JPH0718695B2 - Concavo-convex observation device - Google Patents

Concavo-convex observation device

Info

Publication number
JPH0718695B2
JPH0718695B2 JP16967193A JP16967193A JPH0718695B2 JP H0718695 B2 JPH0718695 B2 JP H0718695B2 JP 16967193 A JP16967193 A JP 16967193A JP 16967193 A JP16967193 A JP 16967193A JP H0718695 B2 JPH0718695 B2 JP H0718695B2
Authority
JP
Japan
Prior art keywords
shield
light
flat surface
unevenness
minute gap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP16967193A
Other languages
Japanese (ja)
Other versions
JPH0658745A (en
Inventor
洋 森川
征次 古川
潔 宮本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Corp filed Critical Omron Corp
Priority to JP16967193A priority Critical patent/JPH0718695B2/en
Publication of JPH0658745A publication Critical patent/JPH0658745A/en
Publication of JPH0718695B2 publication Critical patent/JPH0718695B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Input (AREA)

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、紙や布などのシート
状物の表面に生成される皺の有無を観測したり、物体の
平坦面に生成されるうねりや凹凸の有無を観測したりす
るのに用いられる凹凸観測装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention observes the presence or absence of wrinkles formed on the surface of a sheet material such as paper or cloth, and the presence or absence of undulations or irregularities formed on the flat surface of an object. The present invention relates to an unevenness observing device used to do this.

【0002】[0002]

【従来の技術】例えば紙などに印刷を施す場合、紙の表
面に皺が生じていると、適正な印刷が困難である。また
柔軟で可撓性のあるシート状物を焼成して固化するよう
な場合に、シート状物に皺が生じていると、適正な焼成
品を得ることが困難である。従ってこの種の皺の有無を
検査した上で所定の加工工程へ移行させるのが望まし
い。
2. Description of the Related Art For example, when printing on paper or the like, if wrinkles are formed on the surface of the paper, it is difficult to perform proper printing. Further, in the case where a soft and flexible sheet-like material is baked and solidified, if the sheet-like material has wrinkles, it is difficult to obtain an appropriate baked product. Therefore, it is desirable to inspect for wrinkles of this kind before proceeding to a predetermined processing step.

【0003】[0003]

【発明が解決しようとする問題点】従来はこの種検査を
人間が眼で見て行っていたが、検査結果にばらつきがあ
り、また高速かつ高精度の検査を行うのが困難である。
このため自動検査装置の出現が望まれているが、現在の
ところ、その種の装置は未だ提案されていない。
Conventionally, humans have performed this kind of inspection with eyes, but there are variations in the inspection results, and it is difficult to perform high-speed and highly accurate inspection.
For this reason, the advent of an automatic inspection apparatus is desired, but at present, such an apparatus has not been proposed yet.

【0004】この発明は、上記問題に着目してなされた
もので、観測対象の平坦面に生成された皺などの凹凸を
高精度に検査し得る凹凸観測装置を提供することを目的
とする。
The present invention has been made in view of the above problems, and an object thereof is to provide an unevenness observing device capable of highly accurately inspecting unevenness such as wrinkles formed on a flat surface to be observed.

【0005】[0005]

【問題点を解決するための手段】この発明は、観測対象
の平坦面に生成された凹凸を観測するための凹凸観測装
置であって、遮蔽体と投光装置と撮像装置とを具備して
いる。前記遮蔽体は、観測対象の平坦面上を覆いかつ平
坦面との間に微小間隙が生ずるよう配置される。前記投
光装置は、前記遮蔽体の外側に前記微小間隙に向けて配
置され、微小間隙より遮蔽体の内側へ板状光を前記平坦
面と平行に照射することが可能となっている。前記撮像
装置は、観測対象の平坦面の上方に配置され、対物レン
ズを遮蔽体の内側に平坦面と対向させて位置決めされ
る。
The present invention is an unevenness observing device for observing unevenness formed on a flat surface of an observation target, which comprises a shield, a light projecting device, and an imaging device. There is. The shield is arranged so as to cover the flat surface of the observation target and to form a minute gap with the flat surface. The light projecting device is arranged outside the shield toward the minute gap, and is capable of irradiating the plate-like light from the minute gap to the inside of the shield in parallel with the flat surface. The imaging device is arranged above the flat surface of the observation target, and is positioned inside the shield with the objective lens facing the flat surface.

【0006】また請求項2の発明にかかる凹凸観測装置
では、前記遮蔽体の内面が光吸収体となっている。
Further, in the unevenness observing device according to the invention of claim 2, the inner surface of the shield is a light absorber.

【0007】[0007]

【作用】遮蔽体で覆われた皺などの凹凸を有する平坦面
に対し、板状光を平行に照射すると、凹凸に光が当たっ
てその部分のみが光るため、これを撮像装置で撮像する
と、画像上に凹凸部分に対応して高輝度部分が現れる。
[Function] When a plate-like light is applied in parallel to a flat surface having irregularities such as wrinkles covered with a shield, the irregularities are exposed to light and only that portion is illuminated. High-intensity parts appear on the image corresponding to the uneven parts.

【0008】請求項2の凹凸観測装置では、遮蔽体の内
面が光吸収体であるので、遮蔽体の内面での反射光の発
生が防止され、鮮明な画像が得られる。
In the unevenness observing device according to the second aspect, since the inner surface of the shield is the light absorber, generation of reflected light on the inner surface of the shield is prevented and a clear image can be obtained.

【0009】[0009]

【実施例】第1図は、この発明の一実施例にかかる凹凸
観測装置1の外観を示している。この凹凸観測装置1は
ベルトコンベヤ2による搬送路沿いに配置され、このベ
ルトコンベヤ2上の各被検査品3につき皺の発生の有無
を次々に自動検査する。この実施例では、被検査品3は
紙片や合成樹脂シートのようなシート状物であるが、こ
れに限らないことは勿論であり、また皺のみならず、物
体表面に生じたうねりや凹凸などの検査にも適用でき
る。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows the appearance of an unevenness observing device 1 according to an embodiment of the present invention. The unevenness observing device 1 is arranged along the conveyance path of the belt conveyor 2 and automatically inspects each inspected product 3 on the belt conveyor 2 for wrinkles. In this embodiment, the inspection object 3 is a sheet-like material such as a piece of paper or a synthetic resin sheet, but it is not limited to this, and not only wrinkles but also undulations and irregularities generated on the surface of the object. It can also be applied to the inspection of.

【0010】図示例の凹凸観測装置1は、遮蔽体4と投
光装置5と撮像装置6とを含み、撮像装置6は画像処理
装置7に接続されている。遮蔽体4は、被検査品3の平
坦な表面に外部の照明光が当たるのを阻止するためのも
ので、被検査品3の表面上を覆いかつ第2図に示すよう
に、被検査品3の表面との間に1〜2mm程度の微小間隙
8が生ずるようにベルトコンベヤ2の真上に配置され
る。この遮蔽体4の内面は光を吸収して反射光を発生さ
せないための無反射面となっている。この無反射面は遮
蔽体4の内面に無反射の塗料を塗ったり、無反射シート
を貼付するなどにより形成される。
The unevenness observing device 1 in the illustrated example includes a shield 4, a light projecting device 5, and an image pickup device 6, and the image pickup device 6 is connected to an image processing device 7. The shield 4 is for preventing external illumination light from hitting the flat surface of the inspection object 3, and covers the surface of the inspection object 3 and as shown in FIG. It is arranged right above the belt conveyor 2 so that a minute gap 8 of about 1 to 2 mm is formed between the surface of the belt conveyor 2 and the surface of the belt 3. The inner surface of the shield 4 is a non-reflective surface that absorbs light and does not generate reflected light. This non-reflective surface is formed by applying non-reflective paint to the inner surface of the shield 4 or attaching a non-reflective sheet.

【0011】投光装置5は、微小間隙8より遮蔽体4の
内側へ板状光9を被検査品3の表面と平行に照射するた
めのもので、光ファイバ10の先端を前記遮蔽体4の外
側で前記微小間隙8に向けて配置される。図示例の投光
装置5はケース内にハロゲンランプや蛍光灯などの光源
を内蔵し、その光源に前記光ファイバ10の一端を接続
し、その他端をケース外へ引き出して前記微小間隙8に
対向位置させたものである。
The light projecting device 5 is for irradiating the plate-like light 9 from the minute gap 8 to the inside of the shield 4 in parallel with the surface of the object 3 to be inspected. It is arranged on the outer side toward the minute gap 8. The light projecting device 5 of the illustrated example has a light source such as a halogen lamp or a fluorescent lamp built in a case, one end of the optical fiber 10 is connected to the light source, and the other end is pulled out of the case to face the minute gap 8. It is located.

【0012】前記微小間隙8は投光装置5からの投射光
のみを遮蔽体4の内部へ導くためのものであるが、この
実施例の場合、光ファイバ10の先端面を発して拡がっ
た光を微小間隙8に相当する厚みに絞って板状光9とな
す作用がある。
The minute gap 8 is for guiding only the projection light from the light projecting device 5 to the inside of the shield 4, but in the case of this embodiment, the light emitted from the tip end surface of the optical fiber 10 and spread out. Has a function of squeezing to a thickness corresponding to the minute gap 8 to form the plate-like light 9.

【0013】なおこの実施例では、1本の光ファイバを
用いているが、板状光9の幅を広げるために、複数本の
光ファイバを一列に並べて用いてもよく、また板状体の
光ファイバを用いてもよい。また前記板状光9は、前記
微小間隙8にて形成する以外に、第5図に示すように、
光源11の近傍にスリット板12を設け、光源11から
の光をスリット13を通過させることにより形成しても
よい。この場合の微小間隙8は板状光の生成作用はな
い。
In this embodiment, one optical fiber is used, but in order to widen the width of the plate-shaped light 9, a plurality of optical fibers may be arranged in a line and used. An optical fiber may be used. In addition to forming the plate-shaped light 9 in the minute gap 8, as shown in FIG.
The slit plate 12 may be provided in the vicinity of the light source 11, and the light from the light source 11 may be passed through the slit 13. In this case, the minute gap 8 does not have a function of generating plate light.

【0014】前記撮像装置6は、被検査品3の表面を真
上位置より撮像するためのもので、対物レンズ14を前
記遮蔽体4の内側であって被検査品3の表面と対向させ
て位置決め配置される。この撮像装置6で得た画像は画
像処理装置7に送られて2値化などの前処理が行われた
後、その2値画像から皺の有無を判別してその判別結果
を表示部15に表示する。
The image pickup device 6 is for picking up an image of the surface of the article 3 to be inspected from directly above, and the objective lens 14 is arranged inside the shield 4 so as to face the surface of the article 3 to be inspected. It is positioned. The image obtained by the image pickup device 6 is sent to the image processing device 7 and subjected to preprocessing such as binarization, and then the presence or absence of wrinkles is discriminated from the binary image, and the discrimination result is displayed on the display unit 15. indicate.

【0015】つぎに上記構成の凹凸観測装置1につい
て、その動作を説明する。いま投光装置5を駆動する
と、光ファイバ10の先端面より光が照射され、前記微
小間隙8を経て板状光9となり、遮蔽体4の内側へ被検
査品3の表面と平行に進行する。もし被検査品3の表面
に皺が生じていなければ、板状光9はそのまま通過して
被検査品3の表面に当たらない。もし被検査品3の表面
に皺が生じていると、第3図に示す如く、板状光9は皺
16の凸部17や凹部18に当たって反射光を生じさ
せ、その部分のみが光ることになる。
Next, the operation of the unevenness observing device 1 having the above structure will be described. Now, when the light projecting device 5 is driven, light is emitted from the tip end surface of the optical fiber 10 and becomes plate-like light 9 through the minute gap 8 and travels inward of the shield 4 in parallel with the surface of the inspection object 3. . If the surface of the inspected product 3 is not wrinkled, the plate-shaped light 9 passes through as it is and does not hit the surface of the inspected product 3. If wrinkles are generated on the surface of the inspected product 3, the plate-shaped light 9 strikes the convex portions 17 and the concave portions 18 of the wrinkles 16 to generate reflected light, as shown in FIG. Become.

【0016】この被検査品3の表面を撮像装置6により
真上から撮像すると、皺が生じていない被検査品につい
ては真暗な画像となる。一方皺が生じた被検査品につい
ては真暗な背景中に前記凸部17や凹部18に相当する
高輝度部分が現れた画像となる。この画像を画像処理装
置7に取り込んで2値化すると、第4図に示すように、
高輝度部分20が白画素、背景部分21が黒画素として
現れた2値画像となる。
When the surface of the product 3 to be inspected is imaged from directly above by the image pickup device 6, the product to be inspected without wrinkles becomes a dark image. On the other hand, the wrinkled product to be inspected has an image in which a high-luminance portion corresponding to the convex portion 17 and the concave portion 18 appears in a dark background. When this image is taken into the image processing device 7 and binarized, as shown in FIG.
The high-luminance portion 20 is a binary image in which white pixels appear and the background portion 21 appears as black pixels.

【0017】画像処理装置1ではこの2値画像19をラ
スタースキャンし、2値画像19中の白画素数を計数し
て、その計数値を所定のしきい値と比較する。もし計数
値がしきい値より大きければ被検査品3は皺が発生した
不良品であると判断し、またしきい値未満であれば被検
査品3は皺が発生していない良品であると判断し、その
判断結果を表示部15に表示することになる。
The image processing apparatus 1 raster-scans the binary image 19, counts the number of white pixels in the binary image 19, and compares the counted value with a predetermined threshold value. If the count value is larger than the threshold value, it is determined that the inspected product 3 is a defective product in which wrinkles have occurred, and if it is less than the threshold value, the inspected product 3 is a non-defective product in which wrinkles have not occurred. The determination result is displayed on the display unit 15.

【0018】[0018]

【発明の効果】この発明は上記の如く、観測対象の平坦
面上を遮蔽体で覆い、観測対象と遮蔽体との間の微小間
隙より遮蔽体の内側へ板状光を平坦面と平行に照射し
て、その平坦面の画像を撮像装置で撮像するようにした
から、観測対象の平坦面に生成された皺などの凹凸が高
輝度部分として観測し得、人手を介することなく、高速
かつ高精度に凹凸の自動検査が可能である。
As described above, according to the present invention, the flat surface of the observation target is covered with the shield, and the plate-like light is made parallel to the flat surface from the minute gap between the observation target and the shield to the inside of the shield. By irradiating, the image of the flat surface is picked up by the image pickup device, so that the unevenness such as wrinkles generated on the flat surface of the observation target can be observed as a high-intensity portion, without human intervention, and at high speed. Highly accurate automatic inspection of irregularities is possible.

【0019】また請求項2の発明では、遮蔽体の内面が
光吸収体であるから、遮蔽体の内面での反射光の発生を
防止し得、これにより鮮明な画像を得ることができ、検
査精度が向上する。
According to the second aspect of the invention, since the inner surface of the shield is a light absorber, generation of reflected light on the inner surface of the shield can be prevented, and a clear image can be obtained by this inspection. Accuracy is improved.

【図面の簡単な説明】[Brief description of drawings]

【図1】この発明の一実施例にかかる凹凸観測装置の外
観を示す斜面図である。
FIG. 1 is a perspective view showing the outer appearance of an unevenness observation device according to an embodiment of the present invention.

【図2】凹凸の観測状況を示す断面図である。FIG. 2 is a cross-sectional view showing an observation state of unevenness.

【図3】高輝度部分の発生状態を示す説明図である。FIG. 3 is an explanatory diagram showing a generation state of a high brightness portion.

【図4】高輝度部分を含む2値画像を示す説明図であ
る。
FIG. 4 is an explanatory diagram showing a binary image including a high-luminance portion.

【図5】投光装置の他の実施例を示す断面図である。FIG. 5 is a sectional view showing another embodiment of the light projecting device.

【符号の説明】[Explanation of symbols]

1 凹凸観測装置 4 遮蔽体 5 投光装置 6 撮像装置 8 微小間隙 14 対物レンズ DESCRIPTION OF SYMBOLS 1 Concavo-convex observation device 4 Shield 5 Projector 6 Imager 8 Small gap 14 Objective lens

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 FI 技術表示箇所 G06T 1/00 ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 6 Identification code Internal reference number FI technical display location G06T 1/00

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 観測対象の平坦面に生成された凹凸を観
測するための凹凸観測装置であって、 遮蔽体と投光装置と撮像装置とを有し、 前記遮蔽体は、観測対象の平坦面上を覆いかつ平坦面と
の間に微小間隙が生ずるよう配置され、 前記投光装置は、前記遮蔽体の外側に前記微小間隙に向
けて配置され、微小間隙より遮蔽体の内側へ板状光を前
記平坦面と平行に照射することが可能であり、 前記撮像装置は、観測対象の平坦面の上方に配置され、
対物レンズを遮蔽体の内側に平坦面と対向させて位置決
めされて成る凹凸観測装置。
1. An unevenness observing device for observing unevenness generated on a flat surface of an observation target, comprising: a shield, a light projecting device, and an imaging device, wherein the shield is a flat surface of the observation target. The light projecting device is arranged so as to cover the surface and to form a minute gap between itself and the flat surface, the light projecting device is arranged outside the shield toward the minute gap, and has a plate shape from the minute gap to the inside of the shield. It is possible to irradiate light in parallel with the flat surface, the imaging device is arranged above the flat surface of the observation target,
An unevenness observing device in which an objective lens is positioned inside a shield so as to face a flat surface.
【請求項2】 前記遮蔽体の内面は、光吸収体である請
求項1に記載された凹凸観測装置。
2. The unevenness observation device according to claim 1, wherein the inner surface of the shield is a light absorber.
JP16967193A 1993-06-15 1993-06-15 Concavo-convex observation device Expired - Fee Related JPH0718695B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16967193A JPH0718695B2 (en) 1993-06-15 1993-06-15 Concavo-convex observation device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16967193A JPH0718695B2 (en) 1993-06-15 1993-06-15 Concavo-convex observation device

Publications (2)

Publication Number Publication Date
JPH0658745A JPH0658745A (en) 1994-03-04
JPH0718695B2 true JPH0718695B2 (en) 1995-03-06

Family

ID=15890758

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16967193A Expired - Fee Related JPH0718695B2 (en) 1993-06-15 1993-06-15 Concavo-convex observation device

Country Status (1)

Country Link
JP (1) JPH0718695B2 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3596182B2 (en) * 1996-07-31 2004-12-02 松下電器産業株式会社 Image processing system
JP2005274173A (en) * 2004-03-23 2005-10-06 Japan Science & Technology Agency Surface inspection method of contamination on surface of object to be inspected such as wafer substrate transparent glass for liquid crystal display or the like and surface inspection device
JP5119725B2 (en) * 2007-05-07 2013-01-16 大日本印刷株式会社 Inspection image forming apparatus, inspection apparatus, inspection image forming method, and inspection method
JP5478389B2 (en) * 2010-07-07 2014-04-23 東日本旅客鉄道株式会社 Wheel shape measuring device
JP7008528B2 (en) * 2018-02-09 2022-01-25 東芝Itコントロールシステム株式会社 Visual inspection equipment
JP2022137904A (en) 2021-03-09 2022-09-22 本田技研工業株式会社 Method and device for inspecting surface

Also Published As

Publication number Publication date
JPH0658745A (en) 1994-03-04

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