JPH0473727B2 - - Google Patents
Info
- Publication number
- JPH0473727B2 JPH0473727B2 JP62071388A JP7138887A JPH0473727B2 JP H0473727 B2 JPH0473727 B2 JP H0473727B2 JP 62071388 A JP62071388 A JP 62071388A JP 7138887 A JP7138887 A JP 7138887A JP H0473727 B2 JPH0473727 B2 JP H0473727B2
- Authority
- JP
- Japan
- Prior art keywords
- clamp
- arm
- piezoelectric actuator
- dimensional
- elastic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000033001 locomotion Effects 0.000 claims description 33
- 238000006073 displacement reaction Methods 0.000 claims description 22
- 241000256247 Spodoptera exigua Species 0.000 claims description 20
- 230000005540 biological transmission Effects 0.000 claims description 6
- 230000003321 amplification Effects 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims description 4
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 4
- 230000008602 contraction Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 2
- 230000005641 tunneling Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Landscapes
- Details Of Measuring And Other Instruments (AREA)
- Control Of Position Or Direction (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Manipulator (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62071388A JPS63238416A (ja) | 1987-03-27 | 1987-03-27 | ２次元インチワ−ムとその原点位置合わせ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62071388A JPS63238416A (ja) | 1987-03-27 | 1987-03-27 | ２次元インチワ−ムとその原点位置合わせ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63238416A JPS63238416A (ja) | 1988-10-04 |
| JPH0473727B2 true JPH0473727B2 (zh) | 1992-11-24 |
Family
ID=13459078
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62071388A Granted JPS63238416A (ja) | 1987-03-27 | 1987-03-27 | ２次元インチワ−ムとその原点位置合わせ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63238416A (zh) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07314356A (ja) * | 1994-05-20 | 1995-12-05 | Fanuc Ltd | リニアアクチュエータ |
| DE10124365B4 (de) * | 2001-05-18 | 2005-05-25 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung und Verfahren zum Positionieren und Fixieren eines Objektes |
| KR100687717B1 (ko) | 2004-12-16 | 2007-02-27 | 한국전자통신연구원 | 압전소자를 채용한 마이크로 스테이지 |
| JP4852699B2 (ja) * | 2006-04-07 | 2012-01-11 | 国立大学法人電気通信大学 | 移動装置及び制御方法 |
| CN102565458A (zh) * | 2012-02-15 | 2012-07-11 | 北京航空航天大学 | 一种推挽式二维微移动/定位装置 |
| CN102967503A (zh) * | 2012-11-09 | 2013-03-13 | 济南时代试金试验机有限公司 | 卧式拉压试验机横梁夹紧移动装置及方法 |
| CN109347363B (zh) * | 2018-11-16 | 2020-05-26 | 哈尔滨工业大学 | 一种蠕动式柔性铰链组合压电驱动器 |
-
1987
- 1987-03-27 JP JP62071388A patent/JPS63238416A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63238416A (ja) | 1988-10-04 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |