JPH0451861Y2 - - Google Patents

Info

Publication number
JPH0451861Y2
JPH0451861Y2 JP6580986U JP6580986U JPH0451861Y2 JP H0451861 Y2 JPH0451861 Y2 JP H0451861Y2 JP 6580986 U JP6580986 U JP 6580986U JP 6580986 U JP6580986 U JP 6580986U JP H0451861 Y2 JPH0451861 Y2 JP H0451861Y2
Authority
JP
Japan
Prior art keywords
vacuum chamber
automatic
flow rate
detection device
control valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6580986U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62179029U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6580986U priority Critical patent/JPH0451861Y2/ja
Publication of JPS62179029U publication Critical patent/JPS62179029U/ja
Application granted granted Critical
Publication of JPH0451861Y2 publication Critical patent/JPH0451861Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Flow Control (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP6580986U 1986-04-30 1986-04-30 Expired JPH0451861Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6580986U JPH0451861Y2 (enrdf_load_stackoverflow) 1986-04-30 1986-04-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6580986U JPH0451861Y2 (enrdf_load_stackoverflow) 1986-04-30 1986-04-30

Publications (2)

Publication Number Publication Date
JPS62179029U JPS62179029U (enrdf_load_stackoverflow) 1987-11-13
JPH0451861Y2 true JPH0451861Y2 (enrdf_load_stackoverflow) 1992-12-07

Family

ID=30903227

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6580986U Expired JPH0451861Y2 (enrdf_load_stackoverflow) 1986-04-30 1986-04-30

Country Status (1)

Country Link
JP (1) JPH0451861Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0815542B2 (ja) * 1988-06-24 1996-02-21 富士通株式会社 制御機能付きバルブ及び減圧室の排気方法

Also Published As

Publication number Publication date
JPS62179029U (enrdf_load_stackoverflow) 1987-11-13

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