Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asahi Kasei Corp
Hitachi Ltd
Original Assignee
Aloka Co Ltd
Asahi Kasei Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aloka Co Ltd, Asahi Kasei Kogyo KKfiledCriticalAloka Co Ltd
Priority to JP27644184ApriorityCriticalpatent/JPS61155980A/ja
Publication of JPS61155980ApublicationCriticalpatent/JPS61155980A/ja
Publication of JPH0460233B2publicationCriticalpatent/JPH0460233B2/ja