JPS59211950A - 電子ビ−ム加工装置 - Google Patents

電子ビ−ム加工装置

Info

Publication number
JPS59211950A
JPS59211950A JP58086811A JP8681183A JPS59211950A JP S59211950 A JPS59211950 A JP S59211950A JP 58086811 A JP58086811 A JP 58086811A JP 8681183 A JP8681183 A JP 8681183A JP S59211950 A JPS59211950 A JP S59211950A
Authority
JP
Japan
Prior art keywords
electron beam
output
grid
power supply
cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58086811A
Other languages
English (en)
Japanese (ja)
Other versions
JPH047536B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Fumiharu Yabunaka
文春 薮中
Eishin Murakami
村上　英信
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP58086811A priority Critical patent/JPS59211950A/ja
Publication of JPS59211950A publication Critical patent/JPS59211950A/ja
Publication of JPH047536B2 publication Critical patent/JPH047536B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/241—High voltage power supply or regulation circuits

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP58086811A 1983-05-16 1983-05-16 電子ビ−ム加工装置 Granted JPS59211950A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58086811A JPS59211950A (ja) 1983-05-16 1983-05-16 電子ビ−ム加工装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58086811A JPS59211950A (ja) 1983-05-16 1983-05-16 電子ビ−ム加工装置

Publications (2)

Publication Number Publication Date
JPS59211950A true JPS59211950A (ja) 1984-11-30
JPH047536B2 JPH047536B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-02-12

Family

ID=13897191

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58086811A Granted JPS59211950A (ja) 1983-05-16 1983-05-16 電子ビ−ム加工装置

Country Status (1)

Country Link
JP (1) JPS59211950A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01260750A (ja) * 1988-04-08 1989-10-18 Jeol Ltd 直流高電圧発生装置
JP2020504686A (ja) * 2016-12-21 2020-02-13 ア−カム アーベー 三次元物品の形成方法、積層造形装置およびコンピュータプログラム製品

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5279756A (en) * 1975-12-26 1977-07-05 Hitachi Ltd Field emission device
JPS5737403U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1980-08-13 1982-02-27

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5279756A (en) * 1975-12-26 1977-07-05 Hitachi Ltd Field emission device
JPS5737403U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1980-08-13 1982-02-27

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01260750A (ja) * 1988-04-08 1989-10-18 Jeol Ltd 直流高電圧発生装置
JP2020504686A (ja) * 2016-12-21 2020-02-13 ア−カム アーベー 三次元物品の形成方法、積層造形装置およびコンピュータプログラム製品
US10987752B2 (en) 2016-12-21 2021-04-27 Arcam Ab Additive manufacturing of three-dimensional articles

Also Published As

Publication number Publication date
JPH047536B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-02-12

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