JPH0456452B2 - - Google Patents

Info

Publication number
JPH0456452B2
JPH0456452B2 JP58214502A JP21450283A JPH0456452B2 JP H0456452 B2 JPH0456452 B2 JP H0456452B2 JP 58214502 A JP58214502 A JP 58214502A JP 21450283 A JP21450283 A JP 21450283A JP H0456452 B2 JPH0456452 B2 JP H0456452B2
Authority
JP
Japan
Prior art keywords
holder
basket
wafer
box
dryer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58214502A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60106135A (ja
Inventor
Shuji Tabuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP21450283A priority Critical patent/JPS60106135A/ja
Publication of JPS60106135A publication Critical patent/JPS60106135A/ja
Publication of JPH0456452B2 publication Critical patent/JPH0456452B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP21450283A 1983-11-15 1983-11-15 乾燥装置 Granted JPS60106135A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21450283A JPS60106135A (ja) 1983-11-15 1983-11-15 乾燥装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21450283A JPS60106135A (ja) 1983-11-15 1983-11-15 乾燥装置

Publications (2)

Publication Number Publication Date
JPS60106135A JPS60106135A (ja) 1985-06-11
JPH0456452B2 true JPH0456452B2 (enrdf_load_stackoverflow) 1992-09-08

Family

ID=16656771

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21450283A Granted JPS60106135A (ja) 1983-11-15 1983-11-15 乾燥装置

Country Status (1)

Country Link
JP (1) JPS60106135A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4777732A (en) 1986-06-12 1988-10-18 Oki Electric Industry Co., Ltd. Wafer centrifugal drying apparatus
JP3290667B2 (ja) * 1996-04-22 2002-06-10 ステアーグ ミクロテヒ ゲゼルシャフト ミット ベシュレンクテル ハフツング 流体容器にて基板を処理するための装置と方法
US5954068A (en) * 1996-12-06 1999-09-21 Steag Microtech Gmbh Device and method for treating substrates in a fluid container
KR100497999B1 (ko) * 2002-11-08 2005-07-01 (주)케이.씨.텍 웨이퍼 건조 방법 및 장치
CN103736687B (zh) * 2014-01-17 2015-09-16 安徽科技学院 一种石英砂清洗装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59166443U (ja) * 1983-04-25 1984-11-08 日本電気ホームエレクトロニクス株式会社 遠心乾燥機

Also Published As

Publication number Publication date
JPS60106135A (ja) 1985-06-11

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