JPH0475807A - Guide hole drilling device for lamination - Google Patents

Guide hole drilling device for lamination

Info

Publication number
JPH0475807A
JPH0475807A JP18763290A JP18763290A JPH0475807A JP H0475807 A JPH0475807 A JP H0475807A JP 18763290 A JP18763290 A JP 18763290A JP 18763290 A JP18763290 A JP 18763290A JP H0475807 A JPH0475807 A JP H0475807A
Authority
JP
Japan
Prior art keywords
inner layer
lamination
layer plate
guide hole
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18763290A
Other languages
Japanese (ja)
Inventor
Hisashi Kuwata
桑田 恒
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP18763290A priority Critical patent/JPH0475807A/en
Publication of JPH0475807A publication Critical patent/JPH0475807A/en
Pending legal-status Critical Current

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  • Drilling And Boring (AREA)
  • Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)

Abstract

PURPOSE:To prevent exercising of an adverse influence due to the change in size of an inner layer plate in a circuit forming process and to realize formation of a high density multilayer plate by forming a guide hole for lamination through optical recognition of a pattern after formation of a circuit pattern. CONSTITUTION:A circuit pattern 13 is previously formed on an inner layer plate 3 by an etching method, reference patterns 14 are formed on the four corners of the inner layer plate 3 simultaneously with formation of the circuit pattern 13, and the inner layer plate 3 is set to a guide hole drilling machine for lamination by using holes for machining origins 15. Machining information responding to a kind of the inner layer plate 3 set to a controller is called, and the position co-ordinates of the reference patterns 14 at the four corners of the inner layer plate 3 are measured by means of a CCD camera. In which case, displacement from the coordinate of a preprogrammed planning position 16 of the reference pattern 14 is calculated to determine a machining origin correction amount. Drilling data is delivered from a controller, and a guide hole 17 for lamination is formed through movement of a table in the direction of an X-axis and a direction theta and a spindle in the direction of an Y-axis.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は印刷配線板の製造設備である積層用ガイドホー
ル穴あけ装置に関し、特に6層以上の多層印刷配線板の
内層板積層用ガイドホール穴あけ装置に関する。
[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a guide hole drilling device for lamination, which is a manufacturing equipment for printed wiring boards, and in particular, for drilling guide holes for laminating inner layers of multilayer printed wiring boards of six or more layers. Regarding equipment.

〔従来の技術〕[Conventional technology]

一般に6層以上の高多層印刷配線板の製造においては、
多層化成形時の各内層板の相対位置精度を向上させるた
めに、位置決めビンを植立した積層用治具を用い、この
上にあらかじめ回路パターンを形成した内層板とプリプ
レグとを交互に配置して積層を行うビンラミネーション
工法が使用されている。
Generally, in the production of high multilayer printed wiring boards with six or more layers,
In order to improve the relative positional accuracy of each inner layer plate during multilayer molding, a lamination jig with positioning bins is used, and inner layer plates with a circuit pattern formed in advance and prepreg are placed alternately on this jig. The bin lamination method is used.

第3図(a)、(b)は従来装置に用いるかかる多層印
刷配線板の製造工程を説明するための斜視図である。ま
ず同図(a)に示すように、ラフな位置決め用穴である
加工原点15を用いて内層板3をN/C穴あけ機にセッ
トし、このN/C穴あけ機にてフォトマスク用のレジス
トレーション穴2と積層用ガイドホール17とを形成す
る。
FIGS. 3(a) and 3(b) are perspective views for explaining the manufacturing process of such a multilayer printed wiring board used in a conventional device. First, as shown in Figure (a), the inner layer plate 3 is set in an N/C drilling machine using the processing origin 15, which is a rough positioning hole. ration holes 2 and lamination guide holes 17 are formed.

次に同図(b)に示すように、フォトマスク用のレジス
トレーション穴2を基準としてフォトマスクを整合させ
た後、フォトエツチング法により回路パターン13を形
成する0次に位置決めビンを植立1〜た積層用治具−L
に、内層板3とプリブY・グどを交互配置tして組み立
て、熱圧着(−で多層板を得°Cいる。
Next, as shown in FIG. 6(b), after aligning the photomask with reference to the registration hole 2 for the photomask, a zero-order positioning bin for forming the circuit pattern 13 is planted 1 by the photoetching method. Lamination jig-L
Then, assemble the inner layer board 3 and the prive Y/goods by alternately arranging them, and obtain a multilayer board by thermo-compression (-).

〔発明が解決しようどする課題〕[Problems that the invention attempts to solve]

−F述した従来の多層印刷配線板は、内層板に回路パタ
ーンを形成する過程においで、表面研摩処理や工・ソヂ
ングによる材料変形のM′5に4:l:より内層板に寸
法変化が発生ずる。
-F In the conventional multilayer printed wiring board mentioned above, in the process of forming a circuit pattern on the inner layer board, there is a dimensional change in the inner layer board due to material deformation M'5 due to surface polishing treatment, machining, and soaking due to 4:l:. Occurs.

このソ;コめ積層用ガイドボールの回路パターンニ対す
る位置精度が悪化しで、積層用油■上での組み立て時に
位置決めじンに内層板が入らなくな−)なり、あるいは
これを避けるために積層用ガイドホール径を大きくする
ど、多層化形成後の内層板相互の相対位置M度が悪化す
るという欠点を有していた。
This may deteriorate the positional accuracy of the guide ball for lamination with respect to the circuit pattern, resulting in the inner layer board not being able to fit into the positioning groove during assembly on lamination oil, or to avoid this. As the diameter of the guide hole for lamination is increased, the relative position M of the inner layer plates after multilayer formation deteriorates, which is a drawback.

そこて゛、回路パターンを形成した後、N 、/ C穴
あけ機を用いて積層用ガイドボールをあける方法が試み
られているが、N /C穴あけ機は穴位置がθ方向(回
転方向)にずれた場合の補正ができないという問題があ
り、積層用ガイドホ・−ルの位置精度は得らhていなか
っl、:6 本発明の目的は、かかる内層板が確実に位置決めビンに
入り、且つ内層板相互の相対位置精度を向上させる多層
印刷配線板の積層用ガイドホール穴あけ装置を提供する
、−とにある。
Therefore, attempts have been made to form a circuit pattern and then use an N/C hole puncher to drill guide balls for lamination, but with the N/C hole puncher, the hole position shifts in the θ direction (rotational direction). There is a problem that the positioning accuracy of the guide hole for lamination cannot be obtained due to the problem that the positioning accuracy of the guide hole for lamination cannot be obtained. The present invention provides a guide hole drilling device for laminating multilayer printed wiring boards that improves the relative positional accuracy of a multilayer printed wiring board.

〔課題を解決するfニーOめの手段〕[An easy way to solve problems]

本発明の積層用ガイドホール穴あけ装置は、光学認識に
より印刷配線板の内層材基準パターンの各座標を測定す
るカメラと、前記カメラと定めらh−か寸法ピッチで配
設されたドリル機構と、前記ドリル機構の下方に配設!
−7たX、¥、θ可動可動チールプルカメラにより測定
を行っtニブルりを演算処理し、X、Y、θの加工デー
タを作成するコン1−ローラーとより構成される積層用
ガイドホール穴あけ装置である。
The lamination guide hole drilling device of the present invention includes: a camera that measures each coordinate of an inner layer material reference pattern of a printed wiring board by optical recognition; a drill mechanism arranged with the camera at a predetermined dimensional pitch; Arranged below the drill mechanism!
- 7 X, ¥, θ movable A movable chile-pull camera measures the t nibbles and creates machining data for It is a device.

〔実施例〕〔Example〕

次に本発明について図面を参照して説明する。 Next, the present invention will be explained with reference to the drawings.

第1図は本発明の一実施例の斜視図である。図において
5,1は積層用ガイドホール穴あけ機の本体て′あり、
6は穴あけする内層板3を固定し、月−つガイド4及び
ボールねし5によりX軸方向に可動するど共に、図示し
ていない機構いよりθ方向にも回転するテーブルである
FIG. 1 is a perspective view of an embodiment of the present invention. In the figure, 5 and 1 are the main body of the guide hole drilling machine for lamination.
Reference numeral 6 designates a table on which the inner layer plate 3 to be drilled is fixed, and which is movable in the X-axis direction by a moon guide 4 and a ball screw 5, and also rotates in the θ direction by a mechanism (not shown).

またスピンドル7は、サドル8にCCDカメラ9ど決め
られたピッチ寸法で配設されている。サドル8はガイド
4及びボールねIZ 5及びザーボモータ10によりY
軸方向に”T動する。さらに、図示していないがテーブ
ル6をθ方向に回転させるザーボモータが設けられてい
る。
Further, the spindle 7 is arranged on the saddle 8 with a CCD camera 9 at a predetermined pitch. The saddle 8 is mounted by the guide 4, the ball IZ 5, and the servo motor 10.
It moves "T" in the axial direction.Furthermore, although not shown, a servo motor for rotating the table 6 in the θ direction is provided.

スピンドル7の先端には、積層用ガイドボールを加工す
るドリル】−1が装着され、ザーボモー=夕10により
Y軸方向に可動する。12はCCDカメラ9により測定
倉行ったデータを演算処理し。
A drill 1 for machining guide balls for lamination is attached to the tip of the spindle 7, and is movable in the Y-axis direction by a servo motor 10. 12 performs arithmetic processing on the data measured by the CCD camera 9.

X、Y、θの加工データを作成する4−とによってザー
ボモーダ10等に穴あζlの指令を行うコントローラー
である。
This is a controller that issues a command to the servo moder 10, etc. to determine the hole size ζl by creating machining data for X, Y, and θ.

次に、本実施@装置の動作を説明する。第2図(a>、
(b)は本実施例に使用する多層印刷配線板の製造工程
を示す斜視図である。
Next, the operation of the present implementation@device will be explained. Figure 2 (a>,
(b) is a perspective view showing the manufacturing process of the multilayer printed wiring board used in this example.

まず、第2図(a)に示すように、内層板3にあらかし
めフあトエッチング法G、二より回路パターン13を形
成する6、二のとき、基準バタ〜ン】4を内層板3の四
隅に回路パターン13ど同時に形成するが、こh−はフ
ォー1へマスク上に基準パターン1−4に対応したパタ
ーンを付加して作画しておくことによりなされる。
First, as shown in FIG. 2(a), the circuit pattern 13 is formed by using the face etching method G to form the circuit pattern 13 on the inner layer plate 3. The circuit patterns 13 are formed at the same time at the four corners of the four corners, and this is done by adding a pattern corresponding to the reference patterns 1-4 on the mask of the four 1.

この状態の内層板3を、加工原点15の穴を用いて第1
図のWl、駅用ガイドホール穴あけ機にビン止めしてセ
ラ1−する6次に、コントローラー12に七ツ1へしt
:内層板3の種類に対応L f::加工情報の呼び出し
、を行い、スターhさぜる。すると、まずCCDカメラ
9が内層板3の四隅の基準パターン】4の位W座標(X
i、Yi)(i=1z4>の測定を行う。
The inner layer plate 3 in this state is inserted into the first
Wl in the figure, fix the bottle to the station guide hole drilling machine and attach it to the cellar 1-6. Next, put it on the controller 12
: Corresponds to the type of inner layer plate 3 L f : : Call up the processing information and stir the star h. Then, the CCD camera 9 first detects the reference pattern of the four corners of the inner layer plate 3 at the W coordinate (X
i, Yi) (i=1z4>).

ここでは、基準パターン14のあらがしめプログラムさ
れている設計位ff16(m層相ガイドホー H−17
があけられる位置)の座標からの変位(ΔXi、ΔYi
)(i=1〜4)を計算し1、加工原点補正量(Ax、
Ay)を求める。
Here, the roughness of the reference pattern 14 is determined and the programmed design position ff16 (m layer phase guide hole H-17
displacement from the coordinates (ΔXi, ΔYi
) (i = 1 to 4) and calculate 1, the machining origin correction amount (Ax,
Find Ay).

この場合の加工原点補正量の計算方法と12.ては、平
均値による方法、最小自乗平均値による方法、最大〜最
小値による方法があるが、ここでは計算の容易な最大〜
最小値による方法を採用している。
12. Calculation method of machining origin correction amount in this case; There are methods using the average value, methods using the least square mean value, and methods using the maximum to minimum value, but here we will use the maximum to minimum value, which is easy to calculate.
The minimum value method is adopted.

すなわち、この場合の加工原点補正量< A x 。That is, in this case, the processing origin correction amount <Ax.

Ay)は Ax= て板厚0.1mm、銅箔厚み35μm(両面)のものを
用い、大きさ500m■X500mmの8層板を製作し
た結果、−層面に対する各内層位置ずれ量は第1表のと
おりである。又、ここでは従来装置と本実施例との結果
を対比して示す。
Ay) is Ax= As a result of manufacturing an 8-layer board with a size of 500 m × 500 mm using a board with a thickness of 0.1 mm and a copper foil thickness of 35 μm (both sides), the amount of misalignment of each inner layer with respect to the - layer surface is shown in Table 1. It is as follows. Also, the results of the conventional device and this example will be compared and shown here.

第1表     単位=μ1 次に前記補正量(Ax、Ay)を加味した穴あけデータ
がコントローラー12から送り出され、X軸方向及びθ
方向はテーブル6が、Y軸方向はスピンドル7が移動し
、スピンドル7が上下することにより、第2図(b)に
示すように積層用ガイドホール17の穴あけを行う。
Table 1 Unit = μ1 Next, the drilling data that takes into account the correction amounts (Ax, Ay) is sent from the controller 12, and
The table 6 is moved in the Y-axis direction, and the spindle 7 is moved in the Y-axis direction, and by moving the spindle 7 up and down, a guide hole 17 for lamination is bored as shown in FIG. 2(b).

なお、本実施例において、内層板3の材料とし第1表に
おける位置ずれ量は、1層面のある位置を仮定し、その
位置に対する各内層板の位置ずれ量を統計処理し、ずれ
量のばらつき(3σ)により従来方法との対比を行って
いる。
In this example, the material of the inner layer plate 3 and the amount of positional deviation in Table 1 are calculated by assuming a certain position on the first layer surface, statistically processing the amount of positional deviation of each inner layer plate with respect to that position, and calculating the variation in the amount of deviation. (3σ) for comparison with the conventional method.

位置ずれ量は材料方向(X方向)と材料の直交方向(X
方向)とに分解した値と、X、Yを合成したベクトル方
向の絶対値を表わしている。
The amount of positional deviation is determined by the material direction (X direction) and the orthogonal direction of the material (X direction).
represents the absolute value of the vector direction obtained by combining X and Y.

例えば、3層面の従来のベクトル方向のばらつきが3σ
=300μ■であるのに対し、本実施例によれば3σ=
240μ脂となり、60μ■の精度向上がなされたこと
になる。
For example, the conventional vector direction variation of the three-layer surface is 3σ
= 300 μ■, whereas according to this embodiment, 3σ =
The amount of fat was 240μ, which means that the accuracy has been improved by 60μ.

〔発明の効果〕〔Effect of the invention〕

以上説明したように本発明の積層用ガイドホール穴あけ
装置は、積層用ガイドホールの形成を回路パターンの形
成後にパターンを光学認識して行うことにより、回路形
成工程での内層板の寸法変化による悪影響を解消し、高
密度の多層板の形成が実現できるという効果がある。
As explained above, the guide hole drilling device for lamination of the present invention forms the guide holes for lamination by optically recognizing the pattern after forming the circuit pattern, thereby eliminating the negative effects caused by dimensional changes of the inner layer board during the circuit forming process. This has the effect of eliminating the problem and realizing the formation of a high-density multilayer board.

は従来装置に用いる多層印刷配線板を製造工程順に示し
た斜視図である。
1A and 1B are perspective views showing a multilayer printed wiring board used in a conventional device in the order of manufacturing steps.

1・・・本体、2・−・レジストレーション穴、3・・
・内層板、4・・・ガイド、5・・・ボールねじ、6・
・・テーブル、7・・・スピンドル、8・−・サドル、
9・・・CCDカメラ、10・・・サーボモータ、11
・・・ドリル、12・・・コントローラー 13・・・
回路パターン、14・・・基準パターン、15・−・加
工原点、16・・・設計位置、17・・・積層用ガイド
ホール。
1...Main body, 2...Registration hole, 3...
・Inner layer plate, 4... Guide, 5... Ball screw, 6.
...Table, 7...Spindle, 8...Saddle,
9... CCD camera, 10... Servo motor, 11
...Drill, 12...Controller 13...
Circuit pattern, 14... Reference pattern, 15... Processing origin, 16... Design position, 17... Guide hole for lamination.

Claims (1)

【特許請求の範囲】[Claims]  光学認識により印刷配線板の内層材基準パターンの各
座標を測定するカメラと、前記カメラと定められた寸法
ピッチで配設されたドリル機構と、前記ドリル機構の下
方に配設したX,Y,θ可動テーブルと、カメラにより
測定を行ったデータを演算処理し、X,Y,θの加工デ
ータを作成するコントローラーとを有することを特徴と
する積層用ガイドホール穴あけ装置。
A camera that measures each coordinate of the inner layer material reference pattern of the printed wiring board by optical recognition, a drill mechanism arranged at a dimensional pitch determined by the camera, and X, Y, A guide hole drilling device for lamination, comprising a θ movable table and a controller that processes data measured by a camera and creates X, Y, and θ machining data.
JP18763290A 1990-07-16 1990-07-16 Guide hole drilling device for lamination Pending JPH0475807A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18763290A JPH0475807A (en) 1990-07-16 1990-07-16 Guide hole drilling device for lamination

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18763290A JPH0475807A (en) 1990-07-16 1990-07-16 Guide hole drilling device for lamination

Publications (1)

Publication Number Publication Date
JPH0475807A true JPH0475807A (en) 1992-03-10

Family

ID=16209512

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18763290A Pending JPH0475807A (en) 1990-07-16 1990-07-16 Guide hole drilling device for lamination

Country Status (1)

Country Link
JP (1) JPH0475807A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5529441A (en) * 1994-02-28 1996-06-25 Cybernetics Products, Inc. Drill coordinate optimization for multi-layer printed circuit board

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5529441A (en) * 1994-02-28 1996-06-25 Cybernetics Products, Inc. Drill coordinate optimization for multi-layer printed circuit board

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