JPH0474915A - Observing apparatus for depression - Google Patents

Observing apparatus for depression

Info

Publication number
JPH0474915A
JPH0474915A JP2188633A JP18863390A JPH0474915A JP H0474915 A JPH0474915 A JP H0474915A JP 2188633 A JP2188633 A JP 2188633A JP 18863390 A JP18863390 A JP 18863390A JP H0474915 A JPH0474915 A JP H0474915A
Authority
JP
Japan
Prior art keywords
illumination
component
observation
illuminating
depression
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2188633A
Other languages
Japanese (ja)
Other versions
JP2893612B2 (en
Inventor
Seiji Furukawa
古川 征次
Takakazu Fujii
藤井 孝和
Kiyoshi Miyamoto
宮本 潔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Corp
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Corp, Omron Tateisi Electronics Co filed Critical Omron Corp
Priority to JP2188633A priority Critical patent/JP2893612B2/en
Publication of JPH0474915A publication Critical patent/JPH0474915A/en
Application granted granted Critical
Publication of JP2893612B2 publication Critical patent/JP2893612B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Length Measuring Devices By Optical Means (AREA)
  • Supply And Installment Of Electrical Components (AREA)

Abstract

PURPOSE:To easily and positively detect the presence of a depression by applying an illuminating light of a second illuminating device to the surface of an object to be observed from above in the slantwise direction while a first illuminating device is turned ON. CONSTITUTION:A first illuminating device 22 is placed right above the observing position to illuminate the whole of a component 1 in a vertical direction. A second illuminating device 23 is provided slantwise above the observing position, with casting an illuminating light slantwise in the downward direction towards the surface of the component 1. The illuminating intensity or the distance from the observing position of each illuminating device 22, 23 are set so that the brightness on the surface of the component 1 by the illuminating light of the second illuminating device 23 is 2-several times higher than that of the surface of the component 1 by the illuminating light of the first illuminating device 22. An image sensing device 24 is positioned immediately above the observing position, the visual field of which is set in a vertical direction to the component 1.

Description

【発明の詳細な説明】 〈産業上の利用分野〉 この発明は、観測対象の表面に存在するマークや傷など
の窪みを観測するための窪み観測装置に関する。
DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a depression observation device for observing depressions such as marks and scratches existing on the surface of an object to be observed.

〈従来の技術〉 例えば表面実装タイプのIC部品は、第6図に示すよう
な形態であって、合成樹脂製のパッケージ部2の両側面
より複数のり−ド3が突出している。各リード3には固
有のピン番号が割り当てられ、このうち第1番目のリー
ド(以下、「第1リード」という)3aを識別できるよ
うにパッケージ部2の上面に所定のマーク4が付しであ
る。
<Prior Art> For example, a surface mount type IC component has a form as shown in FIG. 6, in which a plurality of boards 3 protrude from both sides of a package part 2 made of synthetic resin. Each lead 3 is assigned a unique pin number, and a predetermined mark 4 is attached to the top surface of the package part 2 so that the first lead (hereinafter referred to as "first lead") 3a can be identified. be.

このマーク4は、平面形状が円形の窪みであって、この
窪みの底面は、第7図(1)に示す如く、光を正反射さ
せる平坦な鏡面か、或いは第7図(2)に示す如く、光
を正反射させる円曲する鏡面となっている。パッケージ
部2を樹脂成形するための金型は、その型内面に前記マ
ーク4を刻設するための突部が設けてあり、この突部の
表面を研磨することによりマーク4の表面(富みの底面
)を滑らかな鏡面に形成する。なお図中、5は部品番号
などが印字された印字部である。
This mark 4 is a depression with a circular planar shape, and the bottom surface of this depression is either a flat mirror surface that specularly reflects light, as shown in FIG. 7 (1), or a flat mirror surface that specularly reflects light, as shown in FIG. 7 (2). It is a circular mirror surface that specularly reflects light. The mold for resin molding the package part 2 is provided with a protrusion for carving the mark 4 on the inner surface of the mold, and by polishing the surface of the protrusion, the surface of the mark 4 (the richness) is removed. The bottom surface) is formed into a smooth mirror surface. In the figure, numeral 5 is a printing section on which part numbers and the like are printed.

上記構成を備えた複数の部品1を、帯状テープ6上に向
きを揃えて一定間隔毎に固定したものを、基板の組立て
ラインなどへ供給する。この帯状テープ6は、第6図お
よび第8図に示す如く、上シート7と下シート8とを重
ね合わせた構成のものであり、上シート7には部品1の
各固定位置に貫通孔9を設け、下シート8には)上面に
接着剤塗布面10を形成して、各貫通孔9に接着剤塗布
面10を露出させ、その塗布面10の接着力にて部品1
の下面を固定している。
A plurality of components 1 having the above configuration are fixed on a strip tape 6 in the same direction at regular intervals and are supplied to a board assembly line or the like. As shown in FIGS. 6 and 8, this belt-shaped tape 6 has a structure in which an upper sheet 7 and a lower sheet 8 are overlapped, and the upper sheet 7 has through holes 9 at each fixing position of the component 1. An adhesive coating surface 10 is formed on the upper surface of the lower sheet 8, and the adhesive coating surface 10 is exposed in each through hole 9, and the adhesive force of the coating surface 10 is used to attach the component 1.
The bottom surface of the is fixed.

〈発明が解決しようとする問題点〉 しかしながら各部品1を帯状テープ6上に装着する際、
誤った向きに部品1が装着されると、帯状テープ6から
部品1を取り出して基板上に自動実装する場合、適正な
実装が行われず、回路の動作不良を招(などの戊がある
<Problems to be solved by the invention> However, when mounting each component 1 on the strip tape 6,
If the component 1 is mounted in the wrong direction, when the component 1 is taken out from the strip tape 6 and automatically mounted on a board, proper mounting will not be carried out, leading to malfunction of the circuit.

そこで帯状テープ6から部品1を取り出す前に、部品1
の向きが適正か否かを検査することが必要となる。この
種の検査を自動化するのに、従来は、マーク4の表面が
鏡面であることに着目し、部品10表面へ光を照射し、
マーク4がらの正反射光を検出することによりマーク4
の位置、すなわち部品1の向きを判別することが試みら
れている。
Therefore, before taking out part 1 from strip tape 6,
It is necessary to check whether the orientation is appropriate. Conventionally, to automate this type of inspection, focusing on the fact that the surface of the mark 4 is a mirror surface, irradiating light onto the surface of the part 10,
The mark 4 is detected by detecting the specularly reflected light from the mark 4.
Attempts have been made to determine the position of the component 1, that is, the orientation of the component 1.

ところが前記金型の研磨状態にむらがあると、マーク4
の鏡面状態がばらつくため、正反射光の光量は常に一定
にならない。また帯状テープ6上に各部品1を常に同じ
水平状態で支持できないため、正反射光の向きが一定せ
ず、それを確実に検出するのが容易でない。このため部
品1の向きを自動的に検査する装置を実用化するのが困
難であるとされていた。
However, if the polishing condition of the mold is uneven, the mark 4
The amount of specularly reflected light is not always constant because the mirror state of the mirror varies. Furthermore, since each component 1 cannot always be supported in the same horizontal state on the strip tape 6, the direction of specularly reflected light is not constant, and it is not easy to detect it reliably. For this reason, it has been considered difficult to put into practical use a device that automatically inspects the orientation of the component 1.

この発明は、上記問題に着目してなされたもので、観測
対象の表面に存在するマークや傷などの窪みを確実に観
測し得る窪み観測装置を提供することを目的とする。
The present invention has been made in view of the above problem, and an object of the present invention is to provide a depression observation device that can reliably observe depressions such as marks and scratches existing on the surface of an object to be observed.

〈問題点を解決するための手段〉 この発明は、観測対象の表面に存在する窪みを所定の観
測位置で観測するための窪み観測装置であって、観測位
置のほぼ真上に位置して観測対象の全体を垂直方向より
照明するための第1の照明装置と、観測位置の斜め上方
に位置して観測対象の表面に向けて斜め下方へ照明光を
投射する第2の照明装置と、観測位置の真上に位置して
観測対象に向けて垂直方向への視野が設定される撮像装
置とで構成されている。そして第1.第2の各照明装置
は、第2の照明装置の照明光による観測対象の表面の明
るさが、第1の照明装置の照明光による観測対象の表面
の明るさより十分に大きくなるよう、照明強度または観
測位置からの距離が設定される。
<Means for Solving the Problems> The present invention is a depression observation device for observing depressions existing on the surface of an object to be observed at a predetermined observation position. a first illumination device for illuminating the entire object from a vertical direction; a second illumination device located diagonally above the observation position and projecting illumination light diagonally downward toward the surface of the observation object; It consists of an imaging device that is positioned directly above the observation target and has a vertical field of view toward the observation target. And the first. Each of the second lighting devices has an illumination intensity such that the brightness of the surface of the observation target caused by the illumination light of the second lighting device is sufficiently greater than the brightness of the surface of the observation target caused by the illumination light of the first lighting device. Or the distance from the observation position is set.

〈作用〉 第1の照明装置の照明下で第2の照明装置の照明光が観
測対象の表面に対し斜め上方より照射されると、窪みの
位置では常に窪みの段差に起因して第2の照明装置の照
明光が当たらない暗部が生ずることになる。この暗部を
画像上で検出することにより窪みの存在位置を判別でき
る。
<Operation> When the illumination light of the second illumination device is irradiated diagonally from above onto the surface of the observation target under the illumination of the first illumination device, the second illumination device always appears at the position of the depression due to the step of the depression. This results in a dark area that is not illuminated by the illumination light from the lighting device. By detecting this dark area on the image, the location of the depression can be determined.

〈実施例〉 第1図および第2図は、この発明が実施された部品検査
装置の外観を示している。
<Example> FIG. 1 and FIG. 2 show the appearance of a component inspection device in which the present invention is implemented.

この部品検査装置は、第6図に示す形態の部品1を検査
対象としており、帯状テープ6上の各部品1の向きが適
正か否が、各部品1が欠落していないか否か、各部品l
が所定の固定位置から位置ずれしていないか否か、各部
品1の印字が良好か否か、各部品1の各リード3が変形
していないか否かなどを同時に検査する。
This component inspection device inspects components 1 in the form shown in FIG. parts l
At the same time, it is inspected whether or not the parts 1 are deviated from their predetermined fixed positions, whether the printing on each part 1 is good, and whether each lead 3 of each part 1 is not deformed.

検査対象の各部品1は、帯状テープ6上に一定間隔毎に
前記した接着剤塗布面10にて固定されている。この帯
状テープ6は両端縁に送り動作用の孔11が所定ピッチ
で設けてあり、この孔11に図示しない送り機構を連繋
して帯状テープ6を順送りして、各部品1を所定の観測
位置(検査位置)へ順次導くものである。
Each component 1 to be inspected is fixed on the strip-shaped tape 6 at regular intervals with the adhesive-applied surface 10 described above. This strip tape 6 has holes 11 for feeding operation provided at a predetermined pitch on both edges, and a feed mechanism (not shown) is connected to the holes 11 to sequentially feed the strip tape 6 to place each component 1 at a predetermined observation position. (inspection position).

部品検査装置は、光源21.第1の照明装置22、第2
の照明装置23.撮像装置242画像処理装置25など
を構成として含んでいる。
The component inspection device includes a light source 21. The first lighting device 22, the second
lighting device 23. The configuration includes an imaging device 242, an image processing device 25, and the like.

前記光源21にはハロゲンランプなどが用いられ、この
光源21と第1.第2の各照明装置22.23とを光フ
ァイバ26.27を介して光学的に結合する。
A halogen lamp or the like is used as the light source 21, and the light source 21 and the first . Each second illumination device 22.23 is optically coupled via an optical fiber 26.27.

第1の照明装置22は、観測位置のほぼ真上に位置し、
部品1の全体を垂直方向より照明する。この実施例では
、第1の照明袋W22として、前記光ファイバ26と光
学的に結合された複数本の光ファイバを円陣に配置して
成るリング光源が用いられる。このリング光源より成る
第1の照明装置22は撮像装置24を中心、としてその
外周に位置させ、部品1に対し均一な照明を施すもので
ある。
The first illumination device 22 is located almost directly above the observation position,
The entire part 1 is illuminated from the vertical direction. In this embodiment, a ring light source formed by arranging a plurality of optical fibers optically coupled to the optical fiber 26 in a circle is used as the first illumination bag W22. The first illumination device 22 consisting of this ring light source is positioned around the imaging device 24 at its center and provides uniform illumination to the component 1.

第2の照明装置23は、観測位置の斜め上方に位置し、
部品1の表面に向けて斜め下方へ照明光を投射する。こ
の実施例では、第2の照明装置23として、前記光ファ
イバ27と光学的に結合された1本の光ファイバ或いは
束ねられた複数本の光ファイバより成るスポット光源が
用いられている。このスポット光源より成る第2の照明
装置23は観測位置の側方に位置させ、部品1に向けて
所定の角度θでスポット照明を施すものである。
The second illumination device 23 is located diagonally above the observation position,
Illumination light is projected diagonally downward toward the surface of the component 1. In this embodiment, as the second illumination device 23, a spot light source consisting of one optical fiber optically coupled to the optical fiber 27 or a plurality of bundled optical fibers is used. The second illumination device 23 consisting of this spot light source is positioned to the side of the observation position and provides spot illumination toward the component 1 at a predetermined angle θ.

第1.第2の各照明装置22.23は、第2の照明装置
23の照明光による部品1表面の明るさ(照度)が、第
1の照明装置22の照明光による部品1表面の明るさ(
照度)より2〜数倍程度高くなるよう、それぞれの照明
強度または観測位置からの距離が設定される。
1st. Each of the second lighting devices 22 and 23 is configured such that the brightness (illuminance) of the surface of the component 1 caused by the illumination light of the second lighting device 23 is higher than the brightness (illuminance) of the surface of the component 1 caused by the illumination light of the first lighting device 22 (
Each illumination intensity or distance from the observation position is set so that it is two to several times higher than the illumination intensity (illuminance).

前記部品1は、合成樹脂製のパッケージ部2の外周に複
数本のリード3を突出させた構造のもので、パッケージ
部2の上面には第1リードを確認するための窪み形状の
マーク4と、必要な部品情報が白色で表された印字部5
とが設けられている。またパッケージ部2の外周縁には
斜めの傾斜面で構成される縁取り部12が設けられる。
The component 1 has a structure in which a plurality of leads 3 protrude from the outer periphery of a package part 2 made of synthetic resin, and a recess-shaped mark 4 is provided on the top surface of the package part 2 to confirm the first lead. , a printed part 5 in which necessary parts information is displayed in white.
and is provided. Further, an edge portion 12 formed of an oblique inclined surface is provided on the outer peripheral edge of the package portion 2.

このパッケージ部2の表面では投射された照明光は乱反
射するが、マーク4については金属であるリード部3と
同様に照明光は正反射する。
The projected illumination light is diffusely reflected on the surface of the package portion 2, but the illumination light is specularly reflected on the mark 4, similarly to the lead portion 3 which is made of metal.

撮像装置24は、観測位置の真上に位置し、部品1に向
けて垂直方向に視野が設定される。
The imaging device 24 is located directly above the observation position, and its field of view is set in the vertical direction toward the component 1.

撮像装置24で得た画像の映像信号は画像処理装置25
に送られ、2値化処理後、その2値画像に対し後記する
ウィンドウWI−W、、を設定するなどして複数の項目
の部品検査が実施される。なお図中、28は2値画像な
どを表示するためのモニタテレビである。
The video signal of the image obtained by the imaging device 24 is sent to the image processing device 25.
After the binarization process, a component inspection of a plurality of items is performed by setting a window WI-W, which will be described later, on the binary image. In the figure, 28 is a monitor television for displaying binary images and the like.

上記構成の部品検査装置において、いま第1゜第2の各
照明装置22.23により検査対象の部品1に照明光が
同時に投射されたとき、第3図に示すように、第1の照
明装置22の照明光Aはパッケージ部2の表面では乱反
射し、リード部3の表面では正反射する。また第2の照
明装置23の照明光Bがマーク4の位置に達するとき、
窪みの段差に起因して照明光Bが当たらない暗部13が
生ずることになる。
In the component inspection apparatus having the above configuration, when illumination light is simultaneously projected onto the component 1 to be inspected by the first and second illumination devices 22 and 23, as shown in FIG. The illumination light A 22 is diffusely reflected on the surface of the package part 2 and specularly reflected on the surface of the lead part 3. Further, when the illumination light B of the second illumination device 23 reaches the position of the mark 4,
Due to the step difference in the recess, a dark area 13 is created where the illumination light B is not applied.

第4図は、このような照明下で撮像装置24で得られた
濃淡画像の明るさの分布を、部品1の各部と対応させて
示しである。同図によれば、リード部3が最も明るく、
ついで印字部5が明るく、ついでパッケージ部2の上面
とマーク4の暗部13以外の領域が明るい。マーク4の
暗部13とパッケージ部2の縁取り部12とは最も暗い
画像となる。
FIG. 4 shows the brightness distribution of a grayscale image obtained by the imaging device 24 under such illumination, in correspondence with each part of the component 1. According to the figure, the lead part 3 is the brightest;
Next, the printed part 5 is bright, and then the upper surface of the package part 2 and the area other than the dark part 13 of the mark 4 are bright. The dark portion 13 of the mark 4 and the border portion 12 of the package portion 2 are the darkest images.

この濃淡画像に対しレベルの異なる複数の2値化しきい
値TH,−TH4が設定されるもので、第5図(1)〜
(4)が各2値化しきい値TI(+〜Tl14で2値化
したときの適正部品についての2値画像を示している。
A plurality of binarization thresholds TH, -TH4 with different levels are set for this grayscale image, and FIG. 5 (1) to
(4) shows a binary image of a proper part when binarized at each binarization threshold TI (+ to Tl14).

第5図中、斜線が黒画素の画像領域を、その他が白画素
の画像領域を、それぞれ示している。
In FIG. 5, diagonal lines indicate image areas with black pixels, and other lines indicate image areas with white pixels.

第5図(1)中、13′はマーク4の暗部13に、12
′はパッケージ部2の縁取り部12に相当し、これら画
像領域13”、12”のみが黒画素となる。
In Fig. 5 (1), 13' is in the dark part 13 of mark 4, 12
' corresponds to the border 12 of the package part 2, and only these image areas 13'' and 12'' are black pixels.

第5図(2)中、2′はパッケージ部2.5′は印字部
5に相当し、パッケージ部の画像領域2′が黒画素、印
字部の画像領域5′が白画素となる。
In FIG. 5(2), 2' corresponds to the package part 2, and 5' corresponds to the printing part 5, where the image area 2' of the package part is a black pixel and the image area 5' of the printing part is a white pixel.

第5図(3)中、2′はパッケージ部2であり、画像領
域2′のすべてが黒画素となる。
In FIG. 5(3), 2' is the package part 2, and all of the image area 2' are black pixels.

第5図(4)中、3′がリード部3であり、この画像領
域3′のみが白画素、他の画像領域1′が黒画素となる
In FIG. 5(4), 3' is the lead portion 3, and only this image area 3' is a white pixel, and the other image area 1' is a black pixel.

まず第5図(1)に示す2値画像に対し、暗部の画像領
域13′を含む大きさのウィンドウW1を設定してその
ウィンドウWI内の黒画素数を計数し、その計数値が所
定のしきい値(ゼロに近い値)より大きいか否かにより
マーク4の有無、すなわち部品lの向きが適正か否かを
判別する。ついで同じ2値画像に対し、縁取り部の画像
領域12”を含む大きさのウィンドウw2を設定してそ
のウィンドウW2内の黒画素数を計数することにより部
品1が欠落していないか否かを判別する。
First, for the binary image shown in FIG. 5(1), a window W1 of a size including the dark image area 13' is set, and the number of black pixels in the window WI is counted. The presence or absence of the mark 4, that is, whether or not the orientation of the component 1 is appropriate, is determined based on whether the value is larger than a threshold value (a value close to zero). Next, for the same binary image, set a window w2 of a size that includes the image area 12'' of the border part, and count the number of black pixels in the window W2 to determine whether part 1 is missing. Discern.

つぎに第5図(2)に示す2値画像に対し、印字部の画
像領域5′を含む大きさのウィンドウW。
Next, for the binary image shown in FIG. 5(2), a window W of a size including the image area 5' of the printing section is created.

を設定してそのウィンドウW、内の黒画素数(白画素数
)を計数することにより印字状態が良好か否かや印字が
欠落していないが否かを判別する。
By setting the number of black pixels (the number of white pixels) in the window W, it is determined whether the printing condition is good or not, and whether there are any missing prints.

つぎに第5図(3)に示す2値画像に対し、パッケージ
部2の画像領域2′の外周にウィンドウW4を設定して
そのウィンドウW4内の黒画素数を計数することにより
部品1が位置ずれしていないか否かを判別する。
Next, for the binary image shown in FIG. 5(3), a window W4 is set on the outer periphery of the image area 2' of the package part 2, and the number of black pixels within the window W4 is counted to locate the component 1. Determine whether there is any deviation.

つぎに第5図(4)に示す2値函像に対し、両側のリー
ド部3の画像領域3′上にラインウィンドウWS、W、
を設定して各画像領域3′のピッチを計測することによ
りリード部3が変形していないか否かを判別する。
Next, for the binary box image shown in FIG. 5(4), line windows WS, W,
By setting and measuring the pitch of each image area 3', it is determined whether or not the lead portion 3 is deformed.

なお上記のウィンドウ設定方法は一例であって、その他
のウィンドウ設定方法によっても部品検査が可能である
ことは勿論である。また部品の検査項目は上記に限らず
、例えばパッケージ部2の欠けなどの検査も検査項目に
加えることもできる。
Note that the window setting method described above is an example, and it goes without saying that component inspection can be performed using other window setting methods. In addition, the inspection items for components are not limited to those mentioned above, and inspection for chipping of the package portion 2, for example, can also be added to the inspection items.

〈発明の効果〉 この発明は上記の如く、第1の照明装置と第2の照明装
置とを用い、第1の照明装置の照明下で第2の照明装置
の照明光を観測対象の表面に対し斜め上方より照射する
ようにしたから、観測対象に窪みが存在しておれば、そ
の富みの位置に暗部が生じて窪みの存在を容易かつ確実
に判別できる。またこの発明の窪み観測装置を部品検査
装置に実施するとき、窪みの検出以外に、部品の欠落9
部品の位置ずれ、印字不良。
<Effects of the Invention> As described above, the present invention uses the first illumination device and the second illumination device, and illuminates the surface of the observation target with the illumination light of the second illumination device under the illumination of the first illumination device. On the other hand, since the light is irradiated diagonally from above, if a depression exists in the observation target, a dark area will appear at the position of the richness, making it possible to easily and reliably identify the presence of the depression. Furthermore, when the dent observation device of the present invention is implemented in a parts inspection device, in addition to detecting dents, missing parts 9
Misalignment of parts, printing defects.

リード部の変形なども同時に検査できるという利点があ
る。
This has the advantage that deformation of the lead portion can also be inspected at the same time.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はこの発明が実施された部品検査装置の外観図、
第2図は部品検査装置の正面図、第3図は部品に対する
照明状態を示す説明図、第4図は部局の濃淡画像の明る
さ分布を示す説明図、第5図はレベルの異なる2値化し
きい値で2値化したときの各2値画像を示す説明図、第
6図は検査対象の部品を示す斜面図、第7図はマークの
形状を示す断面図、第8図は帯状テープの構造を示す断
面図である。
FIG. 1 is an external view of a parts inspection device in which this invention is implemented;
Figure 2 is a front view of the parts inspection device, Figure 3 is an explanatory diagram showing the lighting conditions for parts, Figure 4 is an explanatory diagram showing the brightness distribution of gray images of departments, and Figure 5 is a binary value with different levels. An explanatory diagram showing each binary image when binarized using the conversion threshold, Fig. 6 is an oblique view showing the part to be inspected, Fig. 7 is a cross-sectional view showing the shape of the mark, and Fig. 8 is the tape strip. FIG.

Claims (1)

【特許請求の範囲】  観測対象の表面に存在する窪みを所定の観測位置で観
測するための窪み観測装置であって、観測位置のほぼ真
上に位置して観測対象の全体を垂直方向より照明するた
めの第1の照明装置と、 観測位置の斜め上方に位置して観測対象の表面に向けて
斜め下方へ照明光を投射する第2の照明装置と、 観測位置の真上に位置して観測対象に向けて垂直方向へ
視野が設定される撮像装置とから成り、 第1,第2の各照明装置は、第2の照明装置の照明光に
よる観測対象の表面の明るさが、第1の照明装置の照明
光による観測対象の表面の明るさより十分に大きくなる
よう、照明強度または観測位置からの距離が設定されて
成る窪み観測装置。
[Claims] A depression observation device for observing depressions existing on the surface of an observation target at a predetermined observation position, the device being located almost directly above the observation position and illuminating the entire observation target from the vertical direction. a first illumination device located diagonally above the observation position and projecting illumination light diagonally downward toward the surface of the observation target; and a second illumination device located directly above the observation position an imaging device whose field of view is set in a vertical direction toward the observation target, and each of the first and second illumination devices is configured such that the brightness of the surface of the observation target by the illumination light of the second illumination device is the same as that of the first illumination device. A depression observation device in which the illumination intensity or distance from the observation position is set to be sufficiently greater than the brightness of the surface of the observation target due to the illumination light of the illumination device.
JP2188633A 1990-07-17 1990-07-17 Hollow observation device Expired - Fee Related JP2893612B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2188633A JP2893612B2 (en) 1990-07-17 1990-07-17 Hollow observation device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2188633A JP2893612B2 (en) 1990-07-17 1990-07-17 Hollow observation device

Publications (2)

Publication Number Publication Date
JPH0474915A true JPH0474915A (en) 1992-03-10
JP2893612B2 JP2893612B2 (en) 1999-05-24

Family

ID=16227118

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2188633A Expired - Fee Related JP2893612B2 (en) 1990-07-17 1990-07-17 Hollow observation device

Country Status (1)

Country Link
JP (1) JP2893612B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002272228A (en) * 2001-03-21 2002-09-24 Yanmar Agricult Equip Co Ltd Rice transplanter
JP2018124088A (en) * 2017-01-30 2018-08-09 オムロン株式会社 Detection system, detection device, and detection method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002272228A (en) * 2001-03-21 2002-09-24 Yanmar Agricult Equip Co Ltd Rice transplanter
JP2018124088A (en) * 2017-01-30 2018-08-09 オムロン株式会社 Detection system, detection device, and detection method

Also Published As

Publication number Publication date
JP2893612B2 (en) 1999-05-24

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