JPH047095B2 - - Google Patents

Info

Publication number
JPH047095B2
JPH047095B2 JP56163014A JP16301481A JPH047095B2 JP H047095 B2 JPH047095 B2 JP H047095B2 JP 56163014 A JP56163014 A JP 56163014A JP 16301481 A JP16301481 A JP 16301481A JP H047095 B2 JPH047095 B2 JP H047095B2
Authority
JP
Japan
Prior art keywords
etching
etched
taper
photoresist
oxide film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56163014A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5864032A (ja
Inventor
Masato Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP56163014A priority Critical patent/JPS5864032A/ja
Publication of JPS5864032A publication Critical patent/JPS5864032A/ja
Publication of JPH047095B2 publication Critical patent/JPH047095B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P50/00—

Landscapes

  • Weting (AREA)
JP56163014A 1981-10-13 1981-10-13 半導体装置の製造方法 Granted JPS5864032A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56163014A JPS5864032A (ja) 1981-10-13 1981-10-13 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56163014A JPS5864032A (ja) 1981-10-13 1981-10-13 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5864032A JPS5864032A (ja) 1983-04-16
JPH047095B2 true JPH047095B2 (OSRAM) 1992-02-07

Family

ID=15765550

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56163014A Granted JPS5864032A (ja) 1981-10-13 1981-10-13 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5864032A (OSRAM)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63234548A (ja) * 1987-03-24 1988-09-29 Oki Electric Ind Co Ltd 半導体素子の製造方法
JPH0655364U (ja) * 1993-01-08 1994-08-02 第一精工株式会社 釣り用パイプ天秤

Also Published As

Publication number Publication date
JPS5864032A (ja) 1983-04-16

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