patent/JPS60228932A/ja
Publication of JPS60228932A publication Critical patent/JPS60228932A/ja
Publication of JPH047820B2 publication Critical patent/JPH047820B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/08—Protective devices, e.g. casings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
JP59084134A 1984-04-27 1984-04-27 光加熱炉用温度測定装置 Granted JPS60228932A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59084134A JPS60228932A (ja) 1984-04-27 1984-04-27 光加熱炉用温度測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59084134A JPS60228932A (ja) 1984-04-27 1984-04-27 光加熱炉用温度測定装置

Publications (2)

Publication Number Publication Date
JPS60228932A true JPS60228932A (ja) 1985-11-14
JPH047820B2 JPH047820B2 (enExample) 1992-02-13

Family

ID=13822025

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59084134A Granted JPS60228932A (ja) 1984-04-27 1984-04-27 光加熱炉用温度測定装置

Country Status (1)

Country Link
JP (1) JPS60228932A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62163323A (ja) * 1986-01-14 1987-07-20 Matsushita Electric Ind Co Ltd 赤外線加熱装置
JPS62203424U (enExample) * 1986-06-13 1987-12-25
WO1998038673A1 (fr) * 1997-02-27 1998-09-03 Sony Corporation Instrument et procede de mesure de la temperature d'un substrat, procede de chauffage d'un substrat et dispositif de traitement par la chaleur
JP2004311712A (ja) * 2003-04-07 2004-11-04 Hitachi Kokusai Electric Inc 基板処理装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5694750A (en) * 1979-12-28 1981-07-31 Nippon Instr Kk Heating treatment device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5694750A (en) * 1979-12-28 1981-07-31 Nippon Instr Kk Heating treatment device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62163323A (ja) * 1986-01-14 1987-07-20 Matsushita Electric Ind Co Ltd 赤外線加熱装置
JPS62203424U (enExample) * 1986-06-13 1987-12-25
WO1998038673A1 (fr) * 1997-02-27 1998-09-03 Sony Corporation Instrument et procede de mesure de la temperature d'un substrat, procede de chauffage d'un substrat et dispositif de traitement par la chaleur
JP2004311712A (ja) * 2003-04-07 2004-11-04 Hitachi Kokusai Electric Inc 基板処理装置

Also Published As

Publication number Publication date
JPH047820B2 (enExample) 1992-02-13

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