JPH0451762B2 - - Google Patents

Info

Publication number
JPH0451762B2
JPH0451762B2 JP25628085A JP25628085A JPH0451762B2 JP H0451762 B2 JPH0451762 B2 JP H0451762B2 JP 25628085 A JP25628085 A JP 25628085A JP 25628085 A JP25628085 A JP 25628085A JP H0451762 B2 JPH0451762 B2 JP H0451762B2
Authority
JP
Japan
Prior art keywords
electrode
output
electrodes
displacement
movable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP25628085A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62116202A (ja
Inventor
Susumu Fukushima
Akio Takamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ono Sokki Co Ltd
Original Assignee
Ono Sokki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ono Sokki Co Ltd filed Critical Ono Sokki Co Ltd
Priority to JP25628085A priority Critical patent/JPS62116202A/ja
Publication of JPS62116202A publication Critical patent/JPS62116202A/ja
Publication of JPH0451762B2 publication Critical patent/JPH0451762B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
JP25628085A 1985-11-15 1985-11-15 静電容量式変位検出器 Granted JPS62116202A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25628085A JPS62116202A (ja) 1985-11-15 1985-11-15 静電容量式変位検出器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25628085A JPS62116202A (ja) 1985-11-15 1985-11-15 静電容量式変位検出器

Publications (2)

Publication Number Publication Date
JPS62116202A JPS62116202A (ja) 1987-05-27
JPH0451762B2 true JPH0451762B2 (enExample) 1992-08-20

Family

ID=17290450

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25628085A Granted JPS62116202A (ja) 1985-11-15 1985-11-15 静電容量式変位検出器

Country Status (1)

Country Link
JP (1) JPS62116202A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2828631B2 (ja) * 1987-03-13 1998-11-25 三洋電機株式会社 超電導物質の製造方法
JPH01277717A (ja) * 1988-04-18 1989-11-08 Schutz Im & Exporthandl Bv 容量変位メータ

Also Published As

Publication number Publication date
JPS62116202A (ja) 1987-05-27

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