JPH058154B2 - - Google Patents

Info

Publication number
JPH058154B2
JPH058154B2 JP11925387A JP11925387A JPH058154B2 JP H058154 B2 JPH058154 B2 JP H058154B2 JP 11925387 A JP11925387 A JP 11925387A JP 11925387 A JP11925387 A JP 11925387A JP H058154 B2 JPH058154 B2 JP H058154B2
Authority
JP
Japan
Prior art keywords
growth
substrate
solution
temperature
epitaxial growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP11925387A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63285190A (ja
Inventor
Taiichiro Konno
Tsunehiro Unno
Mineo Wajima
Hisafumi Tate
Hiroshi Sugimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Cable Ltd
Original Assignee
Hitachi Cable Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Cable Ltd filed Critical Hitachi Cable Ltd
Priority to JP11925387A priority Critical patent/JPS63285190A/ja
Publication of JPS63285190A publication Critical patent/JPS63285190A/ja
Publication of JPH058154B2 publication Critical patent/JPH058154B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP11925387A 1987-05-15 1987-05-15 液相エピタキシャル成長方法 Granted JPS63285190A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11925387A JPS63285190A (ja) 1987-05-15 1987-05-15 液相エピタキシャル成長方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11925387A JPS63285190A (ja) 1987-05-15 1987-05-15 液相エピタキシャル成長方法

Publications (2)

Publication Number Publication Date
JPS63285190A JPS63285190A (ja) 1988-11-22
JPH058154B2 true JPH058154B2 (enrdf_load_stackoverflow) 1993-02-01

Family

ID=14756750

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11925387A Granted JPS63285190A (ja) 1987-05-15 1987-05-15 液相エピタキシャル成長方法

Country Status (1)

Country Link
JP (1) JPS63285190A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS63285190A (ja) 1988-11-22

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