JPH0464135B2 - - Google Patents

Info

Publication number
JPH0464135B2
JPH0464135B2 JP59266023A JP26602384A JPH0464135B2 JP H0464135 B2 JPH0464135 B2 JP H0464135B2 JP 59266023 A JP59266023 A JP 59266023A JP 26602384 A JP26602384 A JP 26602384A JP H0464135 B2 JPH0464135 B2 JP H0464135B2
Authority
JP
Japan
Prior art keywords
field
frame
display
wide
narrow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59266023A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61143931A (ja
Inventor
Kenji Obara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP59266023A priority Critical patent/JPS61143931A/ja
Publication of JPS61143931A publication Critical patent/JPS61143931A/ja
Publication of JPH0464135B2 publication Critical patent/JPH0464135B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP59266023A 1984-12-17 1984-12-17 走査形分析装置の多視野観察方式 Granted JPS61143931A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59266023A JPS61143931A (ja) 1984-12-17 1984-12-17 走査形分析装置の多視野観察方式

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59266023A JPS61143931A (ja) 1984-12-17 1984-12-17 走査形分析装置の多視野観察方式

Publications (2)

Publication Number Publication Date
JPS61143931A JPS61143931A (ja) 1986-07-01
JPH0464135B2 true JPH0464135B2 (enExample) 1992-10-14

Family

ID=17425306

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59266023A Granted JPS61143931A (ja) 1984-12-17 1984-12-17 走査形分析装置の多視野観察方式

Country Status (1)

Country Link
JP (1) JPS61143931A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11265674A (ja) * 1998-03-18 1999-09-28 Hitachi Ltd 荷電粒子線照射装置

Also Published As

Publication number Publication date
JPS61143931A (ja) 1986-07-01

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