JP2605971B2 - Observation equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an observation apparatus used for observing an object having a first portion and a second portion having different optical characteristics using a single imaging device.

[0002]

2. Description of the Related Art FIG. 7 shows a specific example of an electronic component in which a plurality of legs 2, 3 protrude from the lower surface of a main body 1. In the illustrated electronic component, the main body 1 has a plurality of projecting walls 5 integrally formed at regular intervals on an upper surface of an insulating substrate 4 made of synthetic resin. , 5 and a fixed metal piece 6 and a movable metal piece 7 corresponding to each fixed metal piece 6 are provided. Each fixed metal piece 6
The entire surface of the movable metal piece 7 is fixed to the insulating substrate 4, the base end of the movable metal piece 7 is fixed to the insulating substrate 4, and the distal end of the movable metal piece 7 projects at a fixed height on the fixed metal piece 6. Each leg 3 on the rear side
Is integral with each fixed metal piece 6, each leg 2 arranged on the front side is integral with each movable metal piece 7, and the total length of each leg 2, 3 protrudes downward from the lower surface of the substrate 4. ing.

An electronic component of this kind includes a main body 1 and legs 2,
3 is not always in a perfect state, and some defective products are damaged or deformed. For example, since each protruding wall 5 is a thin synthetic resin plate, it is easily broken from the base and
Is flexible, so it is easy to bend in any direction.
For this purpose, component inspection is required, and conventionally such inspection is performed manually and manually.

[0004]

However, in such a manual inspection method, particularly when the component to be inspected is small and both the main body 1 and the legs 2 and 3 are inspected at the same time. In addition, there is a problem that the inspection efficiency is low, the inspection accuracy is significantly reduced, and the inspection result varies depending on the inspector.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problem. For an object such as an electronic component having two parts having different optical characteristics, the first and second parts can be simultaneously and efficiently used. It is another object of the present invention to provide an observation device that can observe and inspect with high accuracy.

[0006]

According to the present invention, an object having a first portion and a second portion having different optical characteristics is provided.
One of a observation apparatus for observing using an imaging device, a diffusion plate disposed behind the object and a light source for irradiating light toward the object from behind the diffuser, before
A first lighting device for setting a bright background in the first portion, and a first lighting device disposed on the front side of the object and directly connected to the second portion.
A second illumination device that emits illumination light ;
Located behind and absorbs light from the second lighting device
A light absorbing member forming a dark background for the second portion;
The object under illumination by the first and second illumination devices
Der having an imaging device for said first and second portions of the included in the same field of view for imaging from the front surface of the object
You.

According to the second aspect of the present invention, an electronic component having a main body part having different optical characteristics and a plurality of legs is set as an observation target.

[0008]

A bright background is set for the first portion of the object by the diffuse lighting from behind by the first lighting device.
Is done. For the second portion, the direct illumination light from the second illumination device is absorbed by the rear light absorbing member.
Thus, a darker background is set. Under this condition the first and
Each part can be identified and observed in the same image by imaging the second part included in the same field of view.
Becomes

According to the second aspect of the present invention, the main body and the plurality of legs of the electronic component can be observed simultaneously.

[0010]

FIG. 1 shows the appearance of an observation apparatus according to an embodiment of the present invention. The observation device in the illustrated example is used for observing the electronic components shown in FIG. 7 and performing an automatic inspection. The observation device observes the components 10 to be inspected conveyed one after another by a belt conveyor 11 and Of the movable metal piece 7 and the bending or bending of the front leg 2 are automatically inspected.

The parts to be inspected 10 are successively guided to the inspection position while being supported by the support table 12 as shown in FIG.
The support base 12 supports the lower surface of the main body 1 of the component 10 to be inspected on the horizontal upper surface 12a, and supports the component 10 to be inspected with the leg 2 protruding from the vertical front surface 12b. The front surface 12b of the support base 12 is black and matted.
It is formed of a light absorbing member.

At the inspection position, a position sensor (not shown) is arranged, and when the inspected component 10 reaches the inspection position,
Upon detecting this, a trigger signal for temporarily stopping the driving of the belt conveyor 11 is output.

At this inspection position, the imaging device 13 and the first and the first
Second illumination devices 14 and 15 are arranged. The first illuminating device 14 includes a white diffuser 16 disposed on the rear side of the inspection position, and a light source 17 for irradiating light from behind the diffuser 16 toward the inspection position. The main body 1 is subjected to diffuse illumination from behind. Second
The illumination device 15 is arranged in front of the inspection position, irradiates light in the direction of the inspection position, and directly illuminates the leg 2 of the component to be inspected 10 from the front.

The imaging device 13 performs a visual field setting such that the main body 1 and the leg 2 of the component 10 to be inspected are included in the same visual field under illumination by the first and second illumination devices 14 and 15. An image of the inspected component 10 is taken from the front. This image signal is taken into the image processing device 18 and subjected to processing such as binarization, and the binary image is displayed on the display device 19.

FIG. 3 shows a schematic configuration of the image processing apparatus 18. In the figure, an analog image signal from an imaging device 13 is input to an image processing device 18, binarized by a binarization circuit 20, and stored in an image memory 21. This binary image is displayed on a display device 19 such as a CRT via a CRT interface circuit 22. A CPU 23 for controlling such an operation is connected to the image memory 21 via a bus line 24. The bus line 24 stores an RO for storing a program for component inspection and the like.
A RAM 26 in which M25 and various data are stored is connected.

FIG. 4 shows a binary image 30 stored in the image memory 21. In this binary image 30, since the main body 1 is imaged under the diffuse illumination from behind by the first illumination device 14, each part of the main body 1, that is, the substrate 4, each protruding wall 5, and each movable metal piece The image portions 4 ', 5' and 7 'corresponding to 7 are composed of black pixels, and the image portion 16' corresponding to the background diffusion plate 16 is composed of white pixels. On the other hand, leg 2
Is imaged under direct illumination from the front by the second lighting device 15 and the front 12b of the support 12 is
Since the direct illumination light is absorbed in the image portion 2, the image portion 2 ′ corresponding to the leg portion 2 is formed of white pixels, and the image portion 12 b ′ corresponding to the front surface 12 b of the background support 12 is formed of black pixels.

[0017] For this binary image 30, the tip position of the image portion 7 of the slug 'first line window W ₁ corresponding to the slightly upper position of and the image portion 2 of each leg' the second line window W ₂ is correspondingly set respectively, component inspection to be described later is executed. In this embodiment, each line window W ₁ , W ₂ has its line width set to one pixel.

FIG. 5 shows an inspection procedure according to this embodiment. First, in Step 1 (indicated by “ST1” in the figure) of the drawing, the inspection target component 10 guided to the inspection position is imaged by the imaging device 13 under illumination by the first and second illumination devices 14 and 15. The input image is the image processing device 1
8 and binarized, and the binary image is stored in the image memory 21. Then CPU23 whereas the binary image, after first detecting the black pixels on the line window W ₁ sets the first line window W _1, detects a change point coordinates of P ₁ to P ₉ of the pixel (Step 2,
3).

In the next step 4, the CPU 23 determines whether or not the coordinate positions of the respective changing points P _{1 to} P ₉ are appropriate. If the determination is “NO”, the CPU 10 checks
Determines that the projecting wall 5 is missing, and outputs a determination result of the missing defect (step 5).

FIG. 6A illustrates a binary image of a part to be inspected having a defective chip. In the figure, the portion 5 'shown by the one-dot chain line shows an image portion of the missing protruding wall, not appear in the image of the protruding wall for this lack, coordinate changing point P ₁ is not detected.

[0021] Returning to FIG. 5, if the if the determination of step 4 is "YES", then in Step 6 CPU 23 is to determine whether a pitch of the changing point P ₁ to P ₉ is correct, if the If the judgment is “NO”, the inspected part 1
0 judges that the movable metal piece 7 has jumped up, and outputs a determination result indicating that the movable metal piece 7 is defective (step 7).

FIG. 6 (2) illustrates a binary image of a part to be inspected having a defective movable metal piece. In the figure, 7 ″ is an image portion of the movable metal piece that has jumped up.
_1, since the changing point of the image portion 7 'of slug between P ₂ is generated, the pitch between the change points becomes abnormal.

Returning to FIG. 5, if the determination in step 6 is "YES", the flow advances to step 8 and then the CPU
23 denotes a second line window W for the same binary image.
After detecting the white pixels on the line window _{W 2} by setting _2, it detects the coordinates of the change point _Q 1 to Q ₃ in the pixel (step 8,9).

[0024] At the next step 10, CPU 23 has determined whether the coordinate position and pitch proper of each change point Q ₁ to Q _8, If its judgment is "NO", parts for inspection 10 Determines that the leg 2 is bent or bent in any direction, and outputs a determination result of a leg failure (step 11).

FIG. 6 (3) shows an example of a binary image of a part to be inspected having a leg defect. Figure 2 "is an image portion of the legs bent in the longitudinal direction, but the image portion 2 for this bending" of the coordinate change point to Q ₁ for undetected. In the case where the leg portions 2 are bent in a direction as indicated by a chain line, but its coordinates change point to Q ₁ for the image portion of the leg portion 2 is detected, also the coordinates change point Q ₁ for bending changes The pitch between the points Q ₁ and Q ₂ also becomes abnormal.

Thus, the determination in step 10 is "YES".
If so, it is determined that the inspected component 10 is normal, and a determination result indicating that it is a non-defective product is output (step 12).
In step 13, it is determined whether or not there is a part to be inspected. As long as the determination is "YES", the same inspection procedure is repeatedly executed.

[0027]

As described above, the present invention is applicable to observation of an object having a first portion and a second portion having different optical characteristics.
Then, diffuse illumination is performed from behind the first portion to
The background of is set bright, and for the second part,
Direct lighting and darkening the background
Then, in this state, the first and second portions are included in the same field of view, and the object is imaged from the front .
The first and second portions can be identified in the same image, and each portion can be observed efficiently and with high accuracy.

According to the second aspect of the present invention, with respect to an electronic component having a main body and a plurality of legs having different optical characteristics, a remarkable effect that the main body and each leg can be simultaneously and efficiently observed with high accuracy. To play.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an appearance of an observation device according to an embodiment of the present invention.

FIG. 2 is a side view of the example device of FIG.

FIG. 3 is a block diagram illustrating a circuit configuration example of an image processing apparatus.

FIG. 4 is an explanatory diagram showing a binary image of a part to be inspected.

FIG. 5 is a flowchart showing an inspection procedure by the example of the apparatus shown in FIGS.

FIG. 6 is an explanatory diagram showing an enlarged binary image of a defective product.

FIG. 7 is a perspective view showing a specific example of a part to be inspected.

[Description of Reference Numerals] 1 main body 2 legs 10 component to be inspected 12 support base 13 imaging device 14 first illumination device 15 second illumination device 16 diffuser plate 17 light source

Claims (2)

(57) [Claims] 1. An observation apparatus for observing an object including a first portion and a second portion having different optical characteristics by using one image pickup device, which is disposed behind the object. A diffusing plate and a light source for irradiating light from behind the diffusing plate toward the target object;
A first illuminating device for setting a bright background in a first portion, and a first illuminating device arranged on a front side of an object to directly illuminate the second portion
A second lighting device that irradiates light; and a second lighting device that is located behind the second portion and is provided with the second lighting device.
To form a dark background for the second part
A light absorbing member and an object under illumination by the first and second illumination devices.
Observation apparatus having an image pickup device of the first and second portions of the object are included in the same field of view for imaging an object from the front. 2. The electronic device according to claim 1, wherein the object is an electronic component having a main body having different optical characteristics and a plurality of legs.
Observation equipment on board .