JPH046614B2 - - Google Patents
Info
- Publication number
- JPH046614B2 JPH046614B2 JP29083786A JP29083786A JPH046614B2 JP H046614 B2 JPH046614 B2 JP H046614B2 JP 29083786 A JP29083786 A JP 29083786A JP 29083786 A JP29083786 A JP 29083786A JP H046614 B2 JPH046614 B2 JP H046614B2
- Authority
- JP
- Japan
- Prior art keywords
- piece
- rail
- fixture
- carts
- trolley
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000000694 effects Effects 0.000 description 3
- 230000037431 insertion Effects 0.000 description 3
- 238000003780 insertion Methods 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000003014 reinforcing effect Effects 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP29083786A JPS63143105A (ja) | 1986-12-05 | 1986-12-05 | 回転棚装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP29083786A JPS63143105A (ja) | 1986-12-05 | 1986-12-05 | 回転棚装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63143105A JPS63143105A (ja) | 1988-06-15 |
JPH046614B2 true JPH046614B2 (enrdf_load_stackoverflow) | 1992-02-06 |
Family
ID=17761128
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP29083786A Granted JPS63143105A (ja) | 1986-12-05 | 1986-12-05 | 回転棚装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63143105A (enrdf_load_stackoverflow) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0780521B2 (ja) * | 1989-03-09 | 1995-08-30 | 神鋼電機株式会社 | 無人搬送保管装置 |
US7740437B2 (en) | 2006-09-22 | 2010-06-22 | Asm International N.V. | Processing system with increased cassette storage capacity |
US7585142B2 (en) | 2007-03-16 | 2009-09-08 | Asm America, Inc. | Substrate handling chamber with movable substrate carrier loading platform |
-
1986
- 1986-12-05 JP JP29083786A patent/JPS63143105A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS63143105A (ja) | 1988-06-15 |
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