JPH0455214B2 - - Google Patents

Info

Publication number
JPH0455214B2
JPH0455214B2 JP58107873A JP10787383A JPH0455214B2 JP H0455214 B2 JPH0455214 B2 JP H0455214B2 JP 58107873 A JP58107873 A JP 58107873A JP 10787383 A JP10787383 A JP 10787383A JP H0455214 B2 JPH0455214 B2 JP H0455214B2
Authority
JP
Japan
Prior art keywords
seal
vacuum
roll
sealing
case
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58107873A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60944A (ja
Inventor
Susumu Ueno
Koichi Kuroda
Hajime Kitamura
Masaya Tokai
Kenichi Kato
Nobuyuki Hiraishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Hitachi Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd, Hitachi Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP10787383A priority Critical patent/JPS60944A/ja
Publication of JPS60944A publication Critical patent/JPS60944A/ja
Publication of JPH0455214B2 publication Critical patent/JPH0455214B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Vapour Deposition (AREA)
JP10787383A 1983-06-17 1983-06-17 真空連続処理装置 Granted JPS60944A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10787383A JPS60944A (ja) 1983-06-17 1983-06-17 真空連続処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10787383A JPS60944A (ja) 1983-06-17 1983-06-17 真空連続処理装置

Publications (2)

Publication Number Publication Date
JPS60944A JPS60944A (ja) 1985-01-07
JPH0455214B2 true JPH0455214B2 (enrdf_load_html_response) 1992-09-02

Family

ID=14470249

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10787383A Granted JPS60944A (ja) 1983-06-17 1983-06-17 真空連続処理装置

Country Status (1)

Country Link
JP (1) JPS60944A (enrdf_load_html_response)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5773025A (en) * 1980-10-27 1982-05-07 Shin Etsu Chem Co Ltd Apparatus for continuous vacuum treatment
JPS57195745A (en) * 1981-05-29 1982-12-01 Shin Etsu Chem Co Ltd Sealing device in continuous vacuum treatment apparatus

Also Published As

Publication number Publication date
JPS60944A (ja) 1985-01-07

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