JPH0468388B2 - - Google Patents

Info

Publication number
JPH0468388B2
JPH0468388B2 JP58094744A JP9474483A JPH0468388B2 JP H0468388 B2 JPH0468388 B2 JP H0468388B2 JP 58094744 A JP58094744 A JP 58094744A JP 9474483 A JP9474483 A JP 9474483A JP H0468388 B2 JPH0468388 B2 JP H0468388B2
Authority
JP
Japan
Prior art keywords
film
frequency power
cutting tool
coating
torr
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58094744A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59219463A (ja
Inventor
Minoru Nakano
Akira Doi
Masaaki Tobioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP9474483A priority Critical patent/JPS59219463A/ja
Publication of JPS59219463A publication Critical patent/JPS59219463A/ja
Publication of JPH0468388B2 publication Critical patent/JPH0468388B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Chemical Vapour Deposition (AREA)
JP9474483A 1983-05-27 1983-05-27 Ａｌ２Ｏ３コーティング膜を有する切削工具の製造法 Granted JPS59219463A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9474483A JPS59219463A (ja) 1983-05-27 1983-05-27 Ａｌ２Ｏ３コーティング膜を有する切削工具の製造法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9474483A JPS59219463A (ja) 1983-05-27 1983-05-27 Ａｌ２Ｏ３コーティング膜を有する切削工具の製造法

Publications (2)

Publication Number Publication Date
JPS59219463A JPS59219463A (ja) 1984-12-10
JPH0468388B2 true JPH0468388B2 (enrdf_load_stackoverflow) 1992-11-02

Family

ID=14118630

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9474483A Granted JPS59219463A (ja) 1983-05-27 1983-05-27 Ａｌ２Ｏ３コーティング膜を有する切削工具の製造法

Country Status (1)

Country Link
JP (1) JPS59219463A (enrdf_load_stackoverflow)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5011360A (enrdf_load_stackoverflow) * 1973-05-30 1975-02-05
JPS5128600A (ja) * 1974-09-05 1976-03-10 Kitasato Gakuen Kayoseipurushianburuunoseizohoho
SE406090B (sv) * 1977-06-09 1979-01-22 Sandvik Ab Belagd hardmetallkropp samt sett att framstalla en dylik kropp

Also Published As

Publication number Publication date
JPS59219463A (ja) 1984-12-10

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