JPH047013A - 吸着法による高純度ガスの精製方法および装置 - Google Patents

吸着法による高純度ガスの精製方法および装置

Info

Publication number
JPH047013A
JPH047013A JP2107749A JP10774990A JPH047013A JP H047013 A JPH047013 A JP H047013A JP 2107749 A JP2107749 A JP 2107749A JP 10774990 A JP10774990 A JP 10774990A JP H047013 A JPH047013 A JP H047013A
Authority
JP
Japan
Prior art keywords
gas
adsorber
sub
desorption
main
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2107749A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0583286B2 (enrdf_load_stackoverflow
Inventor
Yuji Horii
堀井 雄二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kobe Steel Ltd
Original Assignee
Kobe Steel Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kobe Steel Ltd filed Critical Kobe Steel Ltd
Priority to JP2107749A priority Critical patent/JPH047013A/ja
Publication of JPH047013A publication Critical patent/JPH047013A/ja
Publication of JPH0583286B2 publication Critical patent/JPH0583286B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Separation Of Gases By Adsorption (AREA)
JP2107749A 1990-04-23 1990-04-23 吸着法による高純度ガスの精製方法および装置 Granted JPH047013A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2107749A JPH047013A (ja) 1990-04-23 1990-04-23 吸着法による高純度ガスの精製方法および装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2107749A JPH047013A (ja) 1990-04-23 1990-04-23 吸着法による高純度ガスの精製方法および装置

Publications (2)

Publication Number Publication Date
JPH047013A true JPH047013A (ja) 1992-01-10
JPH0583286B2 JPH0583286B2 (enrdf_load_stackoverflow) 1993-11-25

Family

ID=14466997

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2107749A Granted JPH047013A (ja) 1990-04-23 1990-04-23 吸着法による高純度ガスの精製方法および装置

Country Status (1)

Country Link
JP (1) JPH047013A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5681369A (en) * 1996-05-10 1997-10-28 Jordan Holding Company Apparatus and method for recovering volatile liquid
US8979982B2 (en) 2013-05-01 2015-03-17 Jordan Technologies, Llc Negative pressure vapor recovery system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5681369A (en) * 1996-05-10 1997-10-28 Jordan Holding Company Apparatus and method for recovering volatile liquid
US8979982B2 (en) 2013-05-01 2015-03-17 Jordan Technologies, Llc Negative pressure vapor recovery system

Also Published As

Publication number Publication date
JPH0583286B2 (enrdf_load_stackoverflow) 1993-11-25

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