JPH0471248A - Measuring probe - Google Patents

Abstract

PURPOSE:To make a measuring probe possible whenever a terminal surface touches an IC terminal to remove dust from the terminal surface so as to obtain good electric contact therebetween for accurate measurement by installing a mechanism that turns the probe in accordance with a contact pressure. CONSTITUTION:A measuring probe comprises a probe 1 wherein one end is formed into sphere and a 1 spiral groove 2 is formed in a predetermined range at the other end side, a pin 3 to be fitted in this spiral groove 2 is embedded therein, a circular sleeve 4 that exposes one end of the probe 1 and that inserts the other end, and a coil spring 6 that is to be inserted in the sleeve 4 while one end thereof presses one end of the probe 1. Further, firstly when pressing one end of the probe 1 to a terminal 5 of an IC, the probe 1 is pressed in the sleeve 4 and at the same time the probe 1 is forcibly turned by the pin 3 forced to be put in the spiral groove 2. This turning of the probe 1 removes dust from the terminal 5. Thus, the probe 1 turns every time measuring is carried out to remove dust and to touch the terminal of the IC at a predetermined pressure.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention provides a method for testing the electrical characteristics of a semiconductor integrated circuit device (hereinafter referred to as an IC) by contacting a circuit terminal of the IC and collecting characteristic values. Regarding measurement probes.

[Conventional technology]

Conventionally, this type of measurement probe has been used as a measurement element in an automatic IC sorting device (hereinafter simply referred to as a handler), and has been brought into contact with the output or input terminal of an IC circuit to exchange signals.

Although the structure of this measurement probe is not shown in the drawings, for example, a coil spring is compressed in an annular sleeve made of a conductive material, and the contactor is pressed against the terminal by the restoring force of the coil spring.

[Problem to be solved by the invention]

However, in the conventional measurement probe described above, the contact is applied with a pressing force in only one direction, so for example,
If there is dust on the measurement terminal of the IC, the contactor will come into contact with the terminal through the dust. For this reason, there is a drawback that poor contact often occurs during measurement, making accurate measurement impossible.

The object of the present invention is to provide a measuring probe that overcomes these drawbacks.

[Means to solve the problem]

The measuring probe of the present invention includes a measuring element having a spherical tip that contacts a measuring terminal of a semiconductor integrated circuit, an annular sleeve into which the rear end of the measuring element is inserted, and a ring-shaped sleeve into which the rear end of the measuring element is inserted. A measuring probe having a coil spring that is pushed and inserted into the sleeve, includes a spherical external member fitted into the inner wall of the sleeve, and a portion of this member exposed from the inner wall of the sleeve is attached to the measuring tip. It is characterized by being fitted into a spiral groove formed around the outer periphery.

〔Example〕

Next, the present invention will be explained with reference to the drawings.

FIG. 1 is a sectional view of a measurement probe showing an embodiment of the present invention. This measurement probe, as shown in the figure,
The gauge head 1 has one end formed into a spherical shape and a spiral groove 2 formed in a predetermined range on the other end side, and a bottle 3 to be fitted into the spiral groove 2 is embedded inside the gauge head 1. It consists of an annular sleeve 4 with one end exposed and the other end inserted, and a coil spring 6 inserted into the annular sleeve 4 and pressing the other end of the probe 1 with one end.

Next, the operation of this measurement probe will be explained.

First, when one end of the probe 1 is pressed against the terminal portion 5 of the IC, the probe 1 is compressed by the compression of the coil spring 6.
Is it pushed into the sleeve 4 and spiral at the same time? l!
It is forced by the bottle 3 fitted in 2 and rotates. Due to this rotational action, dust attached to the terminal portion 5 is removed. In this way, the probe 1 rotates every time a measurement is made, removes dust, and makes contact with a predetermined pressure.

FIG. 2 is a sectional view of a portion of a measurement probe showing another embodiment of the present invention. As shown in the figure, the measuring probe in this embodiment is provided with a ball 3a in place of the bottle in the previous embodiment. Since this ball 3a is fitted into the recess inside the sleeve 4, the ball 3a rotates freely within the recess compared to the bottle in the above-mentioned embodiment, so that the rotation of the measuring tip is performed more smoothly. There are advantages.

〔Effect of the invention〕

As explained above, the present invention provides a mechanism that rotates the probe according to the contact pressure when the probe contacts the terminal of an IC, so that the probe always removes dirt from the terminal surface during contact. Therefore, there is an effect that a measurement probe that can obtain good electrical contact and perform accurate measurements can be obtained.

[Brief explanation of the drawing]

FIG. 1 is a sectional view of a measurement probe showing one embodiment of the present invention, and FIG. 2 is a sectional view of a portion of a measurement probe showing another embodiment of the invention. 1... Measuring head, 2... Spiral groove, 3... Bottle, 3
a... Ball, 4... Sleeve, 5... Terminal part,
6...Coil spring.

Claims (1)

[Claims] A probe having a spherical tip that contacts a measurement terminal of a semiconductor integrated circuit, an annular sleeve into which the rear end of the probe is inserted, and a sleeve which is inserted into the sleeve while pushing the rear end of the probe. A measurement probe having a coil spring having a spherical outer shape fitted into the inner wall of the sleeve, the part of which is exposed from the inner wall of the sleeve having a spiral shape formed around the outer periphery of the probe. A measurement probe characterized by being fitted into a groove.