JPH0461334B2 - - Google Patents
Info
- Publication number
- JPH0461334B2 JPH0461334B2 JP24241984A JP24241984A JPH0461334B2 JP H0461334 B2 JPH0461334 B2 JP H0461334B2 JP 24241984 A JP24241984 A JP 24241984A JP 24241984 A JP24241984 A JP 24241984A JP H0461334 B2 JPH0461334 B2 JP H0461334B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- light
- image sensor
- scanning
- linear image
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000003384 imaging method Methods 0.000 claims description 40
- 230000003287 optical effect Effects 0.000 claims description 23
- 238000001514 detection method Methods 0.000 claims description 16
- 230000004907 flux Effects 0.000 claims description 3
- 238000010226 confocal imaging Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 230000007547 defect Effects 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000009825 accumulation Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
Landscapes
- Microscoopes, Condenser (AREA)
- Automatic Focus Adjustment (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59242419A JPS61121022A (ja) | 1984-11-19 | 1984-11-19 | 走査型顕微鏡撮像装置 |
| US06/777,342 US4736110A (en) | 1984-09-28 | 1985-09-18 | Image pick-up apparatus |
| EP85306813A EP0176358B1 (en) | 1984-09-28 | 1985-09-25 | Image pick-up apparatus |
| DE8585306813T DE3586383T2 (de) | 1984-09-28 | 1985-09-25 | Bildaufnahmegeraet. |
| CA000491791A CA1266324A (en) | 1984-09-28 | 1985-09-27 | Image pick-up apparatus |
| KR1019850007160A KR910000617B1 (ko) | 1984-09-28 | 1985-09-27 | 영상 픽업 장치 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59242419A JPS61121022A (ja) | 1984-11-19 | 1984-11-19 | 走査型顕微鏡撮像装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61121022A JPS61121022A (ja) | 1986-06-09 |
| JPH0461334B2 true JPH0461334B2 (cs) | 1992-09-30 |
Family
ID=17088836
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59242419A Granted JPS61121022A (ja) | 1984-09-28 | 1984-11-19 | 走査型顕微鏡撮像装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61121022A (cs) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL8700612A (nl) * | 1987-03-13 | 1988-10-03 | Tno | Confocale laserscanning microscoop. |
| JP2006343595A (ja) * | 2005-06-09 | 2006-12-21 | Sumitomo Osaka Cement Co Ltd | 共焦点型検査装置 |
-
1984
- 1984-11-19 JP JP59242419A patent/JPS61121022A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61121022A (ja) | 1986-06-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR910000617B1 (ko) | 영상 픽업 장치 | |
| US5132526A (en) | Confocal scanning microscope having a signal output regulating means | |
| US6236454B1 (en) | Multiple beam scanner for an inspection system | |
| US4301363A (en) | Alignment device | |
| JPH0618785A (ja) | 共焦点型レーザ走査透過顕微鏡 | |
| US5084612A (en) | Imaging method for scanning microscopes, and confocal scanning microscope | |
| JP3978528B2 (ja) | パターン欠陥検査装置及びレーザ顕微鏡 | |
| JPS6275233A (ja) | 光学式板状素材モニタ装置 | |
| JP3509088B2 (ja) | 3次元形状計測用光学装置 | |
| JPH0438325B2 (cs) | ||
| JPS62217218A (ja) | 透過型顕微鏡撮像装置 | |
| JPH0461334B2 (cs) | ||
| JPH0547039B2 (cs) | ||
| JPH0453286B2 (cs) | ||
| US4048492A (en) | Method and apparatus for automatic focusing an optical system with a scanning grating | |
| JPH0980315A (ja) | ニポウディスク型光スキャナ装置 | |
| JP4332730B2 (ja) | レーザ共焦点顕微鏡 | |
| JPS6218179A (ja) | 撮像装置 | |
| JPS62209510A (ja) | 撮像装置 | |
| JPH0547038B2 (cs) | ||
| JPH03251811A (ja) | 走査型顕微鏡の撮像方法 | |
| JPH07113613A (ja) | 撮像装置 | |
| JPS6210972A (ja) | 撮像装置 | |
| JPH0682174B2 (ja) | 透過型顕微鏡撮像装置 | |
| JPS62237870A (ja) | 撮像装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |