Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric CorpfiledCriticalMitsubishi Electric Corp
Priority to JP58086811ApriorityCriticalpatent/JPS59211950A/ja
Publication of JPS59211950ApublicationCriticalpatent/JPS59211950A/ja
Publication of JPH047536B2publicationCriticalpatent/JPH047536B2/ja
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/02—Details
H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
H01J37/241—High voltage power supply or regulation circuits