JPH0476202B2 - - Google Patents

Info

Publication number
JPH0476202B2
JPH0476202B2 JP17074683A JP17074683A JPH0476202B2 JP H0476202 B2 JPH0476202 B2 JP H0476202B2 JP 17074683 A JP17074683 A JP 17074683A JP 17074683 A JP17074683 A JP 17074683A JP H0476202 B2 JPH0476202 B2 JP H0476202B2
Authority
JP
Japan
Prior art keywords
composition
thickness
mixed crystal
lattice
compound semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP17074683A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6062109A (ja
Inventor
Kentaro Onabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP17074683A priority Critical patent/JPS6062109A/ja
Publication of JPS6062109A publication Critical patent/JPS6062109A/ja
Publication of JPH0476202B2 publication Critical patent/JPH0476202B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02538—Group 13/15 materials
    • H01L21/02543—Phosphides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02538—Group 13/15 materials
    • H01L21/02546—Arsenides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/02631—Physical deposition at reduced pressure, e.g. MBE, sputtering, evaporation

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Junction Field-Effect Transistors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP17074683A 1983-09-16 1983-09-16 化合物半導体材料 Granted JPS6062109A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17074683A JPS6062109A (ja) 1983-09-16 1983-09-16 化合物半導体材料

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17074683A JPS6062109A (ja) 1983-09-16 1983-09-16 化合物半導体材料

Publications (2)

Publication Number Publication Date
JPS6062109A JPS6062109A (ja) 1985-04-10
JPH0476202B2 true JPH0476202B2 (enrdf_load_stackoverflow) 1992-12-03

Family

ID=15910618

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17074683A Granted JPS6062109A (ja) 1983-09-16 1983-09-16 化合物半導体材料

Country Status (1)

Country Link
JP (1) JPS6062109A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0418796Y2 (enrdf_load_stackoverflow) * 1985-04-25 1992-04-27
JP2013187309A (ja) * 2012-03-07 2013-09-19 Fujitsu Ltd 半導体装置及びその製造方法

Also Published As

Publication number Publication date
JPS6062109A (ja) 1985-04-10

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