JPH0454371B2 - - Google Patents
Info
- Publication number
- JPH0454371B2 JPH0454371B2 JP57084765A JP8476582A JPH0454371B2 JP H0454371 B2 JPH0454371 B2 JP H0454371B2 JP 57084765 A JP57084765 A JP 57084765A JP 8476582 A JP8476582 A JP 8476582A JP H0454371 B2 JPH0454371 B2 JP H0454371B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- crystal growth
- growth apparatus
- growth
- graphite
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02623—Liquid deposition
- H01L21/02628—Liquid deposition using solutions
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Led Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57084765A JPS58202524A (ja) | 1982-05-21 | 1982-05-21 | 結晶成長装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57084765A JPS58202524A (ja) | 1982-05-21 | 1982-05-21 | 結晶成長装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58202524A JPS58202524A (ja) | 1983-11-25 |
| JPH0454371B2 true JPH0454371B2 (enrdf_load_stackoverflow) | 1992-08-31 |
Family
ID=13839772
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57084765A Granted JPS58202524A (ja) | 1982-05-21 | 1982-05-21 | 結晶成長装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58202524A (enrdf_load_stackoverflow) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5941959B2 (ja) * | 1981-01-29 | 1984-10-11 | 株式会社東芝 | 液相エピタキシャル成長装置 |
-
1982
- 1982-05-21 JP JP57084765A patent/JPS58202524A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58202524A (ja) | 1983-11-25 |
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