JPH0455001B2 - - Google Patents

Info

Publication number
JPH0455001B2
JPH0455001B2 JP60130646A JP13064685A JPH0455001B2 JP H0455001 B2 JPH0455001 B2 JP H0455001B2 JP 60130646 A JP60130646 A JP 60130646A JP 13064685 A JP13064685 A JP 13064685A JP H0455001 B2 JPH0455001 B2 JP H0455001B2
Authority
JP
Japan
Prior art keywords
piezoelectric
resin
cavity
forming material
resin coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60130646A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61288506A (ja
Inventor
Manabu Sumida
Yoshimasa Shiraishi
Hidemoto Kawahara
Hiroshi Seto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP13064685A priority Critical patent/JPS61288506A/ja
Publication of JPS61288506A publication Critical patent/JPS61288506A/ja
Publication of JPH0455001B2 publication Critical patent/JPH0455001B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP13064685A 1985-06-14 1985-06-14 圧電部品素子およびそれを用いた圧電部品の製造方法 Granted JPS61288506A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13064685A JPS61288506A (ja) 1985-06-14 1985-06-14 圧電部品素子およびそれを用いた圧電部品の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13064685A JPS61288506A (ja) 1985-06-14 1985-06-14 圧電部品素子およびそれを用いた圧電部品の製造方法

Publications (2)

Publication Number Publication Date
JPS61288506A JPS61288506A (ja) 1986-12-18
JPH0455001B2 true JPH0455001B2 (enrdf_load_stackoverflow) 1992-09-02

Family

ID=15039231

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13064685A Granted JPS61288506A (ja) 1985-06-14 1985-06-14 圧電部品素子およびそれを用いた圧電部品の製造方法

Country Status (1)

Country Link
JP (1) JPS61288506A (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2931592B2 (ja) * 1987-08-20 1999-08-09 ティーディーケイ株式会社 エネルギ閉じ込め型圧電振動子及びその製造方法
JP2954233B2 (ja) * 1989-04-12 1999-09-27 ティーディーケイ株式会社 圧電振動子の共振周波数調整方法
JP3261922B2 (ja) * 1994-07-26 2002-03-04 株式会社村田製作所 圧電共振部品の製造方法
JP5036215B2 (ja) * 2006-05-19 2012-09-26 日本碍子株式会社 圧電薄膜共振子及び圧電薄膜共振子の共振周波数の調整方法
CN204721603U (zh) * 2012-12-25 2015-10-21 京瓷株式会社 声音发生器、声音发生装置以及电子设备
FR3053532B1 (fr) * 2016-06-30 2018-11-16 Soitec Structure hybride pour dispositif a ondes acoustiques de surface

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5642415A (en) * 1979-09-14 1981-04-20 Tdk Corp Manufacture of piezoelectric resonator

Also Published As

Publication number Publication date
JPS61288506A (ja) 1986-12-18

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term