JPH0464019B2 - - Google Patents
Info
- Publication number
- JPH0464019B2 JPH0464019B2 JP57070703A JP7070382A JPH0464019B2 JP H0464019 B2 JPH0464019 B2 JP H0464019B2 JP 57070703 A JP57070703 A JP 57070703A JP 7070382 A JP7070382 A JP 7070382A JP H0464019 B2 JPH0464019 B2 JP H0464019B2
- Authority
- JP
- Japan
- Prior art keywords
- light beam
- wave plate
- polarized
- polarizing prism
- plane mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7070382A JPS58187830A (ja) | 1982-04-27 | 1982-04-27 | 波長板測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7070382A JPS58187830A (ja) | 1982-04-27 | 1982-04-27 | 波長板測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58187830A JPS58187830A (ja) | 1983-11-02 |
| JPH0464019B2 true JPH0464019B2 (enExample) | 1992-10-13 |
Family
ID=13439222
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7070382A Granted JPS58187830A (ja) | 1982-04-27 | 1982-04-27 | 波長板測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58187830A (enExample) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5840135B2 (ja) * | 1972-09-06 | 1983-09-03 | 工業技術院長 | ヘンコウメン ノ カイテンカクソクテイホウ |
| JPS5246827B2 (enExample) * | 1973-11-12 | 1977-11-28 |
-
1982
- 1982-04-27 JP JP7070382A patent/JPS58187830A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58187830A (ja) | 1983-11-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5517312A (en) | Device for measuring the thickness of thin films | |
| US20070258092A1 (en) | Optical measurement device and method | |
| KR20010032235A (ko) | 광학각도 특성 측정장치 | |
| JPH0554902B2 (enExample) | ||
| JPH045922B2 (enExample) | ||
| JPH0611442A (ja) | 赤外線光学装置 | |
| JPH0464019B2 (enExample) | ||
| US4105335A (en) | Interferometric optical phase discrimination apparatus | |
| JPH095018A (ja) | 移動量測長装置 | |
| JP3739121B2 (ja) | レーザ測長機 | |
| JPH11101739A (ja) | エリプソメトリ装置 | |
| JPH0783828A (ja) | 角度可変絶対反射率測定装置 | |
| SU1727105A1 (ru) | Автоколлимационное устройство | |
| JP2000205998A (ja) | 反射偏芯測定装置 | |
| JP3227336B2 (ja) | ガス濃度測定装置 | |
| JP2000241143A (ja) | 角度センサ | |
| JPH0444688B2 (enExample) | ||
| JPH0522213B2 (enExample) | ||
| SU587325A1 (ru) | Пол ризационное устройство дл измерени углов скручивани объекта | |
| SU1021959A1 (ru) | Устройство дл измерени пол ризационных характеристик анизотропных сред | |
| JP2521324Y2 (ja) | 干渉計 | |
| JP3517506B2 (ja) | 光学式変位測定装置 | |
| SU547632A1 (ru) | Устройство дл измерени углов наклона | |
| JP2565492Y2 (ja) | 偏光波測定装置 | |
| JPS6244215B2 (enExample) |