JPH0478084B2 - - Google Patents
Info
- Publication number
- JPH0478084B2 JPH0478084B2 JP105288A JP105288A JPH0478084B2 JP H0478084 B2 JPH0478084 B2 JP H0478084B2 JP 105288 A JP105288 A JP 105288A JP 105288 A JP105288 A JP 105288A JP H0478084 B2 JPH0478084 B2 JP H0478084B2
- Authority
- JP
- Japan
- Prior art keywords
- piston
- columnar material
- suction pad
- vacuum
- cutting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005520 cutting process Methods 0.000 claims description 50
- 239000000463 material Substances 0.000 claims description 46
- 238000003825 pressing Methods 0.000 claims description 10
- 235000012431 wafers Nutrition 0.000 description 22
- 238000000034 method Methods 0.000 description 9
- 230000002093 peripheral effect Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000004026 adhesive bonding Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
- B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
- B28D5/028—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels with a ring blade having an inside cutting edge
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
- B28D5/0094—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being of the vacuum type
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63001052A JPH01176511A (ja) | 1988-01-06 | 1988-01-06 | 柱状体材料の切断方法及び装置 |
US07/156,748 US4903681A (en) | 1987-02-24 | 1988-02-18 | Method and apparatus for cutting a cylindrical material |
DE88102589T DE3883804T2 (de) | 1987-02-24 | 1988-02-22 | Verfahren und Vorrichtung für das Schneiden eines zylindrischen Materials. |
EP19880102589 EP0280245B1 (en) | 1987-02-24 | 1988-02-22 | Method and apparatus for cutting a cylindrical material |
KR1019880001932A KR930005466B1 (ko) | 1987-02-24 | 1988-02-24 | 원통형재료의 절단방법 및 장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63001052A JPH01176511A (ja) | 1988-01-06 | 1988-01-06 | 柱状体材料の切断方法及び装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01176511A JPH01176511A (ja) | 1989-07-12 |
JPH0478084B2 true JPH0478084B2 (enrdf_load_stackoverflow) | 1992-12-10 |
Family
ID=11490776
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63001052A Granted JPH01176511A (ja) | 1987-02-24 | 1988-01-06 | 柱状体材料の切断方法及び装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01176511A (enrdf_load_stackoverflow) |
-
1988
- 1988-01-06 JP JP63001052A patent/JPH01176511A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPH01176511A (ja) | 1989-07-12 |
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