JPH0460299B2 - - Google Patents

Info

Publication number
JPH0460299B2
JPH0460299B2 JP61311809A JP31180986A JPH0460299B2 JP H0460299 B2 JPH0460299 B2 JP H0460299B2 JP 61311809 A JP61311809 A JP 61311809A JP 31180986 A JP31180986 A JP 31180986A JP H0460299 B2 JPH0460299 B2 JP H0460299B2
Authority
JP
Japan
Prior art keywords
sample
particle beam
introduction tube
primary particle
irradiation surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP61311809A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63168957A (ja
Inventor
Tsutomu Kobayashi
Tokuo Mizuno
Eiji Kubota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP61311809A priority Critical patent/JPS63168957A/ja
Publication of JPS63168957A publication Critical patent/JPS63168957A/ja
Publication of JPH0460299B2 publication Critical patent/JPH0460299B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
JP61311809A 1986-12-27 1986-12-27 質量分析装置用イオン源 Granted JPS63168957A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61311809A JPS63168957A (ja) 1986-12-27 1986-12-27 質量分析装置用イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61311809A JPS63168957A (ja) 1986-12-27 1986-12-27 質量分析装置用イオン源

Publications (2)

Publication Number Publication Date
JPS63168957A JPS63168957A (ja) 1988-07-12
JPH0460299B2 true JPH0460299B2 (cs) 1992-09-25

Family

ID=18021683

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61311809A Granted JPS63168957A (ja) 1986-12-27 1986-12-27 質量分析装置用イオン源

Country Status (1)

Country Link
JP (1) JPS63168957A (cs)

Also Published As

Publication number Publication date
JPS63168957A (ja) 1988-07-12

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