JPH0452401B2 - - Google Patents
Info
- Publication number
- JPH0452401B2 JPH0452401B2 JP9937083A JP9937083A JPH0452401B2 JP H0452401 B2 JPH0452401 B2 JP H0452401B2 JP 9937083 A JP9937083 A JP 9937083A JP 9937083 A JP9937083 A JP 9937083A JP H0452401 B2 JPH0452401 B2 JP H0452401B2
- Authority
- JP
- Japan
- Prior art keywords
- wavelength
- interference
- light
- measured
- light intensity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004364 calculation method Methods 0.000 claims description 20
- 238000001514 detection method Methods 0.000 claims description 20
- 230000001427 coherent effect Effects 0.000 claims description 15
- 238000000926 separation method Methods 0.000 claims description 10
- 230000001678 irradiating effect Effects 0.000 claims description 6
- 230000002452 interceptive effect Effects 0.000 claims description 3
- 239000011521 glass Substances 0.000 description 28
- 238000005259 measurement Methods 0.000 description 14
- 230000003287 optical effect Effects 0.000 description 6
- 230000000903 blocking effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 206010041662 Splinter Diseases 0.000 description 1
- 238000013480 data collection Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
- G11B5/58—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B17/00—Guiding record carriers not specifically of filamentary or web form, or of supports therefor
- G11B17/32—Maintaining desired spacing between record carrier and head, e.g. by fluid-dynamic spacing
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9937083A JPS59225308A (ja) | 1983-06-06 | 1983-06-06 | 微小間隔測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9937083A JPS59225308A (ja) | 1983-06-06 | 1983-06-06 | 微小間隔測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59225308A JPS59225308A (ja) | 1984-12-18 |
| JPH0452401B2 true JPH0452401B2 (en, 2012) | 1992-08-21 |
Family
ID=14245650
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9937083A Granted JPS59225308A (ja) | 1983-06-06 | 1983-06-06 | 微小間隔測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59225308A (en, 2012) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61153505A (ja) * | 1984-12-27 | 1986-07-12 | Nippon Telegr & Teleph Corp <Ntt> | 微小すきま測定装置 |
| JPS62174212U (en, 2012) * | 1986-04-25 | 1987-11-05 | ||
| US5457534A (en) * | 1991-10-23 | 1995-10-10 | Phase Metrics | Method and apparatus to calibrate intensity and determine fringe order for interferometric measurement of small spacings |
-
1983
- 1983-06-06 JP JP9937083A patent/JPS59225308A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59225308A (ja) | 1984-12-18 |
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