JPH0478136B2 - - Google Patents
Info
- Publication number
- JPH0478136B2 JPH0478136B2 JP9466685A JP9466685A JPH0478136B2 JP H0478136 B2 JPH0478136 B2 JP H0478136B2 JP 9466685 A JP9466685 A JP 9466685A JP 9466685 A JP9466685 A JP 9466685A JP H0478136 B2 JPH0478136 B2 JP H0478136B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- thin film
- observation
- plasma
- light introduction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010409 thin film Substances 0.000 claims description 30
- 229910052751 metal Inorganic materials 0.000 claims description 18
- 239000002184 metal Substances 0.000 claims description 18
- 238000004804 winding Methods 0.000 claims description 6
- 239000000463 material Substances 0.000 description 18
- 239000010408 film Substances 0.000 description 10
- 239000002245 particle Substances 0.000 description 10
- 230000005284 excitation Effects 0.000 description 9
- 238000000034 method Methods 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 7
- 238000005259 measurement Methods 0.000 description 6
- 238000007740 vapor deposition Methods 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 238000004020 luminiscence type Methods 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000007733 ion plating Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 238000010186 staining Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/15—Preventing contamination of the components of the optical system or obstruction of the light path
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Optical Measuring Cells (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9466685A JPS61253444A (ja) | 1985-05-01 | 1985-05-01 | 励起発光強度測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9466685A JPS61253444A (ja) | 1985-05-01 | 1985-05-01 | 励起発光強度測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61253444A JPS61253444A (ja) | 1986-11-11 |
| JPH0478136B2 true JPH0478136B2 (enrdf_load_stackoverflow) | 1992-12-10 |
Family
ID=14116569
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9466685A Granted JPS61253444A (ja) | 1985-05-01 | 1985-05-01 | 励起発光強度測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61253444A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0426351U (enrdf_load_stackoverflow) * | 1990-06-25 | 1992-03-02 |
-
1985
- 1985-05-01 JP JP9466685A patent/JPS61253444A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61253444A (ja) | 1986-11-11 |
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