JPH0465002B2 - - Google Patents

Info

Publication number
JPH0465002B2
JPH0465002B2 JP28103985A JP28103985A JPH0465002B2 JP H0465002 B2 JPH0465002 B2 JP H0465002B2 JP 28103985 A JP28103985 A JP 28103985A JP 28103985 A JP28103985 A JP 28103985A JP H0465002 B2 JPH0465002 B2 JP H0465002B2
Authority
JP
Japan
Prior art keywords
silicon nitride
gas
powder
chlorine
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP28103985A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62143805A (ja
Inventor
Toshihiko Arakawa
Hideo Sasaki
Kunyoshi Ueda
Naomichi Sakai
Takaaki Tsukidate
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tosoh Corp
Original Assignee
Tosoh Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tosoh Corp filed Critical Tosoh Corp
Priority to JP28103985A priority Critical patent/JPS62143805A/ja
Publication of JPS62143805A publication Critical patent/JPS62143805A/ja
Publication of JPH0465002B2 publication Critical patent/JPH0465002B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
    • C01B21/0687—After-treatment, e.g. grinding, purification

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Products (AREA)
  • Treating Waste Gases (AREA)
JP28103985A 1985-12-16 1985-12-16 窒化珪素粉末から塩素および／またはフツ素を除去する方法 Granted JPS62143805A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28103985A JPS62143805A (ja) 1985-12-16 1985-12-16 窒化珪素粉末から塩素および／またはフツ素を除去する方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28103985A JPS62143805A (ja) 1985-12-16 1985-12-16 窒化珪素粉末から塩素および／またはフツ素を除去する方法

Publications (2)

Publication Number Publication Date
JPS62143805A JPS62143805A (ja) 1987-06-27
JPH0465002B2 true JPH0465002B2 (enrdf_load_stackoverflow) 1992-10-16

Family

ID=17633442

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28103985A Granted JPS62143805A (ja) 1985-12-16 1985-12-16 窒化珪素粉末から塩素および／またはフツ素を除去する方法

Country Status (1)

Country Link
JP (1) JPS62143805A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0618172A1 (en) * 1993-03-30 1994-10-05 Sumitomo Electric Industries, Ltd. Silicon nitride powder and method for producing the same

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3829504A1 (de) * 1988-08-31 1990-03-01 Bayer Ag Siliciumnitridpulver mit verbesserten oberflaecheneigenschaften sowie verfahren zu deren herstellung
JP7640249B2 (ja) * 2020-11-17 2025-03-05 デンカ株式会社 窒化ケイ素粉末及びその製造方法、並びに、窒化ケイ素焼結体の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0618172A1 (en) * 1993-03-30 1994-10-05 Sumitomo Electric Industries, Ltd. Silicon nitride powder and method for producing the same

Also Published As

Publication number Publication date
JPS62143805A (ja) 1987-06-27

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