JPH0477712B2 - - Google Patents

Info

Publication number
JPH0477712B2
JPH0477712B2 JP63135147A JP13514788A JPH0477712B2 JP H0477712 B2 JPH0477712 B2 JP H0477712B2 JP 63135147 A JP63135147 A JP 63135147A JP 13514788 A JP13514788 A JP 13514788A JP H0477712 B2 JPH0477712 B2 JP H0477712B2
Authority
JP
Japan
Prior art keywords
raw material
granular
single crystal
crucible
residual
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP63135147A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01282194A (ja
Inventor
Tsutomu Kajimoto
Daizo Horie
Shinichi Sakurada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KYUSHU DENSHI KINZOKU KK
OOSAKA CHITANIUMU SEIZO KK
Original Assignee
KYUSHU DENSHI KINZOKU KK
OOSAKA CHITANIUMU SEIZO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KYUSHU DENSHI KINZOKU KK, OOSAKA CHITANIUMU SEIZO KK filed Critical KYUSHU DENSHI KINZOKU KK
Priority to JP13514788A priority Critical patent/JPH01282194A/ja
Priority to US07/357,717 priority patent/US5037503A/en
Publication of JPH01282194A publication Critical patent/JPH01282194A/ja
Priority to US07/953,630 priority patent/USRE35242E/en
Publication of JPH0477712B2 publication Critical patent/JPH0477712B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP13514788A 1988-01-19 1988-05-31 単結晶製造方法 Granted JPH01282194A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP13514788A JPH01282194A (ja) 1988-01-19 1988-05-31 単結晶製造方法
US07/357,717 US5037503A (en) 1988-05-31 1989-05-26 Method for growing silicon single crystal
US07/953,630 USRE35242E (en) 1988-05-31 1992-09-30 Method for growing silicon single crystal

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP1040788 1988-01-19
JP63-10407 1988-01-19
JP13514788A JPH01282194A (ja) 1988-01-19 1988-05-31 単結晶製造方法

Publications (2)

Publication Number Publication Date
JPH01282194A JPH01282194A (ja) 1989-11-14
JPH0477712B2 true JPH0477712B2 (en, 2012) 1992-12-09

Family

ID=26345665

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13514788A Granted JPH01282194A (ja) 1988-01-19 1988-05-31 単結晶製造方法

Country Status (1)

Country Link
JP (1) JPH01282194A (en, 2012)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03252386A (ja) * 1990-03-02 1991-11-11 Nkk Corp 単結晶製造装置
JPH0822795B2 (ja) * 1991-11-29 1996-03-06 東芝セラミックス株式会社 シリコン単結晶の製造方法
JP2635456B2 (ja) * 1991-06-28 1997-07-30 信越半導体株式会社 シリコン単結晶の引上方法
JP2506525B2 (ja) * 1992-01-30 1996-06-12 信越半導体株式会社 シリコン単結晶の製造方法
JP5145014B2 (ja) * 2007-03-29 2013-02-13 シャープ株式会社 固体材料処理装置
JP2023020503A (ja) * 2021-07-30 2023-02-09 グローバルウェーハズ・ジャパン株式会社 シリコン単結晶の製造方法及び単結晶引上装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1498266A (en) * 1974-05-13 1978-01-18 Texas Instruments Inc Method of silicon production
JPS57183392A (en) * 1981-05-01 1982-11-11 Tohoku Metal Ind Ltd Apparatus for preparation of single crystal
JPS5945917A (ja) * 1982-09-02 1984-03-15 Denki Kagaku Kogyo Kk 多結晶シリコンの連続的製法
GB8410901D0 (en) * 1984-04-27 1984-06-06 Ici Plc Phenol derivatives
JPS61242984A (ja) * 1985-04-19 1986-10-29 Shinetsu Sekiei Kk シリコン単結晶引上げ用ルツボ

Also Published As

Publication number Publication date
JPH01282194A (ja) 1989-11-14

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