JPH047184Y2 - - Google Patents

Info

Publication number
JPH047184Y2
JPH047184Y2 JP12154187U JP12154187U JPH047184Y2 JP H047184 Y2 JPH047184 Y2 JP H047184Y2 JP 12154187 U JP12154187 U JP 12154187U JP 12154187 U JP12154187 U JP 12154187U JP H047184 Y2 JPH047184 Y2 JP H047184Y2
Authority
JP
Japan
Prior art keywords
processed material
slit
vacuum
housing
magnetic strip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12154187U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6426371U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12154187U priority Critical patent/JPH047184Y2/ja
Publication of JPS6426371U publication Critical patent/JPS6426371U/ja
Application granted granted Critical
Publication of JPH047184Y2 publication Critical patent/JPH047184Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP12154187U 1987-08-10 1987-08-10 Expired JPH047184Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12154187U JPH047184Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-08-10 1987-08-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12154187U JPH047184Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-08-10 1987-08-10

Publications (2)

Publication Number Publication Date
JPS6426371U JPS6426371U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-02-14
JPH047184Y2 true JPH047184Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-02-26

Family

ID=31368641

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12154187U Expired JPH047184Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-08-10 1987-08-10

Country Status (1)

Country Link
JP (1) JPH047184Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS6426371U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-02-14

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