JPH0453558Y2 - - Google Patents

Info

Publication number
JPH0453558Y2
JPH0453558Y2 JP16593787U JP16593787U JPH0453558Y2 JP H0453558 Y2 JPH0453558 Y2 JP H0453558Y2 JP 16593787 U JP16593787 U JP 16593787U JP 16593787 U JP16593787 U JP 16593787U JP H0453558 Y2 JPH0453558 Y2 JP H0453558Y2
Authority
JP
Japan
Prior art keywords
leak
vacuum
pump
vacuum chamber
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16593787U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0170143U (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16593787U priority Critical patent/JPH0453558Y2/ja
Publication of JPH0170143U publication Critical patent/JPH0170143U/ja
Application granted granted Critical
Publication of JPH0453558Y2 publication Critical patent/JPH0453558Y2/ja
Expired legal-status Critical Current

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Landscapes

  • Examining Or Testing Airtightness (AREA)
JP16593787U 1987-10-29 1987-10-29 Expired JPH0453558Y2 (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16593787U JPH0453558Y2 (enrdf_load_html_response) 1987-10-29 1987-10-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16593787U JPH0453558Y2 (enrdf_load_html_response) 1987-10-29 1987-10-29

Publications (2)

Publication Number Publication Date
JPH0170143U JPH0170143U (enrdf_load_html_response) 1989-05-10
JPH0453558Y2 true JPH0453558Y2 (enrdf_load_html_response) 1992-12-16

Family

ID=31452873

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16593787U Expired JPH0453558Y2 (enrdf_load_html_response) 1987-10-29 1987-10-29

Country Status (1)

Country Link
JP (1) JPH0453558Y2 (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPH0170143U (enrdf_load_html_response) 1989-05-10

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