JPH0469338B2 - - Google Patents
Info
- Publication number
- JPH0469338B2 JPH0469338B2 JP58080887A JP8088783A JPH0469338B2 JP H0469338 B2 JPH0469338 B2 JP H0469338B2 JP 58080887 A JP58080887 A JP 58080887A JP 8088783 A JP8088783 A JP 8088783A JP H0469338 B2 JPH0469338 B2 JP H0469338B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- reference electrode
- fet
- sensor
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000126 substance Substances 0.000 claims description 23
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 239000004020 conductor Substances 0.000 claims 1
- 239000012528 membrane Substances 0.000 description 11
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 8
- 150000002500 ions Chemical class 0.000 description 8
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 8
- 239000010410 layer Substances 0.000 description 6
- 229910002092 carbon dioxide Inorganic materials 0.000 description 4
- 239000001569 carbon dioxide Substances 0.000 description 4
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 3
- 102000004190 Enzymes Human genes 0.000 description 2
- 108090000790 Enzymes Proteins 0.000 description 2
- 229910021607 Silver chloride Inorganic materials 0.000 description 2
- 239000008280 blood Substances 0.000 description 2
- 210000004369 blood Anatomy 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000001139 pH measurement Methods 0.000 description 2
- HKZLPVFGJNLROG-UHFFFAOYSA-M silver monochloride Chemical compound [Cl-].[Ag+] HKZLPVFGJNLROG-UHFFFAOYSA-M 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Chemical compound NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 description 1
- 239000012491 analyte Substances 0.000 description 1
- 239000004202 carbamide Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- ZOMNIUBKTOKEHS-UHFFFAOYSA-L dimercury dichloride Chemical class Cl[Hg][Hg]Cl ZOMNIUBKTOKEHS-UHFFFAOYSA-L 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
Landscapes
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Biochemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- Molecular Biology (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58080887A JPS59206756A (ja) | 1983-05-11 | 1983-05-11 | 参照電極を一体化したｆｅｔ化学センサ− |
| DE19843417137 DE3417137A1 (de) | 1983-05-11 | 1984-05-09 | Chemisch empfindlicher feldeffekttransistor mit integrierter referenzelektrode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58080887A JPS59206756A (ja) | 1983-05-11 | 1983-05-11 | 参照電極を一体化したｆｅｔ化学センサ− |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59206756A JPS59206756A (ja) | 1984-11-22 |
| JPH0469338B2 true JPH0469338B2 (no) | 1992-11-05 |
Family
ID=13730852
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58080887A Granted JPS59206756A (ja) | 1983-05-11 | 1983-05-11 | 参照電極を一体化したｆｅｔ化学センサ− |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPS59206756A (no) |
| DE (1) | DE3417137A1 (no) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3519397A1 (de) * | 1985-05-30 | 1986-12-04 | Siemens AG, 1000 Berlin und 8000 München | Sensor fuer gasanalyse bzw. -detektion |
| JPS6283641A (ja) * | 1985-10-08 | 1987-04-17 | Sharp Corp | 電界効果型半導体センサ |
| JPH0725688Y2 (ja) * | 1985-12-18 | 1995-06-07 | 新電元工業株式会社 | 半導体イオンセンサ |
| FR2672158B1 (fr) * | 1991-01-24 | 1993-04-09 | Commissariat Energie Atomique | Capteur pour la detection d'especes chimiques ou de photons utilisant un transistor a effet de champ. |
| WO2010001277A1 (en) * | 2008-06-30 | 2010-01-07 | Nxp B.V. | Chip integrated ion sensor |
| JP5527139B2 (ja) * | 2010-09-28 | 2014-06-18 | 大日本印刷株式会社 | バイオセンサを用いる測定方法およびバイオセンサ |
| TWI432724B (zh) | 2010-10-18 | 2014-04-01 | Ind Tech Res Inst | 血液分析微系統 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5672339A (en) * | 1979-11-16 | 1981-06-16 | Kuraray Co Ltd | Fet multisensor |
-
1983
- 1983-05-11 JP JP58080887A patent/JPS59206756A/ja active Granted
-
1984
- 1984-05-09 DE DE19843417137 patent/DE3417137A1/de active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5672339A (en) * | 1979-11-16 | 1981-06-16 | Kuraray Co Ltd | Fet multisensor |
Also Published As
| Publication number | Publication date |
|---|---|
| DE3417137A1 (de) | 1984-11-15 |
| DE3417137C2 (no) | 1987-03-26 |
| JPS59206756A (ja) | 1984-11-22 |
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