JPH0461334B2 - - Google Patents
Info
- Publication number
- JPH0461334B2 JPH0461334B2 JP24241984A JP24241984A JPH0461334B2 JP H0461334 B2 JPH0461334 B2 JP H0461334B2 JP 24241984 A JP24241984 A JP 24241984A JP 24241984 A JP24241984 A JP 24241984A JP H0461334 B2 JPH0461334 B2 JP H0461334B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- light
- image sensor
- scanning
- linear image
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000003384 imaging method Methods 0.000 claims description 40
- 230000003287 optical effect Effects 0.000 claims description 23
- 238000001514 detection method Methods 0.000 claims description 16
- 230000004907 flux Effects 0.000 claims description 3
- 238000010226 confocal imaging Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 230000007547 defect Effects 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000009825 accumulation Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
Landscapes
- Microscoopes, Condenser (AREA)
- Automatic Focus Adjustment (AREA)
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59242419A JPS61121022A (ja) | 1984-11-19 | 1984-11-19 | 走査型顕微鏡撮像装置 |
US06/777,342 US4736110A (en) | 1984-09-28 | 1985-09-18 | Image pick-up apparatus |
DE8585306813T DE3586383T2 (de) | 1984-09-28 | 1985-09-25 | Bildaufnahmegeraet. |
EP85306813A EP0176358B1 (en) | 1984-09-28 | 1985-09-25 | Image pick-up apparatus |
CA000491791A CA1266324A (en) | 1984-09-28 | 1985-09-27 | Image pick-up apparatus |
KR1019850007160A KR910000617B1 (ko) | 1984-09-28 | 1985-09-27 | 영상 픽업 장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59242419A JPS61121022A (ja) | 1984-11-19 | 1984-11-19 | 走査型顕微鏡撮像装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61121022A JPS61121022A (ja) | 1986-06-09 |
JPH0461334B2 true JPH0461334B2 (enrdf_load_stackoverflow) | 1992-09-30 |
Family
ID=17088836
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59242419A Granted JPS61121022A (ja) | 1984-09-28 | 1984-11-19 | 走査型顕微鏡撮像装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61121022A (enrdf_load_stackoverflow) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL8700612A (nl) * | 1987-03-13 | 1988-10-03 | Tno | Confocale laserscanning microscoop. |
JP2006343595A (ja) * | 2005-06-09 | 2006-12-21 | Sumitomo Osaka Cement Co Ltd | 共焦点型検査装置 |
-
1984
- 1984-11-19 JP JP59242419A patent/JPS61121022A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS61121022A (ja) | 1986-06-09 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |