JPH0463134U - - Google Patents

Info

Publication number
JPH0463134U
JPH0463134U JP10430890U JP10430890U JPH0463134U JP H0463134 U JPH0463134 U JP H0463134U JP 10430890 U JP10430890 U JP 10430890U JP 10430890 U JP10430890 U JP 10430890U JP H0463134 U JPH0463134 U JP H0463134U
Authority
JP
Japan
Prior art keywords
wiring board
contact
insulating film
contact holder
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10430890U
Other languages
English (en)
Japanese (ja)
Other versions
JP2533430Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990104308U priority Critical patent/JP2533430Y2/ja
Publication of JPH0463134U publication Critical patent/JPH0463134U/ja
Application granted granted Critical
Publication of JP2533430Y2 publication Critical patent/JP2533430Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1990104308U 1990-10-03 1990-10-03 Ｉｃウエーハ試験用プローブカード Expired - Lifetime JP2533430Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990104308U JP2533430Y2 (ja) 1990-10-03 1990-10-03 Ｉｃウエーハ試験用プローブカード

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990104308U JP2533430Y2 (ja) 1990-10-03 1990-10-03 Ｉｃウエーハ試験用プローブカード

Publications (2)

Publication Number Publication Date
JPH0463134U true JPH0463134U (ko) 1992-05-29
JP2533430Y2 JP2533430Y2 (ja) 1997-04-23

Family

ID=31849532

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990104308U Expired - Lifetime JP2533430Y2 (ja) 1990-10-03 1990-10-03 Ｉｃウエーハ試験用プローブカード

Country Status (1)

Country Link
JP (1) JP2533430Y2 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0774219A (ja) * 1993-08-31 1995-03-17 Kurisutaru Device:Kk プローブ基板およびその製造方法並びにプローブ装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS644042A (en) * 1987-06-09 1989-01-09 Tektronix Inc Prober
JPH01120838A (ja) * 1987-08-28 1989-05-12 Tektronix Inc プロープ
JPH02163664A (ja) * 1988-10-11 1990-06-22 Hewlett Packard Co <Hp> 自動補償装置及び自己レベリング膜プローブ装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS644042A (en) * 1987-06-09 1989-01-09 Tektronix Inc Prober
JPH01120838A (ja) * 1987-08-28 1989-05-12 Tektronix Inc プロープ
JPH02163664A (ja) * 1988-10-11 1990-06-22 Hewlett Packard Co <Hp> 自動補償装置及び自己レベリング膜プローブ装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0774219A (ja) * 1993-08-31 1995-03-17 Kurisutaru Device:Kk プローブ基板およびその製造方法並びにプローブ装置

Also Published As

Publication number Publication date
JP2533430Y2 (ja) 1997-04-23

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Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term