JPH046904B2 - - Google Patents
Info
- Publication number
- JPH046904B2 JPH046904B2 JP58014310A JP1431083A JPH046904B2 JP H046904 B2 JPH046904 B2 JP H046904B2 JP 58014310 A JP58014310 A JP 58014310A JP 1431083 A JP1431083 A JP 1431083A JP H046904 B2 JPH046904 B2 JP H046904B2
- Authority
- JP
- Japan
- Prior art keywords
- signal
- energy
- sweep
- analyzer
- loss
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001228 spectrum Methods 0.000 claims description 26
- 238000001514 detection method Methods 0.000 claims description 13
- 238000010894 electron beam technology Methods 0.000 claims description 9
- 238000004458 analytical method Methods 0.000 claims description 2
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 238000010408 sweeping Methods 0.000 claims 2
- 230000015654 memory Effects 0.000 description 18
- 238000010521 absorption reaction Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 9
- 230000003993 interaction Effects 0.000 description 4
- 238000004451 qualitative analysis Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Tubes For Measurement (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58014310A JPS59141044A (ja) | 1983-01-31 | 1983-01-31 | 電子線エネルギー損出スペクトル分析装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58014310A JPS59141044A (ja) | 1983-01-31 | 1983-01-31 | 電子線エネルギー損出スペクトル分析装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59141044A JPS59141044A (ja) | 1984-08-13 |
| JPH046904B2 true JPH046904B2 (enrdf_load_stackoverflow) | 1992-02-07 |
Family
ID=11857520
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58014310A Granted JPS59141044A (ja) | 1983-01-31 | 1983-01-31 | 電子線エネルギー損出スペクトル分析装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59141044A (enrdf_load_stackoverflow) |
-
1983
- 1983-01-31 JP JP58014310A patent/JPS59141044A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59141044A (ja) | 1984-08-13 |
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