JPH04655U - - Google Patents
Info
- Publication number
- JPH04655U JPH04655U JP4192490U JP4192490U JPH04655U JP H04655 U JPH04655 U JP H04655U JP 4192490 U JP4192490 U JP 4192490U JP 4192490 U JP4192490 U JP 4192490U JP H04655 U JPH04655 U JP H04655U
- Authority
- JP
- Japan
- Prior art keywords
- sample mounting
- mounting electrode
- plasma
- sample
- reaction chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001035 drying Methods 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000011088 calibration curve Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4192490U JPH04655U (https=) | 1990-04-19 | 1990-04-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4192490U JPH04655U (https=) | 1990-04-19 | 1990-04-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04655U true JPH04655U (https=) | 1992-01-07 |
Family
ID=31553011
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4192490U Pending JPH04655U (https=) | 1990-04-19 | 1990-04-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04655U (https=) |
-
1990
- 1990-04-19 JP JP4192490U patent/JPH04655U/ja active Pending
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