JPH0473774B2 - - Google Patents

Info

Publication number
JPH0473774B2
JPH0473774B2 JP59038300A JP3830084A JPH0473774B2 JP H0473774 B2 JPH0473774 B2 JP H0473774B2 JP 59038300 A JP59038300 A JP 59038300A JP 3830084 A JP3830084 A JP 3830084A JP H0473774 B2 JPH0473774 B2 JP H0473774B2
Authority
JP
Japan
Prior art keywords
photosensitive
mask layer
light
layer
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59038300A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60182443A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP59038300A priority Critical patent/JPS60182443A/ja
Publication of JPS60182443A publication Critical patent/JPS60182443A/ja
Publication of JPH0473774B2 publication Critical patent/JPH0473774B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP59038300A 1984-02-29 1984-02-29 改良されたオペーク不要な製版用感光性マスキング材料 Granted JPS60182443A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59038300A JPS60182443A (ja) 1984-02-29 1984-02-29 改良されたオペーク不要な製版用感光性マスキング材料

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59038300A JPS60182443A (ja) 1984-02-29 1984-02-29 改良されたオペーク不要な製版用感光性マスキング材料

Publications (2)

Publication Number Publication Date
JPS60182443A JPS60182443A (ja) 1985-09-18
JPH0473774B2 true JPH0473774B2 (oth) 1992-11-24

Family

ID=12521452

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59038300A Granted JPS60182443A (ja) 1984-02-29 1984-02-29 改良されたオペーク不要な製版用感光性マスキング材料

Country Status (1)

Country Link
JP (1) JPS60182443A (oth)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58122539A (ja) * 1982-01-18 1983-07-21 Shiyuukoushiya:Kk 感光性フイルムにおける塗りつぶし画像作成方法およびその感光性フイルム

Also Published As

Publication number Publication date
JPS60182443A (ja) 1985-09-18

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